Rotary Pumped Carbon and Sputter Coating System

EMS Series of Rotary Pumped Modular Coating Systems

Innovative and versatile Sputter Coater and Carbon Evaporator for SEM Applications

Buy a new unit today and get a $500 credit towards the purchase of any accessories we offer.

Quick Overview

The EMS150R is a compact rotary pumped coating system ideally suited for SEM and other coating applications. The EMS150R is available in three formats:

EMS150R S – a compact rotary pumped sputter coater, suitable for non-oxidising metals, such as gold (Au) and platinum (Pt)

EMS150R E – a compact rotary pumped carbon fibre coater suitable for SEM applications

EMS150R ES – a compact rotary pumped combined sputter coater and carbon evaporator

Key Features

• Metal sputtering or carbon evaporation - or both – in one space saving design
• Rotary pumped sputter coating – allows sputtering of a wide range of non-oxidising (noble) metals, such as gold (Au), platinum (Pt), silver (Ag) and palladium (Pd)
• Carbon fibre coating – ideal for SEM carbon coating applications (eg EDS and WDS)
• Advanced design carbon evaporation gun – simple operation, reproducible results
• Glow discharge option – for modification of sample surface properties (eg hydrophobic
  to hydrophilic conversion) or for cleaning / removal of contaminating surface residues
• Control of evaporation current profile – ensures consistently reproducible carbon films
• Repeatable thickness control using the film thickness monitor option
• Fully automatic touch screen control – rapid data input, simple operation
• Multiple, customer defined coating protocols can be stored – ideal for multi-user labs
• Automatic vacuum control, which can be pre-programmed to suit the process and material – no needle valve to adjust
• “Intelligent” recognition system – automatically detects the type of coating insert fitted
• Easy-to-change, drop-in style specimen stages (rotation stage as standard)
• Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
• Ergonomic one piece moulded case – easy maintenance and service access
• Ethernet with local FTP server connection – simple programmer updates
• Power factor correction – complies with current legislation (CE Certification) – efficient use of power means reduced running costs
• Three-year warranty

Product Description

Ideal for SEM applications

EMS150R is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the EMS150R can be a top-of-the-range sputter coater for scanning electron microscopy (SEM), a carbon coater suitable for SEM (eg EDS and WDS), or both, in a single easy to use system.

Molded case with color touch-screen

The EMS150R is presented in a custom molded, one-piece case. The color touch screen allows multiple users to input and store coating protocols. The case houses all the working components. Automatic bleed control ensures optimum vacuum conditions during sputtering.
The vacuum chamber has an external diameter of 165mm (6.5”) and comes with an integral implosion guard. A variable speed rotary specimen stage is fitted as standard, with other stages available as options.

Sputter coating, carbon coating or both

The EMS150R is available in three formats, each with a range of optional accessories:

• EMS150R S – a compact rotary pumped sputter coater, suitable for non-oxidising (noble) metals. A wide selection of sputtering targets is available, which are highly recommended for SEM applications.

• EMS150R E – a compact rotary pumped carbon fibre coater suitable for SEM applications (eg EDS and WDS). The system uses carbon fibre / cord as standard.

• EMS150R ES – a combined system with both sputtering and carbon fibre coating. The deposition inserts can be swapped in seconds and the intelligent system logic automatically recognizes which insert is in place and displays the appropriate operating settings.

Each of the above can be fitted with a range of optional accessories (eg glow discharge, carbon rod coating, film thickness monitor). See options for details.

Rapid data entry

At the operational heart of EMS150R is a simple color touch screen, which allows even the most inexperienced or occasional operators to rapidly enter and store their own process data. To further aid ease of use a number of typical sputtering and evaporation profiles are already stored.

Maintenance

The intuitive touch screen interface features maintenance prompts which highlight:

• Time of last clean
• Coating time since last cleaned
• System „on time‟
• Time of last service

Glow Discharge Attachment

The primary application of glow discharge is as a technique for the surface modification, or ‘wetting’ or hydrophilisation of newly-evaporated transmission electron microscopy (TEM) carbon support films.

