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All our membrane types and membrane area configurations have been robustness tested by application of differential pressure. In these tests, the membrane was oriented such that differential pressure forced the membrane against the chip frame. In the opposite orientation where the membrane would be delaminated from the chip frame, the pressure tolerance would be several times lower.
All values below are the maximum tolerated differential pressure reported as mean +/- standard deviation (n = 3), in units of PSI.
Window Sizes:
Pure Silicon | Thickness | ||||
5 nm | 9 nm | 15 nm | 30 nm | 35 nm | |
9 Windows | 3.90 ± 0.71 | 11.57 ± 0.26 | |||
9 Small Windows | 2.30 ± 0.29 | ||||
2 Slots | 2.60 ± 0.99 | 2.53 ± 0.40 | 14.73 ± 2.61 | ||
Single 25 Micron | 35.33 ± 0.78 | ||||
Nanoporous - 9 Windows | 16.47 ± 0.95 | ||||
Nanoporous - Single 500 Micron | 3.33 ± 0.17 | ||||
Single Crystal - 9 Windows | 34.03 ± 1.07 |
Silicon Nitride | Thickness | |||
5 nm | 10 nm | 20 nm | 50 nm | |
9 Windows | 6.13 ± 2.00 | 40+ | 40+ | |
9 Small Windows | 37.30 ± 3.08 | |||
9 Large Windows | 11.57 ± 0.66 | |||
2 Slots | 6.53 ± 0.24 | |||
Single 25 Micron | 40+ | |||
Single 100 Micron | 25.13 ± 4.45 | |||
Single 500 Micron | 9.90 ± 0.36 | 13.37± 1.25 | ||
Single 1000 Micron | 7.80 ± 0.29 | |||
Microporous - Single 500 Micron | 5.37 ± 0.37 | 10.13 ± 0.52 | ||
Nanoporous - Single 500 Micron | 5.33 ± 1.39 |
Silicon Dioxide | Thickness | ||
20 nm | 40 nm | 75 nm | |
9 Windows | 11.33 ± 0.37 | 12.73 ± 0.68 | |
G-Flat™ Single 1000 Micron | 2.93 ± 0.17 |
X-Ray Windows | Thickness | |||
50 nm | 100 nm | 200 nm | 300 nm | |
Single 500 Micron | 20.47 ± 0.33 | 24.40 ± 0.99 | ||
Single 1000 Micron | 9.67 ± 0.12 | 13.13 ± 0.09 | ||
Single 1500 Micron | 6.97 ± 0.25 | |||
Single 2500 Micron | 4.07 ± 0.09 | |||
G-Flat™ Single 500 Micron | 5.60 ± 0.29 | 11.53 ± 0.12 | ||
G-Flat™ Single 1000 Micron | 2.63 ± 0.05 |
Silicon Nitride TEM Window Grids, Pure Silicon TEM Window Grids, Silicon Dioxide TEM Window Grids, X-Ray Window Grids