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arrow13Large Chamber Sputter Coaters

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arrow11EMS300R T Triple Target, Large Chamber, Rotary-Pumped Sputter Coater

PDF DownloadImage GalleryEMS300R T Triple Target, Large Chamber, Rotary-Pumped Sputter Coater
  • EMS Series Overview
    EMS Series Overview
  •  
  • IMG 2033v3
  • IMG 2051v4
  • IMG 2026
  • IMG 2028v3
    Standard specimen stage shown with a 4" wafer. Optional film thickness monitor fitted
  • IMG 2029v3
    Standard specimen stage shown with a 4" wafer. Optional film thickness monitor fitted
  • IMG 2044scrncloseup
  • IMG 2051scrncloseup
  • IMG 2050v3
  • IMG 2050v3
  • IMG 2050v3
  • IMG 2014v3
    Lockable emergency stop (e-stop) switch option. Note: Does not inhibit or replace the normal on/off switch function
 

The EMS300R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8"/203 mm (e.g. a wafer), or multiple smaller specimens over a similar diameter.

The EMS300R T is is suitable for sputtering non-oxidizing (noble) metals, e.g. gold (Au), gold/palladium (Au/Pd) and platinum (Pt). For oxidizing metals see the EMS300T T and EMS300T D.

Key Features

  • Large area sputter coating – up to 8"/200 mm diameter
  • Triple sputtering head – ensures even coating deposition of large specimens
  • Single target selection – for economic coating of small specimens
  • Sputtering of a range of non-oxidizing (noble) metals – such as gold (Au), platinum (Pt) and silver (Ag). For oxidizing metals see the EMS300T T and EMS300T D
  • Precise thickness control using the film thickness monitor option
  • Fully automatic touch screen control – rapid data input, simple operation
  • Easy-to-change, drop-in style specimen stages (rotation stage as standard)
  • Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
  • Three-year warranty

Product Description

Ideal for sputter coating large SEM specimens

The EMS300R T is suited for sputtering noble metals, such a gold (Au) and platinum (Pt), for scanning electron microscopy (SEM) and thin film applications.

The EMS300R T is fitted with three individual sputtering heads to ensure even deposition of individual large specimens or multiple smaller specimens. For economical coating of small specimens, 'single target' mode can be selected.

Note: It is not possible to sequentially sputter three different sputtering metals from each sputtering head – for sequential coating see the EMS300T D Dual Target Sequential Sputtering System.

Molded case with color touch screen

The EMS300R T is presented in a custom molded, one-piece case, allowing easy servicing access. The embedded color touch screen allows multiple users to input and store coating 'recipes'. The case houses all the working components, including automatic bleed control that ensures optimum vacuum conditions during sputtering.

The vacuum chamber has an internal diameter of 283 mm/12" and comes with an integral implosion guard. The EMS300R T also includes 'vacuum shutdown', a useful feature which enhances vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use.

A variable-speed rotary specimen stage is fitted as standard and is suitable for 8"/200 mm and 6"/150 mm wafers. For other stages, see Ordering Information.

Rapid data entry

At the operational heart of the EMS300R T is a simple color touch screen, which allows even the most inexperienced or occasional operator to rapidly enter and store their own process data. To further aid ease of use, a number of typical sputtering and carbon coating profiles are already stored. For added convenience, summaries of the last 100 coatings carried out can be viewed.

Maintenance

The touch screen interface features maintenance prompts that highlight time of last clean, coating time since last cleaned, system 'on time' and time of last service.

Pumping requirement

A suitable rotary vacuum pump is required. The Pfeiffer DUO 6 5m3/hr two-stage rotary vacuum pump (91003) is ideal for this purpose. Dry pumping alternatives are also available. See Ordering Information for more details.

Additional Information

Options and Accessories (including details ofthe standard specimen stage)

Specimen stages

Rotation stage: 50 mm Ø. There is no tilt or height adjustment – only rotation.

Rotate-tilt stage: 50 mm Ø with height adjustment (target-to-stage height variable between 30-80 mm). The tilt angle can be preset (horizontal to 30°).

Rotation stage for glass microscope slides.

Other options

Extended height chamber for taller specimens

Film Thickness Monitor (6555). Consists of a controller and quartz crystal oscillator built into the EMS300R T, plus a vacuum feed-through, chamber-mounted crystal holder and quartz crystal. Cannot be used when the coater is operated in 'single target' mode.

