SEM Resolution and Gray Level Test Specimens
SEM resolution is tested in terms of a combination of criteria, namely resolved gaps and the number of gray levels in the image. This is to ensure that the resolution has not been distorted by using the contrast to maximize visibility of edges. High resolution images ideally should show fine detail together with a lack of noise evidenced by a good range of gray levels.
1. High
Resolution Gold on Carbon Test
For resolution test of SE and BSE imaging and also for chemical mapping in high-resolution systems such as an Auger scanning instrument. Each test specimen has a square grid pattern with large crystals in the center of each square, and very fine crystals at the edges of each grid. Thus medium and high resolution gap tests are performed on the same specimen. Meantime, the larger crystals show facets which allow an assessment of the gray level reproduction available at high resolution. Gold particle range from 5nm to 150 nm approximately.
| 79510-01 | High Resolution Au-C Test on 12.5mm Pin Stub | each | 155.00 |  |
| 79510-02 | High Resolution Au-C Test on JEOL Stub | each | 155.00 | |
| 79510-03 | High Resolution Au-C Test on ISI Stub | each | 155.00 | |
| 79510-04 | High Resolution Au-C Test on Hitachi Stub | each | 155.00 | |
| 79510-05 | High Resolution Au-C Test on Carbon Planchet | each | 155.00 | |
2. Very High Resolution Gold (<2nn - 30nm) on Carbon Test
For very high resolution performance testing this specimen has a smaller gold particle size ranging from 2 nm to 30 nm as compared to the high resolution test above. Ideal for testing at instrument magnifications of 50,000x and above.
| 79511-01 | Very High Resolution Au-C Test on 12.5mm Pin Stub | each | 197.00 | |
| 79511-02 | Very High Resolution Au-C Test on JEOL Stub | each | 197.00 | |
| 79511-03 | Very High Resolution Au-C Test on ISI Stub | each | 197.00 | |
| 79511-04 | Very High Resolution Au-C Test on Hitachi Stub | each | 197.00 | |
| 79511-05 | Very High Resolution Au-C Test on Carbon Planchet | each | 197.00 | |
3. Ultra High Resolution Gold (<1 nm - 20 nm) on Carbon Test
With gold particles ranging from <1 nm to 20 nm, this test is suitable for ultra high resolution SEM tests such as field emission electron source. A magnification of at least 80,000x is required for this test.
| 79512-01 | Ultra High Resolution Au-C Test on 12.5mm Pin Stub | each | 385.00 | |
| 79512-02 | Ultra High Resolution Au-C Test on JEOL Stub | each | 385.00 | |
| 79512-03 | Ultra High Resolution Au-C Test on ISI Stub | each | 385.00 | |
| 79512-04 | Ultra High Resolution Au-C Test on Hitachi Stub | each | 385.00 | |
| 79512-05 | Ultra High Resolution Au-C Test on Carbon Planchet | each | 385.00 | |
4. Medium
Resolution - Aluminum-Tungsten Dendrites
The various spacings created by the dendritic structure give the gap test, and the topographical arrangement of the dendrites leads to the gray level test. The specimen is non-magnetic, vacuum clean. It is most useful for working in the probe size range of 25 to 75 nm. Supplied unmounted.
| 79514-01 | SEM Aluminum-Tungsten Dendrites Test | each | 188.00 | |
5. Tin
On Carbon
Tin on Carbon is an alternate test specimen for medium resolution, and for the daily basic checking of your instrument performance. This specimen consists of a dispersion of tin spheres, within the size range 10 - 40 nm, on a carbon substrate. Ideal for astigmatism correction, it is also recommended for use in SEM’s employed in the semi-conductor industry where the usual gold on carbon specimen cannot be used because of the risk of gold poisoning.
| 79515-01 | Tin-C Test Specimen on 12.5mm Pin Stub | each | 250.00 | |
| 79515-02 | Tin-C Test Specimen on JEOL Stub | each | 250.00 | |
| 79515-03 | Tin-C Test Specimen on ISI Stub | each | 250.00 | |
| 79515-04 | Tin-C Test Specimen on Hitachi Stub | each | 250.00 | |