Freshly-made TEM carbon support films tend to have hydrophobic surfaces which inhibits the spreading of suspensions of particles in negative staining solutions. However, after glow discharge treatment with air, the carbon film is made hydrophilic and negatively charged, thus allowing easy spreading of aqueous suspensions. With subsequent magnesium acetate treatment the surface is made hydrophilic and positively charged.

In addition to glow discharge treatment using air, other process gases may be used to modify surface properties. For example, methanol as a process gas results in the surface becoming hydrophobic and negatively charged. Such treatment can facilitate the optional absorption of selected biomolecules

Specifications

Instrument case	585mm W x 470mm D x 410mm H (total height with coating head open: 650mm)
Weight	28.4kg
Packed dimensions	725mm W x 660mm D x 680mm H (36.8kg)
Work chamber	Borosilicate glass 152mm Ø (inside) x 127mm H
Safety shield	Integral polyethylene terephthalate (PET) cylinder
Display	145mm 320 x 240 colour graphic TFT (Thin Film Transistor) display
User Interface	Intuitive full graphical interface with touch screen buttons, includes features such as reminders for when maintenance is due and a log of the last ten coatings carried out
Sputtering target	Disc style 57mm Ø. A 0.1mm thick gold target is fitted as standard. Q150R S and Q150R ES versions only
Specimen stage	50mm Ø rotating stage with 6 stub positions for 15mm, 10mm, 6.5mm or 1/8” pin stubs. Rotation speed 8-20 rpm

Vacuum

Rotary pump	Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter
Vacuum measurement	Pirani gauge fitted as standard
Typical ultimate vacuum	2 x 10-2mbar in a clean system after pre pumping with dry nitrogen gas
Sputter vacuum range	Between 3 x 10-2 and 5 x 10-1mbar

Processes

Sputtering	0-80mA to a pre-determined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without “breaking” vacuum and with built in rest periods)
Carbon evaporation	A robust, ripple free D.C. power supply featuring pulse evaporation ensures reproducible carbon evaporation from fibre, cord or rod sources. Current pulse for carbon cord: 1-60 Amps; current pulse for carbon rods with spigot size of 1.4mm Ø: 1-90 Amps
Glow discharge	0-80mA operates in DC+ and DC- modes

Services and other information

Gases	Argon sputtering process gas, 99.999% (R S and R ES versions). Nitrogen venting gas (optional)
Electrical supply	90-250V ~ 50/60 Hz 1400 VA including RV3 rotary pump power. 110/240V voltage selectable
Conformity	CE conformity
Power factor correction	Complies with the current legislation (CE Certification) and ensures efficient use of power which means reduced running costs

Ordering Information

EMS150R S

4500	EMS150R S Rotary pumped sputter coater, includes an 57mm Ø x 0.1mm gold target	POR	Quote
4501	Quick-release sputter insert for EMS150R S and EMS150R ES – suitable for non-oxidising (noble) metals. Supplied with A 57mm Ø x 0.1mm thick gold target as standard. For additional noble metal targets (eg Platinum, Gold / Palladium, Silver) see Sputtering Targets section		Included
4502	Rotation stage, 50mm Ø with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section		Included

EMS150R E

4503	EMS150R E Rotary pumped carbon fibre evaporator, supplied with carbon fibre / cord	POR	Quote
4504	Quick-release carbon fibre evaporation insert for EMS150R E and EMS150R ES – suitable for evaporation of carbon fibre and carbon cord		Included
4506	Rotation stage, 50mm Ø with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section		Included

EMS150R ES

4507	EMS150R ES Rotary pumped sputter coater, includes an 57mm Ø x 0.1mm gold target, and carbon fibre evaporator, supplied with carbon fibre / cord	POR	Quote
4508	Quick-release sputter insert for EMS150R S and EMS150R ES – suitable for non-oxidising (noble) metals. Supplied  57mm Ø x 0.1mm thick gold target as standard. For additional noble metal targets (eg Platinum, Gold / Palladium, Silver) see Sputtering Targets section		Included
4509	Quick-release carbon fibre evaporation insert for EMS150R E and EMS150R ES – suitable for evaporation of carbon fibre and carbon cord		Included
4510	Rotation stage, 50mm Ø with adjustable height for target to sample distances of 38mm-79mm (supplied with 2 mounting pillars). Note: this stage does not tilt – for tilting stage see Specimen Stages section		Included