Specifications

Instrument case 585 mm W x 470 mm D x 410 mm H, total height with coating head open is 650 mm
Weight 36.4 kg
Packed dimensions 725 mm W x 660 mm D x 680 mm H (44.8 kg)
Work chamber Borosilicate glass 283 mm ID x 127 mm H
Safety shield Integral polyethylene terephthalate (PET) cylinder
Display 145 mm x 320 mm x 240 mm color graphic thin film transistor (TFT)
User interface Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last 100 coatings carried out and reminders for when maintenance is due
Sputter targets Disc-style 57 mm Ø with thick depending upon the targets fitted. Three 57 mm Ø x 0.3 mm thick gold (Au) targets are fitted as standard
Vacuum pump 5m3/hr Pfeiffer DUO 6 two-stage rotary pump with oil mist filter (Order separately: 91003)
Vacuum measurement Pirani gauge
Typical ultimate vacuum 2 x 10-2mbar in a clean system after pre-pumping with dry nitrogen gas
Specimen stage Flat rotation stage for 8"/200 mm and 6"/150 mm wafers fitted as standard. Rotation speed is variable between preset limits. For alternative stages, see Ordering Information
Processes
Sputtering 0-80 mA to a pre-determined thickness determined by the built-in timer or optional film thickness monitor. The maximum sputtering time is 60 minutes (without 'breaking' vacuum and with built-in rest periods).
Services and other information
Gases Argon sputtering process gas, 99.999% Nitrogen venting gas (optional)
Electrical supply 90-250V 50/60Hz 1,400VA including RV3 rotary pump
Conformity Power factor correction. Complies with the current legislation (CE Certification) and ensures efficient use of power, resulting in reduced running costs

Ordering Information

EMS300R T Large-Chamber-Rotary-Pumped Sputter Coater, fitted with three sputtering heads to ensure even metaldeposition. Include three 57 mm Ø x 0.3 mm gold (Au) sputter targets. A flat rotation stage for 8"/203 mm/and 6"/152 mm wafers is fitted as standard POR Quote
91005 Rotary pump requirements (needs to be ordered separately) Edwards RV5 90L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter 2,700.00 Add to Cart
Specimen Stages
6400-S Rotating 50 mm Ø specimen stage with adjustable tilt. The platform has six specimen stub positions for 6.5 mm, 10 mm and 15 mm or ⅛" pin stubs. Stage rotation speed is variable between preset limits. No rotation is possible when in single target mode. Target to stage height is variable between 0 mm and 42 mm for the standard stage. When used with the extended height cylinder (optional accessory 10596) the target to stage height would be an additional 87 mm POR Quote
6401 50 mm Ø variable height specimen stage with six stub positions for, 6.5 mm 10 mm and 15 mm disc stubs or ⅛" pin stubs. Stage rotation speed is variable between preset limits POR Quote
6402 50 mm Ø rotary tilting stage. A rotary planetary style stage with variable tilt angle from horizontal to 30 degrees. The platform has six positions for either 6.5 mm 10 mm and 15 mm disc stubs or ⅛" pin stubs. Rotation speed is variable between preset limits. Note: depending upon specimen height, this stage may require the optional extended height cylinder POR Quote
6403 A 90 mm Ø specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides or a single 75 mm x 50 mm slide). The stage can alternatively accommodate up to six ⅛" SEM pins stub. Stage rotation speed variable between preset limits. Includes a gear box to allow the optional FTM to be used POR Quote
Options and Accessories
6404 Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and one quartz crystal POR Quote
6405 Spare quartz crystal 95.00 Add to cart
6406 Extended height vacuum chamber (214 mm in height – the standard chamber is 127 mm high). For increased source to specimen distance and for coating larger specimens POR Quote
6407 Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS300R T when bench depth is limited POR Quote
6408 A lockable emergency stop (e-stop) switch which can be mounted on top of the system in a position easily accessible for the operator. It is provided with a key to release the knob after activation. Note: the addition of the e-stop does not inhibit or replace the normal On/Off switch function. The e-stop can be retrofitted to existing systems POR Quote
6409 Coating shields. Shields can be fitted to protect large surfaces from coating deposition, easily removable for ease of cleaning POR Quote
6410 Two-year spares kit for EMS300R T. Includes: 3 x 57 mm Ø x 0.3 mm gold (Au) target, standard glass chamber assembly, O-rings etc. POR Quote
6411 6" Wafer Specimen Stage: A flat adjustable stage capable of accepting 6" or 101.6 mm wafers POR Quote
6412 4" Wafer Stage: A flat 4 ½" 102 mm flat, drop in wafer stage which accepts 2, 3, 4 " Wafers POR Quote
6413 Additional Standard Glass Cylinder Assembly POR Quote
Sputter targets
The EMS300R T is fitted as standard with three 0.3 mm thick gold (Au) targets . Other optional targets are available (three required):
4523 57 mm Ø x 0.1 mm Gold POR Quote
4524 57 mm Ø x 0.2 mm Gold POR Quote
4525 57 mm Ø x 0.3 mm Gold POR Quote
4526 57 mm Ø x 0.1 mm Gold/Palladium (80/20) POR Quote
4527 57 mm Ø x 0.2 mm Gold/Palladium (80/20) POR Quote
4528 57 mm Ø x 0.3 mm Gold/Palladium (80/20) POR Quote
4529 57 mm Ø x 0.1 mm Platinum POR Quote
4530 57 mm Ø x 0.2 mm Platinum POR Quote
4531 57 mm Ø x 0.3 mm Platinum POR Quote
4532 57 mm Ø x 0.1 mm Nickel POR Quote
4533 57 mm Ø x 0.1 mm Silver POR Quote
4534 57 mm Ø x 0.1 mm Palladium POR Quote
4535 57 mm Ø x 0.1 mm Copper POR Quote
4536 57 mm Ø x 0.1 mm Platinum/Palladium (80/20) POR Quote
4537 57 mm Ø x 0.3 mm Platinum/Palladium (80/20) POR Quote

