EMS 7620 “Mini” Sputter Coater
The EMS 7620 is a compact, low cost SEM sputter coater. When combined with the optional carbon attachment EMS 7620-CF it makes the ideal low-cost SEM sputtering and carbon coating system package. The EMS 7620 is fitted as standard with a glow discharge function, making it ideal for the hydrophilisation, or ’wetting’, of carbon-coated TEM grids and other surface modifications. The EMS 7620 is robust, easy to operate and is backed up with a three-year warranty.
The EMS 7620 is primarily designed for use with tungsten film SEMs. For extra fine grain coating required for most FE-SEM applications, high vacuum coating is required - see the EMS 150T, or for larger specimens see the EMS 300T T.
Features
- Low cost
- Simple operation
- Magnetic deflection sputter coating head
- Compact design
- Carbon fiber evaporation option
- Adjustable height specimen stage
- Easy to change sputter targets - gold/palladium (Au/Pd) standard
- Built to all the latest safety standards - features include positive break electromechanical interlock which ensures the sputter coating head is electrically isolated when the optional carbon attachment is in use
- Robust and reliable
- Three-year warranty
Easy operation
The EMS 7620 is ideally suited to the budget-conscious user who none-theless demands quality results from an easy-to-use instrument. Designed for routine applications, the EMS 7620 uses a basic magnetron sputter head with a simple-to-replace disc target (gold/palladium (Au/Pd) as standard). The head is hinged for easy operation and fitted with electrical safety interlocks.
To prevent accidental damage the high voltage lead is shielded. The plasma current is variable by adjustment of the vacuum level using an argon leak valve with the plasma voltage pre-set. For maximum sputter coating efficiency the gas injector system ensures that argon gas enters the chamber close to the plasma discharge. Venting is to argon.
Fast cycle times
The 100mm/4" diameter Pyrex cylinder is mounted on an aluminium collar and sealed with O rings. The small vacuum chamber means pump-down times and cycle times are fast; it also allows a small economical rotary pump to be used.
The specimen stage is height-adjustable over a wide range and can easily be removed to accommodate larger specimens. The system is controlled manually by a 180-second timer with 15-second resolution. Pressure and plasma current are monitored by analogue meters.
Quality coating
The EMS 7620 will deposit a quality coating and has the advantage of simple operation, ensuring reliability and suitability for general use. It can be simply converted to deposit carbon by the addition of an optional carbon evaporation attachment, consisting of a switchable voltage power supply and a carbon fiber head (see EMS 7620-CF below). The carbon attachment includes an additional glass cylinder. This is taller than the standard sputter coater cylinder and ensures that the distance between the carbon fiber and the specimens is optimal.
Glow discharge (hydrophilisation)
A three-way switch on the front panel allows the EMS 7620 to be switched to glow discharge mode.
Freshly-made transmission electron microscopy (TEM) carbon support films tend to have a hydrophobic surface that hinders the collection of TEM sections from the surface of water baths and prevents the spreading of suspensions of particles in negative staining solutions. However, after glow discharge treatment with air, carbon film can be made hydrophilic and negatively-charged, thus allowing collection of TEM sections and easy spreading of aqueous suspensions.
Other possible treatments include magnesium acetate treatment to create hydrophobic and positively-charged surfaces. If alkylamine is used as a process gas, the carbon film surface will become hydrophobic and positively-charged, while using methanol as a process gas results in the surface becoming hydrophobic and negatively-charged. Such treatments can allow the optional absorption of selected biomolecules.
The EMS 7620 also comes complete with 1m x 12mm bore vacuum hose and fittings, and requires only the addition of a rotary pump with a capacity of 50L/m or greater - see Options and Accessories.
