Plasma
Asher: For Ashing, Etching & Cleaning
The EMS1050X Plasma Unit with RF Generator
The EMS1050X Plasma Treatment Unit consists of a solid state RF generator and associated tuning circuits, dual process gas flow monitoring needle valve control and full or restricted vent control.
It has a cylindrical Chamber with a rack out drawer system for ease of sample loading.
The vacuum system is a Dual stage separate Rotary Vacuum Pump or Optional Turbo Pumped backed by Diaphragm Pump.
The rack out drawer system can be exchanged for a vacuum loading port, for special cleaning applications in SEM/TEM.
This usually employs an Oxygen/Argon mix of gases, the Oxygen removing the organic material (hydrocarbons) and the Argon giving a surface etching of the sample.
Applications:
- Asbestos sample preparation
- Microincineration of organic material
- Etching of organic samples for SEM & TEM work
- Removal of Photoresist and electronc component encapsulations
- Surface treatment of plastics
- Cleaning of SEM/TEM sample holders
Features:
- Solid State RF Generator and associated tuning circuits
- Fully Automatic Control
- Rack out drawer
- Dual process gas flow
- Compact bench-top system
Benefits:
- Low temperature ashing process
- Easy to operate
- Easy loading/removal of samples
- Can select a mixture of gases
- Space saving
NOTE: We recommend that our No. 2 pump is used with unit as 'special oil' dedicates the application.
Specifications of the EMS1050X Plasma Unit:
| Instrument Case | 450mm(W) x 350mm(D) x 300mm(H) |
| Barrel Work Chamber | 'Pyrex' 160mm L x 110mm Dia. (Borosilicate Glass as standard.) |
| Rack Out Drawer: | Sliding Draw Assembly with Sample Holder Tray. |
| Weight | 25Kg |
| Plasma Output | RF Power Supply - Solid state 100 Watts RF Peak, Normal operating Range 25 to 75 Watts @ 13.56mhz. (Note: The frequency used is that allocated by the International Standards CISPR as an allowed 'industrial' frequency.) |
| Vacuum Gauge | Active Gauge Head with fully operating vacuum range display (ATM to 1x10-5 mbar. Full scale - normal operating vacuum 0.5mbar to1.0mbar) |
| Digital Timer Unit | Displays elapsed time with range select: 99.9Hours. Automatic termination of Ashing Process. |
| Dual Gas Flow Gauge | Dual Gas Needle Valve Flow Control, selectable for 1 or 2 or both gasses (calibrated 5 to 100cm3/minute Air @ A.T.P.) |
| Supply | 230Volts 50Hz (5 amp max. including. Pump) 115 Volts 60Hz (10 amp max. including Pump) |
| Services | Process Gas at normal 5 psi (0.33 bar) |
| Vacuum Pump: | No. 2 Pump (with a synthetic oil 'Fomblin' for Oxygen or Corrosive Process Gases.) 2m3/Hr |
Ordering Information
| 93000 | EMS 1050X Plasma Asher | POR | Request Quote |
| 91005-F | Rotary Vacuum Pump (Fomblin) | 2,306.00 | Add to cart |