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PDF DownloadImage Galleryarrow14EMS300T T Triple Target, Large Chamber, Turbo-Pumped Sputter Coater

Triple Target, Large Chamber, Turbo-Pumped Sputter Coater
  • EMS Series Overview
    EMS Series Overview
  •  
  • IMG 1993v3
  • EMS300T T Head Upv3
  • IMG 1997v4
  • Img 1977v2cropped
  • IMG 2009
  • IMG 2010v2
  • IMG 2012v3
    The standard specimen stage is designed to hold a 6" or 8" wafer. This image shows the non-standard 4" wafer stage and wafer and optional film thickness monitor
  • Microscope Slide Stage
  • IMG 2080stagecloseup
  • IMG 1987v2cropped
  • IMG 2014v3
    Lockable emergency stop (e-stop) switch option. Note: Does not inhibit or replace the normal on/off switch function
  • IMG 2005v2
 

The EMS300T T is a large chamber, turbo-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8"/200 mm (e.g. a wafer), or multiple smaller specimens over a similar diameter. The EMS300T T is suitable for sputtering both noble and oxidizing metals.

Key Features

  • Large area, turbo pumped sputter coating – up to 8"/200 mm diameter
  • Triple sputtering head – ensures even coating deposition of large specimens
  • Single target selection – for economic coating of small specimens
  • Fine grain sputtering – for advanced high resolution FE-SEM applications
  • High-vacuum turbo pumping – allows sputtering of a wide range of oxidizing and non-oxidizing (noble) metals – suitable for SEM, high resolution FE-SEM and also for many thin film applications
  • Precise thickness control using the film thickness monitor option
  • Fully automatic touch screen control – rapid data input, simple operation
  • Easy-to-change, drop-in style specimen stages (rotation stage as standard)
  • Thick film coating – up to 60 minutes sputtering time without breaking vacuum
  • Three-year warranty

Product Description

Ideal for sputter coating large specimens, thin film applications and SEM/FE-SEM

The EMS300T T is designed to sputter a range of oxidizing and non-oxidizing (noble) metals for scanning electron microscopy (SEM) and thin film applications. An extensive range of sputtering target materials are available – see Ordering Information.

High- vacuum turbomolecular pumping

The EMS300T T is fitted with an internally mounted 70 L/s turbomolecular pump, backed by a 5m3hr two-stage rotary pump (order separately). A Pirani vacuum measurement gauge is included and a full range gauge is available as an option. Ultimate vacuum levels of around 5 x 10-5 mbar can be expected in a clean system after pre-pumping with dry nitrogen gas.

Triple sputtering head – for even deposition

The EMS300T T is fitted with three individual sputtering heads to ensure even deposition of individual large specimens or multiple specimens. For economical coating of small specimens, 'single target' mode can be selected.

Note that it is not possible to sequentially sputter three different sputtering metals from each sputtering head – for sequential coating see the EMS300T D Dual Target Sequential Sputtering System.

Automatic touch-screen control, rapid data entry

The EMS300T T is presented in a custom-molded, one-piece case, with easy servicing access. The case houses all the working components and includes an automatic bleed control that ensures optimum vacuum conditions during sputtering.

At the operational heart of the EMS300T T is a color touch screen, which allows even the most inexperienced or occasional operator to rapidly enter and store their own process data. A number of typical sputter coating profiles are already stored and for convenience, summaries of the last 100 coatings carried out can be viewed.

Safe operation, clean vacuum and rotary specimen stage as standard

The vacuum chamber has an internal diameter of 283 mm/12" and comes with an integral implosion guard. The vacuum shutdown option enhances vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use.

A variable speed rotary specimen stage is fitted as standard and accommodates 200 mm/8" and 150 mm/6" wafers, with other stages available as options. For further details, see Ordering Information.

Maintenance

The touch screen interface features maintenance prompts which highlight the time of last clean, coating time since last cleaned, system 'on time' and time of last service.

Pumping requirement

A suitable rotary vacuum pump is required. The Pfeiffer DUO 6 5m3/hr two-stage rotary vacuum pump (91003) is ideal for this purpose. Dry pumping alternatives are also available. See Ordering Information for more details.

Options and Accessories (including details of the standard specimen stage)

Specimen stages

The EMS300T T has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage). The rotation speed is variable between preset limits.

Flat rotation stage for wafers. For 200 mm/8" and 150 mm/6" wafers (fitted as standard).

Rotation stage – 50 mm Ø. This stage has height adjustment.

Rotate-tilt stage – 50 mm Ø. With height adjustment (target-to-stage height variable between 30-80 mm). The tilt angle can be preset from horizontal to 30°

Rotation stage for glass microscope slides.

Other options

Extended height chamber for taller specimens

Film thickness monitor (FTM). The optional FTM attachment (6556) consists of a controller and quartz crystal oscillator built into the EMS300T T and a vacuum feed-through, chamber-mounted, crystal holder and quartz crystal. The FTM cannot be used when the coater is operated in 'single target' mode.

