SEM Calibration Specimens: Magnification Calibration
Chessy; Test Specimen
A precise SEM test specimen for most all calibration applications.
The Structure
There are more than 1.6 million gold squares of 1µ size on silicon forming a 4-fold checkerboard pattern in an area of 5 mm square. The smallest metric checkerboard has a size of 10 x 10µ. Such checkerboards form larger metric checkerboards of 100 x 100µ - These again form checkerboards of 1 mm square. Finally, such 1mm squares are arranged in the same manner covering a field of 5 mm square.
The edges of the empty corners in 0.1 and 1 mm checkerboards are additionally marked. The surrounding frame is 10µ wide and has an outer side length of 5.04 mm. The pattern was directly written by e-beam lithography using the new ZBA 31/32 from JENOPTIK.
Applications
Imaging
- Calibration of SEM magnification in all ranges between 20x and 50,000x.
- Check of equal scaling in X and Y
- Check of orthogonality and distortion
- Resolution test at high magnification on the edges of the gold squares.
Motorized Stages
(especially for use with ESCOSY)
- Measurement of reproducibility using stored position
- Calibration of readings in X and Y
- Calibration of stage orthogonality
- Measurement of absolute positioning accuracy
Experimental Electron Lithography
(use with attachment ELPHY
or PROXY-WRITER)
- Generation of metric writing fields between 10µ and 5mm square via mark recognition and alignment
- Measurement of SEM distortion at any magnification via mark recognition on different places
- Check of defocusing in outer areas.
| 79503-01 | Chessy Test Specimen | 7:20 corrected in sqleach | 1750.00 |  |
Particle-Size
Standards
Please see listing in TEM and STEM Magnification Calibration Specimens
SIRA Calibration Specimens
The SIRA calibration specimens have been specifically prepared for SEM. These are metal replicas of cross ruled gratings of a area 60mm2 with 19.7 lines/mm for low magnification , and 2160 lines/mm for high magnification calibrations, with an accuracy of ±1%.
This specimen can be used for specimen stage tilt control calibration and to check on innate distortion. A certificate of calibration can be supplied at an extra cost.
Example Certificate of Calibration
| 79505-02 | SIRA Test Specimens on 12.3105mm Pin Stub | 2/set | 525.00 | |
| 79505-03 | SIRA Test Specimens on any mount (Specify) | 2/set | 550.00 | |
| 79505-04 | Calibration Certificate for SIRA Test Specimen | each | 550.00* | |
*The basic reference specimen is calibrated by the National Physical Laboratory of England, by laser beam interferometry.
Article of Interest
Inspecting the SEM While in Operation