Specifications
| Dimensions: | 340mm W x 130mm D x 250mm H (unpacked) excluding chamber |
Site Requirements: |
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| Electrical: | Ensure that a suitable mains electricity supply (110VAC - 20A or 240VAC - 13A, frequency 50/60Hz) is available. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency. The units are supplied for either 230V or 110V operation at 50/60Hz. The power rating is 250VA excluding the rotary pump. The rotary pump outlet is rated at 230V at 10A or 110V at 16A. The 240V pump outlet uses either a three-pin plug (404440310) or 110V standard US plug - both supplied. |
| Sputtering Gas: | Ensure that a suitable gas supply is available, such as a commercial cylinder of argon gas (Zero Grade) fitted with a two-stage regulator, in order to deliver gas at a pressure of around 5-10psi (0.5bar). |
| Vacuum Pump: | Ensure that a suitable vacuum pump is available. The work chamber has to be evacuated to less than 10-2mbar. This can be achieved in a reasonable time (depending on the cleanliness of the chamber) using a floor-mounted 50L/m or 90L/m two-stage rotary pump. Alternatively you can use a 30L/m desk-top mounted two-stage rotary pump, preferably incorporating an anti suck-back device and fitted with an oil mist filter on the exhaust port. Where a rotary pump is used, ensure that it has been filled with oil, in accordance with the manufacturer’s instructions. The exhaust should be filtered or expelled to a safe area. All pumps we supply are fitted with an exhaust filter. |
| Carbon evaporation attachment (optional): | The EMS 7620-CF Carbon Accessory Power Supply can be used in conjunction with the EMS 7620 ‘Mini’ Sputter Coater. The units are supplied for either 230V or 110V operation at 50/60Hz. Ensure that a suitable mains electricity supply (110VAC - 20A or 240VAC - 13A, frequency 50/60Hz) is available. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency. |
| Space requirement: | 340mm W x 320mm D x 310mm H (including chamber and sputtering head). Weight: 14kg. Additional space is required for the rotary pump, which can be located either on the floor or on the bench with the coater. |
Options and Accessories
Pumps Requirements
A 50L/m two-stage rotary pump with oil mist filter is recommended If intending to use an existing rotary pump it is important that its capacity is 50L/m or greater.
Carbon Coating Accessory
A carbon coating accessory (EMS 7620-CF) which consists of an evaporation power supply and carbon fiber head is available. Fitting the optional carbon evaporation attachment is simple. The normal sputtering head is tilted back and replaced with the carbon fiber head. Connection is then made to the power supply. To ensure that the exposed sputtering head cannot be powered when the add-on carbon head is under vacuum, a positive-break mechanical interlock ensures electrical isolation of the sputtering head. We also offer a ‘stand alone’ SEM carbon coater, see the EMS150R1.
Choosing a target
Gold/Palladium: (Au/Pd): Supplied as standard. Has the same properties (sputtering rate, secondary electron yield, cost) as gold but the sputtered grain size is smaller.
Gold (Au):Gold sputter coating is still widely used in many laboratories
Platinum (Pt):The sputtered grain size is smaller than gold or gold/palladium. Platinum has a slower sputtering rate and is more expensive than gold or gold/palladium.
Silver (Ag): Compared to the other metals, it is relatively easy to remove silver. Therefore it is useful for museum and forensic specimens.
Palladium (Pd): Sometimes used instead of gold, gold/palladium and platinum for x-ray microanalysis.
All targets are 57mm Ø x 0.1mm thick (unless specified otherwise)
Ordering Information
EMS strives to maintain accurate pricing. However, due to fluctuations in precious metal prices, pricing on products containing precious metals is not guaranteed. We will contact you if there is a discrepancy.