Specifications

Instrument case 585 mm W x 470 mm D x 410 mm H, total height with coating head open is 650 mm
Weight 36.4 kg
Packed dimensions 725 mm W x 660 mm D x 680 mm H (44.8 kg)
Work chamber Borosilicate glass 283 mm ID x 127 mm H
Safety shield Integral polyethylene terephthalate (PET) cylinder
Display 145 mm W x 320 mm D x 240 mm H color graphic thin film transistor (TFT) display
User interface Intuitive full graphical interface with touch-screen buttons, includes features such as a log of the last 100 coatings carried out and reminders for when maintenance is due
Sputter target Disc-style 57 mm Ø with thickness depending upon the targets fitted. Three 57 mm Ø x 0.3 mm thick chromium (Cr) targets are fitted as standard
Vacuum High vacuum pumping by an internally-mounted, 70L/s air-cooled turbomolecular pump
Rotary pump 5m3hr Pfeiffer DUO 6 two-stage rotary pump with oil mist filter. (Order separately: 91003)
Vacuum measurement Built-in Pirani gauge. Typical ultimate vacuum: 5 x 10-5mbar in a clean system after pre-pumping with dry nitrogen gas
Specimen stage Flat rotation stage for 200 mm/8" and 150 mm/6" wafers fitted as standard. Rotation speed is variable between preset limits. For alternative stages, see Ordering Information
Processes
Sputtering 0-80 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without 'breaking' vacuum and with built-in rest periods)

Services and other information

Gases Argon sputtering process gas, 99.999% Nitrogen venting gas (optional)
Electrical supply 90-250V 50/60Hz 1,400VA including RV3 rotary pump
Conformity Power factor correction. Complies with the current legislation (CE Certification) and ensures efficient use of power, resulting in reduced running costs

Ordering Information

EMS300T T Large-Chamber-Turbo-Pumped Sputter Coater, fitted with three sputtering heads to ensure even metal deposition. Fitted with three 57 mm Ø x 0.3 mm chromium (Cr) sputtering targets as standard. A flat rotation stage (10826) for 8"/203 mm and 6"/152 mm wafers is also supplied. POR Quote
Rotary pump requirements (needs to be ordered separately)
91003 Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter 2,429.00 Add to Cart
6548 XDS 5 Scroll Pump POR Quote
6550-A Diaphragm pump. A "dry" alternative to the standard 91003 oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter POR Quote
Specimen stages
6551 Rotating 50 mm Ø specimen stage with adjustable tilt. The platform has six specimen stub positions for 15 mm, 10 mm, 6.5 mm or ⅛" pin stubs. Stage rotation speed is variable between preset limits. No rotation when in single target mode. Target to stage height is variable between zero and 42 mm for the standard stage. When used with the extended height cylinder (optional accessory 10596) the target to stage height would be an additional 87 mm POR Quote
6552 50 mm Ø variable height specimen stage with six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs or ⅛" pin stubs. Stage rotation speed variable between preset limits POR Quote
6553 50 mm Ø rotary tilting stage. A rotary planetary style stage with variable tilt angle from horizontal to 30 degrees. The platform has six positions for either, 6.5 mm, 10 mm, 15 mm disc stubs, or ⅛" pin stubs. Rotation speed is variable between preset limits. Note: depending upon specimen height, this stage may require the optional extended height cylinder POR Quote
6554 A 90 mm Ø specimen stage for glass microscope slides (up to two 75 mm x 25 mm slides or a single 75 mm x 50 mm slide). The stage can alternatively accommodate up to six ⅛" SEM pins stub. Stage rotation speed is variable between preset limits. Includes gear box to allow optional FTM to be used. POR Quote
6547 6" Wafer Specimen Stage: A flat adjustable stage capable of accepting 6" or 101.6 mm wafers POR Quote
6549 A 4" 102 mm flat drop-in-wafer stage which accepts 2", 3 ", and 4" wafers POR Quote
Options and Accessories
6555 Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and one quartz crystal POR Quote
6556 Spare quartz crystal 95.00 Add to Cart
6557 Extended height vacuum chamber (214 mm in height – the standard chamber is 127 mm high). For increased source to specimen distance and for coating large specimens POR Quote
6558 A lockable emergency stop (e-stop) switch which can be mounted on top of the system in a position easily accessible for the operator. It is provided with a key to release the knob after activation. Note: the addition of the e-stop does not inhibit or replace the normal On/Off switch function. The e-stop can be retrofitted to existing systems POR Quote
6559 Coating shields. Shields can be fitted to protect large surfaces from coating deposition – easily removable for ease of cleaning POR Quote
6560-A Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS300T T when bench depth is limited POR Quote
6561 Full range, active vacuum gauge capable of measurement over the range of 1000 mbar to 5 x 10-9 mbar. Typical ultimate vacuum of system is 5 x 10-5 mbar. Note: gauge must be factory fitted POR Quote
6562 Spares kit, including: spare standard glass cylinder, three 3417 chromium (Cr) sputtering targets, vacuum tubing with coupling insert, argon gas tubing, three sputter head magnets, rotary pump oil mist filter and fuses POR Quote
Sputter targets

Note: The EMS300T T is fitted as standard with three 0.3 mm chromium (Cr) targets (3417). Other optional targets are available (three required):