Options and Accessories

A range of interchangeable, plug-in style coating inserts are available:

4511	Additional sputter insert for quick metal change (R S and R ES only). Note: this is an entire sputtering assembly; individual noble metal targets can also be purchased	POR	Quote
4512	Carbon rod evaporation insert for 3.05mm Ø rods (R E and R ES only). Includes manual rod shaper and 3.05mm Ø carbon rod	POR	Quote
4513	Glow discharge insert to modify surface properties (eg hydrophobic to hydrophilic conversion) or to clean surface residues (R S and R ES only). Can be retrofitted	POR	Quote
4514	Additional standard glass chamber assembly	POR	Quote
4515	Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens	POR	Quote
4516	Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the ems150R when bench depth is limited	POR	Quote
4517	Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This „modification‟ is used to measure and control the thickness of material deposited	POR	Quote
4518	Spare quartz crystal	95.00	Add to Cart

Specimen stages

The EMS150R has alternative specimen stages to meet most requirements. All are easy-change, drop-in style and are height adjustable (except 10360 rotary planetary stage)

4519	50mm Ø rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm	POR	Quote
4520	90mm Ø rotating specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8 and 20rpm	POR	Quote
4521	Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm	POR	Quote
4522	Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm	POR	Quote

Carbon Supplies

4538	Carbon fibre cord - high purity - 1m	POR	Quote
4539	Carbon fibre cord - high purity - 5m	POR	Quote
4540	Carbon fibre cord - standard grade - 1m	POR	Quote
4541	Carbon fibre cord - standard grade - 10m	POR	Quote
4542	Carbon fibre cord - standard grade - 100m	POR	Quote
4543	Carbon rods - 3.05mm Ø x 50mm length (shaped) pack of 10	POR	Quote
4544	Carbon rods 3.05mm Ø x 300mm length (unshaped) pack of 10)	POR	Quote
4546	Manual rod shaper for 3.05mm Ø carbon rods	POR	Quote

Sputtering Targets

4523	57mm Ø x 0.1mm Gold	POR	Quote
4524	57mm Ø x 0.2mm Gold	POR	Quote
4525	57mm Ø x 0.3mm Gold	POR	Quote
4526	57mm Ø x 0.1mm Gold/Palladium (80/20%)	POR	Quote
4527	57mm Ø x 0.2mm Gold/Palladium (80/20%)	POR	Quote
4528	57mm Ø x 0.3mm Gold/Palladium (80/20%)	POR	Quote
4529	57mm Ø x 0.1mm Platinum	POR	Quote
4530	57mm Ø x 0.2mm Platinum	POR	Quote
4531	57mm Ø x 0.3mm Platinum	POR	Quote
4532	57mm Ø x 0.1mm Nickel	POR	Quote
4533	57mm Ø x 0.1mm Silver	POR	Quote
4534	57mm Ø x 0.1mm Palladium	POR	Quote
4535	57mm Ø x 0.1mm Copper	POR	Quote
4536	57mm Ø x 0.1mm Platinum/Palladium (80/20%)	POR	Quote
4537	57mm Ø x 0.3mm Platinum/Palladium (80/20%)	POR	Quote

Spare kits

4547	Two-year spares kit for EMS150R S Includes: 57mm Ø x 0.1mm gold target, standard glass chamber assembly quartz crystals, O-rings	POR	Quote
4548	Two-year spares kit for EMS150R E Includes:, carbon fibre / cord, standard glass chamber assembly, quartz crystals, O-rings, springs	POR	Quote
4549	Two-year spares kit for EMS150R ES Includes: 57mm Ø x 0.1mm gold target, / carbon fibre / cord, standard glass chamber assembly, quartz crystals, O-rings, springs	POR	Quote

SEM/TEM Carbon Coaters Techniques and Applications

Sputter Coater Principles

Silver as a Removable Coating for Scanning Electron Microscopy

Turbo-Pumped Sputter and Carbon Coater