| EMS 7620 | ‘Mini’ Sputter Coater Supplied with: 91017-AP gold/palladium (Au/Pd) target, 1m length of 12mm bore flexible vacuum hose, 1 x KF25 hose adapter flange and fittings to fit a rotary pump, 1 x rotary pump plug, comprehensive operating instructions |
each | POR | Quote |
| 91017-Au | Gold (Au) target | each | $500.00 | Add to Cart |
| 91017-AP | Gold/palladium (Au/Pd) target | each | $500.00 | Add to Cart |
| 91017-Pt | Platinum (Pt) target | each | $925.00 | Add to Cart |
| 91017-Ag | Silver (Ag) target | each | $270.00 | Add to Cart |
| 91017-Pd | Palladium (Pd) target | each | $500.00 | Add to Cart |
| 91017-.2-Au | Gold target (Au) 0.2mm thick | each | POR | Quote |
| 91017-.2-AP | Gold/palladium (Au/Pd) target 0.2mm thick | each | POR | Quote |
| 91017-.2-Pt | Platinum (Pt) target 0.2mm thick | each | POR | Quote |
| 91003 | RV-3 two-stage rotary pump with oil mist filter (115/230V 50/60Hz) | each | $2,324 | Add to Cart |
| 96000 | Replacement oil mist filter | each | POR | Quote |
| 91040 | Carbon evaporation attachment — EMS 7620 | each | POR | Quote |
EMS 7620-CF Carbon Accessory
The 7620-CF carbon attachment is a s are modular add-ons for our sputter coaters, allowing carbon fiber or carbon rod evaporation.
Each attachment uses the existing chamber and vacuum system of the sputter coater and is therefore a costeffective and efficient method for the evaporation of carbon for SEM applications. Note that the diameter of the top plate will vary according to the chamber size of the sputter coater onto which it is being fitted. We also offer free-standing carbon evaporators - see the EMS 150R1 and EMS 150T.
Features
- Carbon rod or fiber
- Protection shutter
- Modular control electronics
- Interlocking for safe operation
- Three-year warranty
The EMS 7640-CF, EMS 7640-CR and EMS 7620-CF can be used in conjunction with the EMS 7620 (EMS 7620-CF), EMS 500X, EMS 550X, EMS 575X, EMS 650X and EMS 675X sputter coaters. Sometimes it is also possible to retrofit one of the above onto our older models, Please contact us for information on compatibility.
The attachment consists of two components - a free-standing power supply and a carbon fiber or carbon rod head to suit the chamber size of the sputter coater onto which it is to be fitted.
The power supply is switchable between 10V/100A (for carbon rod evaporation) and 20V/50A (for carbon fiber evaporation). A vacuum interlock is provided to ensure safe operation of the sputter coater and carbon accessory system. Out-gas and coat switches are provided for complete control of the evaporation sequence.
Specifications
| Dimensions | 235mm W x 350mm D x 175mm H. |
| Weight | 15kg |
| Carbon source | Carbon fiber, carbon cord |
| Ammeter gauge | 0-50A |
| Low voltage | 25V |
| Out-gas current | Selectable for carbon fiber or carbon rod |
| Electrical supply | 230V/50Hz (3A max), 115V/60Hz (6A max) |
Ordering Information
| Sputter Coater | Attachment | Attachment | ||
| EMS 7620 Sputter Coater | Not Available | EMS 7620-CF | Quote | |
| EMS 500X, EMS 550X, EMS 575X, EMS 675X | EMS 7640-CR | Quote | EMS 7640-CF | Quote |
Carbon Fiber Cord
| 91046-1 | Carbon fiber cord - standard grade - 1m | Quote | |
| 91046-10 | Carbon fiber cord - standard grade - 10m | Quote | |
| 91046-100 | Carbon fiber cord - standard grade - 100m | Quote | |
| 91047-1 | Carbon fiber cord - high purity - 1m | 82.00 | Add to Cart |
| 91047-5 | Carbon fiber cord - high purity - 5m | 375.00 | Add to Cart |
| 91046 | Carbon fiber cord - standard purity, fine strands - 1m | 28.00 | Add to cart |
| 91046-4 | Carbon fiber cord - standard purity, fine strands - 10m | Quote | |
| 91046-01 | Carbon fiber cord - standard purity, fine strands - 100m | Quote |
Carbon Rods
NOTE: 3.05mm diameter carbon rods are used with the EMS 950X, EMS 450X and EMS 350. 6.15mm diameter carbon rods are used with the K975X and with most older Polaron-branded carbon evaporators.
| 70210-10 | Shaped (‘stepped’) carbon rods - high purity - 3.05mm Ø x 50mm | pack of 10 | Quote |
| 70210-25 | Shaped (‘stepped’) carbon rods - high purity - 6.15mm Ø x 50mm | pack of 10 | Quote |