3410 57 mm Ø x 0.1 mm Gold POR Quote
3411 57 mm Ø x 0.1 mm Gold/Palladium (80/20) POR Quote
3412 57 mm Ø x 0.1 mm Platinum POR Quote
3413 57 mm Ø x 0.1 mm Nickel POR Quote
3414 57 mm Ø x 0.1 mm Silver POR Quote
3415 57 mm Ø x 0.1 mm Palladium POR Quote
3416 57 mm Ø x 0.1 mm Copper POR Quote
3417 57 mm Ø x 0.3 mm Chromium POR Quote
3418 57 mm Ø x 0.5 mm Tungsten POR Quote
3419 57 mm Ø x 1.5 mm Chromium POR Quote
3420 57 mm Ø x 0.2 mm Tungsten POR Quote
3421 54 mm Ø x 1.5 mm Carbon POR Quote
3422 57 mm Ø x 0.1 mm Aluminium POR Quote
3423 57 mm Ø x 0.1 mm Platinum/Palladium (80/20) POR Quote
3424 57 mm Ø x 1.5 mm Titanium POR Quote
3425 57 mm Ø x 0.3 mm Platinum/Palladium (80/20) POR Quote
3426 57 mm Ø x 0.3 mm Gold POR Quote
3427 57 mm Ø x 0.3 mm Gold/Palladium (80/20) POR Quote
3428 57 mm Ø x 0.3 mm Platinum POR Quote
3429 57 mm Ø x 0.5 mm Titanium POR Quote
3430 57 mm Ø x 0.1 mm Iron POR Quote
3431 57 mm Ø x 0.3 mm Iridium POR Quote
3432 57 mm Ø x 0.1 mm Cobalt POR Quote
3433 57 mm Ø x 0.1 mm Tin POR Quote
3434 57 mm Ø x 0.1 mm Molybdenum POR Quote
3435 57 mm Ø x 0.3 mm Magnesium POR Quote
3436 57 mm Ø x 0.1 mm Tantalum POR Quote
3437 57 mm Ø x 3 mm Indium Tin Oxide (90/10) POR Quote

arrow11EMS300T ES Large Chamber Turbo-Pumped Evaporator/Sputter Coater

The EMS300T ES is a large chamber, turbomolecular-pumped coating system ideally suited to metal evaporation onto large diameter specimens up to 6"/152 mm (for example a wafer) or smaller multiple specimens. The EMS300T ES also comes with interchangeable sputtering and carbon evaporation inserts to allow a coating radius of up to 4"/102 mm.

Key Features

  • Metal evaporation, carbon evaporation and metal sputtering – in one space saving design
  • Larger area metal evaporation – up to 6"/152 mm
  • Larger area sputter/carbon coating – up to 4"/102 mm diameter
  • High vacuum sputtering – oxidizing and non-oxidizing (noble) metals: suitable for SEM, high resolution FE-SEM and many thin film applications
  • High vacuum carbon coater – ideal for SEM and TEM carbon coating
  • Controlled, ramped carbon rod evaporation – precise control of carbon thickness. Non-sparking process gives superior quality films
  • Up to 60 minutes sputtering time – thick films capabilities
  • Three-Year Warranty
Work2Store™ Expanding Storage RackSputtering insertWork2Store™ Expanding Storage Rack Thermal evaporation insert Work2Store™ Expanding Storage Rack Carbon rod evaporation insert

The EMS300T ES is a large chamber, turbomolecular-pumped coating system ideally suited to metal evaporation onto large diameter specimens up to 6"/152 mm (for example a wafer) or smaller multiple specimens. The EMS300T ES also comes with interchangeable sputtering and carbon evaporation inserts to allow a coating radius of up to 4"/102 mm.

The sputter coating insert will deposit both oxidizing metals, e.g. chromium and aluminium and non-oxidizing (noble) metals such as gold and platinum. A chromium (Cr) target is fitted as standard.

The EMS300T ES has a full range of optional accessories, including specimen stages and film thickness measurement which means the system can be tailored to the precise requirements of the user.

Thermal evaporation of metals

The EMS300T ES allows controlled thermal evaporation of metals onto large substrates (up to 6"/152 mm). For many evaporative processes, tungsten filaments supplied with the system are used. However, some metals require the use of a molybdenum boat, which can also be used for heat-cleaning SEM and TEM apertures.

The evaporation head is normally positioned for downwards evaporation, but for small specimens upward evaporation is possible using two terminal extensions supplied with the system.

Sputter coating for high resolution FE-SEM and thin film applications

The advance design of sputtering head, power supply and system control allows sputtering of both oxidizing and non-oxidizing (noble) metals for thin film applications and for scanning electron microscopy (SEM) coating. The full range of target materials available is extensive and detailed in the Ordering Information section.

For sputtering applications where thick films are required, then the EMS300T ES can operate for up to 60 minutes.

High vacuum carbon evaporation for SEM and TEM

The carbon rod evaporation insert allows high quality carbon films to be deposited over a radius of up to 4"/102 mm.

The EMS300T ES uses controlled ramped carbon rod evaporation to ensure optimum control of the process and quality of results (with or without the optional film thickness measurement system). In addition the quality of the resulting carbon films is enhanced by the eradication of "sparking" which is a common problem with less advanced coating systems.

Work2Store™ Expanding Storage RackSun and planet-style stage with
conductance film thickness monitor
High vacuum turbomolecular pumping and vacuum measurement

The EMS300T ES is fitted with an internally mounted 70 L/s turbomolecular pump backed by a 5m3 hr two-stage rotary pump (order separately). A full range vacuum measurement gauge is included. Typically ultimate vacuums of around 5 x 10-5 mbar can be expected in a clean system after pre-pumping with dry nitrogen gas. For details of pumping options, see Ordering Information.

Touch-screen control and stored recipes

At the operational heart of the EMS300T ES is a color touch screen which allows users to rapidly enter and store their own process data. A range of typical sputtering and evaporation profiles are pre-installed. The EMS300T ES uses an 'Intelligent' recognition system that automatically detects the type of coating insert fitted and "becomes" either an evaporator, carbon coater or sputter coater.

Vacuum chamber and specimen stages

The EMS300T ES is presented in a custom-molded, one-piece case allowing easy servicing access. The case houses all the working components and includes an automatic bleed control that ensures optimum vacuum conditions during sputtering.

The vacuum chamber has an internal diameter of 283 mm/11" and comes with an integral safety guard. The vacuum shutdown option enhances vacuum performance by allowing the chamber vacuum to be maintained when the coater is not in use.

A variable speed rotary specimen stage is fitted as standard and accommodates specimens up to 4"/100 mm in diameter. For details of other stages, see Ordering Information.

Pumping Requirement

A suitable rotary vacuum pump is required. The Pfeiffer DUO 6 5m3/hr two-stage rotary vacuum pump (91003) is ideal for this purpose. Dry pumping alternatives are also available. See Ordering Information for more details.

Options and Accessories

Specimen stages and holders

The EMS300T ES has additional specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage). Rotation speeds are variable between preset limits.

  • Rotation stage for 4" wafers (supplied with system)
  • Rotation stage for 6" wafers
  • Flat rotation stage for SEM specimen stubs
  • Rotation stage with preset tilt for SEM specimen stubs
  • Rotate-tilt (rotary-planetary style) stage
  • Rotation stage for glass microscope slides
  • Eight-place stage for 25 mm or 30 mm embedded polished specimens
  • "Sun and planets" style rotary stage; Three platforms, each 92 mm Ø
  • Microscope coverslip stage for nine 20 mm x 20 mm coverslips
  • TEM grid holder
Other options
  • Extended height chamber (supplied with the EMS300T ES)
  • Standard height chamber
  • Film thickness monitor (FTM)
  • Conductance film monitor (CFM)

Specifications

Dimensions 585 mm W x 470 mm D x 410 mm H, total height with coating head open is 710 mm
Weight 37 kg
Packed dimensions 725 mm W x 660 mm D x 680 mm H (45 kg)
Work chamber Borosilicate glass 283 mm ID x 215 mm H
User interface Intuitive full graphical interface with touch-screen menus and buttons
Sputter target Disc-style 57 mm Ø with thickness depending upon the target fitted. One 0.3 mm thick chromium (Cr) target (3417) is fitted as standard
Pumping Internally-mounted 70 L/s turbomolecular pump
Rotary pump 5m3 hr two-stage rotary pump with oil mist filter. (Order separately: see 91003). Dry pumping option available.
Typical ultimate vacuum 5 x 10-5 mbar in a clean system after pre-pumping with dry nitrogen gas. Measurement using a full range Penning gauge
Specimen stage Stage for 4" wafer supplied as standard. For alternative stages, see Ordering Information
Services and other Information
Gases Argon sputtering process gas, 99.999%. Nitrogen venting gas (optional)
Electrical supply 90-250 V 50/60 Hz 1,400 VA including rotary pump, 110/240 V voltage selectable

Ordering Information

EMS300T ES Turbomolecular-pumped sputtering, metal evaporation and carbon coating system with 300 mm Ø x 215 H mm work chamber. Consists of high 10034 quick release sputter insert with a 3417 57 mm Ø x 0.3 mm chromium (Cr) target. High vacuum carbon rod evaporation coater and metal evaporation head. Coating inserts are interchangeable. A 4" wafer stage supplied as standard. Integrated full range gauge assembly for high vacuum measurement. POR Quote
Rotary pump requirements – order separately

Pumps supplied with vacuum hose and coupling kit

91003 5m3 hr two-stage Pfeiffer Duo 6 rotary pump with oil mist filter POR Quote
6550-A Diaphragm pump. A "dry" alternative to the standard 91003 oil-based rotary pump POR Quote
6548 Edwards nXDS6i scroll pump. Lubricant-free and hermetically sealed, giving totally clean and dry vacuum to prevent cross-contamination POR Quote
Options and Accessories – specimen stages

Rotation stages rotation speed variable between preset limits

6551 Rotating 50 mm Ø specimen stage with adjustable tilt. The platform has six specimen stub positions for 15 mm, 10 mm, 6.5 mm or ⅛" pin stubs. Stage rotation speed is variable between preset limits. No rotation when in single target mode. Target to stage height is variable between zero and 42 mm for the standard stage. When used with the extended height cylinder (optional accessory 10596) the target to stage height would be an additional 87 mm POR Quote
6552 50 mm Ø variable height specimen stage with six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs or ⅛" pin stubs. Stage rotation speed variable between preset limits POR Quote
6553 50 mm Ø rotary tilting stage. A rotary planetary style stage with variable tilt angle from horizontal to 30 degrees. The platform has six positions for either, 6.5 mm, 10 mm, 15 mm disc stubs, or ⅛" pin stubs. Rotation speed is variable between preset limits. Note: depending upon specimen height, this stage may require the optional extended height cylinder POR Quote
6554 A 90 mm Ø specimen stage for glass microscope slides (up to two 75 mm x 25 mm slides or a single 75 mm x 50 mm slide). The stage can alternatively accommodate up to six ⅛" SEM pins stub. Stage rotation speed is variable between preset limits. Includes gear box to allow optional FTM to be used. POR Quote
6547-SP Rotation stage for 4" or 6" wafers POR Quote
6513 Sun and planet-style rotation stage (each stage is 92 mm Ø) POR Quote
6549 Eight-place stage for 25 or 30 mm embedded, polished specimens POR Quote
6512 Nine-place TEM grid holder POR Quote
Other Options and Accessories
6555 Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and one quartz crystal POR Quote
6556 Spare quartz crystal for FTM 95.00 Add to Cart
6555-SP Conductance film monitor (CFM) attachment including housing, feedthrough, glass slides and cable. A factory fitted only option for monitoring sheet resistance of evaporated films allowing termination at a known resistance POR Quote
6557 Extended height glass cylinder, 300 mm Ø x 215 mm high (supplied as standard) POR Quote
6557-10 Standard height glass cylinder, 300 mm Ø x 127 mm high POR Quote
6558 A lockable emergency stop (e-stop) switch mounted on top of the system for easy access POR Quote
6559 Coating shields. Can be fitted to protect large surfaces in the chamber from coating deposition – easily removable for ease of cleaning POR Quote
6560-A Vacuum spigot allows a more convenient connection of the vacuum hose to the rear of the EMS300T ES when bench depth is limited POR Quote
Evaporation Supplies
73830-SP Tungsten wire baskets – pack of 10 POR Quote
73810-SP Molybdenum boats – pack of 10 POR Quote
Sputter Targets

All targets are 57 mm in diameter – thicknesses vary. The EMS300T ES is fitted as standard with one 57 mm x 0.3 mm chromium (Cr) target. Other optional targets are available:

3410 Gold (Au) 0.1 mm POR Quote
4524 Gold (Au) 0.2 mm POR Quote
3411 Gold/palladium (Au/Pd) 0.1 mm POR Quote
4527 Gold/palladium (Au/Pd) 0.2 mm POR Quote
3412 Platinum (Pt) 0.1 mm POR Quote
4530 Platinum (Pt) 0.2 mm POR Quote
3413 Nickel (Ni) 0.1 mm POR Quote
3414 Silver (Ag) 0.1 mm POR Quote
3415 Palladium (Pd) 0.1 mm POR Quote
3416 Copper (Cu) 0.1 mm POR Quote
3538 Aluminium (Al) 1.0 mm POR Quote
3421 Carbon (C) 1.5 mm POR Quote
3417 Chromium (Cr) 0.3 mm POR Quote
3419 Chromium (Cr) 1.5 mm POR Quote
3432 Cobalt (Co) 0.1 mm POR Quote
3426 Gold (Au) 0.3 mm POR Quote
3427 Gold/palladium (Au/Pd) (80:20) 0.3 mm POR Quote
3437 Indium tin oxide (ITO) 3 mm POR Quote
3431 Iridium (Ir) 0.3 mm POR Quote
3430 Iron (Fe) 0.1 mm POR Quote
3539 Magnesium (Mg) 0.5 mm POR Quote
3434 Molybdenum (Mo) 0.1 mm POR Quote
3428 Platinum (Pt) 0.3 mm POR Quote
3425 Platinum/palladium (Pt/Pd) (80:20) 0.3 mm POR Quote
3436 Tantalum (Ta) 0.1 mm POR Quote
3433 Tin (Sn) 0.1 mm POR Quote
3424 Titanium (Ti) 1.5 mm POR Quote
3429 Titanium (Ti) 0.5 mm POR Quote
3418 Tungsten (W) 0.5 mm POR Quote
3420 Tungsten (W) 0.2 mm POR Quote

PDF DownloadEMS 975 Large Chamber Turbo Evaporator & EMS 975S for Semionductor Wafer Coatingarrow11EMS975 Large Chamber Turbo Evaporator & EMS975S for Semiconductor Wafer Coating

The EMS975 Turbo Evaporator is a multiple application system to enable a range of preparation techniques to be applied with the flexibility and module expansion capability to develop new methods and prepare new specimens.

The EMS975 allows for carbon evaporation, metal evaporation from both baskets and crucibles and sputter coating option. A range of techniques can be practiced including carbon support films and replicas for TEM, carbon/metal evaporation, low angle shadowing and sequential layer coating using dual source evaporation and the sputter option can be used for a range of target materials.

The system flexibility is further enhanced by the use of a microcontroller, which readily allows the customer access to a range of options, but readily 'defaults' to optimum operating conditions, allowing both fully automatic and manual override as required. The unique loading rack out drawer system gives the user easy sample access with good sample size and the hinged lid assembly makes any other areas of the system readily accessible.

The unit has a turbo pump, externally mounted for convenience and easy exchange, and is backed up by a Rotary Vacuum Pump. The complete pumping sequence is under fully automatic control, achieving a high vacuum for evaporation.

The unit is bench mounted, with easy to use controls, and cannot be damaged by inadvertent use.

The EMS-975S is based on the EMS-975, however it has a special load lock door which allows the entry of 8" wafers with carbon coating, or other samples up to 140 mm x 140 mm square.

  • EMS 975 Turbo-Pumped Thermal Evaporator, with specimen loading door open
  • EMS 975 with carbon source fitted
  • EMS 975 specimen drawer with stage in specimen exchange position
  • EMS 975 specimen stage and optional film thickness monitor (FTM)
  • EMS 975 with carbon evaporation source fitted
  • Close up of EMS 975 carbon evaporation source. The 'anti-stick' design ensures smooth movement of carbon rods during evaporation
  • EMS 975 metal evaporation source fitted. Note: Can also be use to evaporate carbon fiber string
  • EMS 975 metal evaporation source, shown with shield
  • Typical chamber set up, showing carbon and metal evaporation sources, specimen stage and optional film thickness monitor (FTM)
  • 6.15mm diameter rods
  • Carbon rod shaper supplied with the EMS 975
 

Features

  • Turbomolecular Pump.
  • Automatic pumping sequence.
  • Clean vacuum.
  • Variable outgas control.
  • Evaporation pulse button.
  • Unique "anti stick" carbon rod gun evaporation assembly (patent pending).
  • Rack out drawer sample loading system.
  • Rotating plate specimen table with external accurate tilt control (option).
  • Large sample capacity,150 mm (6") using drawer with up 200 mm (8") for top loading.
  • Sample holders range of options, including grid holders, stub holders.
  • Carbon and Carbon/Platinum evaporation.
  • Full range vacuum measuring system.
  • Fast pumping cycle.
  • Protective Polycarbonate Implosion Shield.
  • Selectable evaporation supplies giving x 4 evaporation settings.
  • Restricted or full vent control to avoid disturbances of samples.
  • Microcontroller with LCD displays of status and customer data entry for control of systems.
  • Modular electronics.
  • Bench mounted unit.
  • Sputter coating (option) for range of metal targets.
  • Film thickness measurement for carbon and metal depositions.

Specifications

Instrument case 450 mm (W) x 500 mm (D) x 300 mm (H).
Weight 65 kg
Work Chamber Borosilicate Glass 250 mm (Dia.) x 300 mm (H) with hinged top plate (can accommodate samples to 200 mm) (8") in Dia.
Implosion Guard Polycarbonate – readily removable for maintenance
Carbon source Adjustable height with tilt control of 0-200°. Uses 6.15 mm Ø carbon rods (source for 3.05 mm Ø carbon rods can be fitted – please specify at time of ordering)
Metal source Adjustable height with tilt control 0-200°. Supplied with pack of 10 B5230 tungsten specimen baskets
Specimen Stage With tilt facility 0-45°
Vacuum Gauge range Atm to 1 x 10-7-7 mbar
Operating Vacuum Towards 1 x10-5 mbar, typically achieved within 15 minutes
Low voltage evaporation supply Pulsed or variable control. Selectable: 0-5V-15V-25V, out-gas current: 0-25A
Services Nitrogen gas (if used for venting). Argon gas (if the optional sputtering attachment is fitted)
Vacuum pumping 100L/s turbomolecular pump. Requires a 50L/m 'backing' rotary pump with oil mist filter
Electrical supply 230V/50Hz (8A max including pump), 115V/60Hz (16A max including pump)
Supplied with Accessory kit including: carbon rods (6.15 mm x 100 mm), evaporation filaments, manual rod shaper and operating manual

Ordering Information

91090-C EMS975 Large Chamber Turbo Evaporator complete with carbon source POR Quote
91090-S EMS975S Turbo Evaporator for Semi Conductor Wafer Coating POR Quote
91005 Rotary Vacuum Pump needed to backup the turbo pump 2700.00 Add to cart
Replacement Source
91077 Carbon Rods (6.15 mm Dia.), 12/pack 59.00 Add to Cart
Replacement Parts
91033 Glass Cylinder 650.00 Add to Cart
91034 "L" Gaskets 400.00 Quote
Optional Accessories
91004-S EMS105 Aperture Cleaning Head POR Quote
92060 EMS190 Low Angle Shadowing POR Quote

Technical Data Sheet

SEM/TEM Carbon Coaters Techniques and Applications

Sputter Coater Principles

Silver as a Removable Coating for Scanning Electron Microscopy

Dual Head Turbo-Pumped Sputter Coater arrow13arrow13