Turbo-Pumped Sputter and Carbon Coater

EMS 150T Turbo-Pumped Sputter Coater/Carbon Coater

The EMS 150T is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin-film applications. The EMS 150T replaces previous the following models EMS 575X and EMS 950X.

The EMS 150T is available in three formats:

EMS 150T S — a high resolution sputter coater, suitable for oxidising and non-oxidising metals

EMS 150T E — a high vacuum carbon coater for SEM and TEM applications

EMS 150T ES — a high resolution sputter coater and high vacuum carbon evaporator

Key Features

• Metal sputtering or carbon evaporation - or both – in one space saving design
• Fine grain sputtering – for advanced high resolution FESEM applications
• High vacuum turbo pumping – allows sputtering of a wide range of oxidizing and non-oxidizing metals – suitable for SEM, high resolution FESEM and also for many thin film applications
• High vacuum carbon coating – ideal for SEM and TEM carbon coating applications
• Advanced design carbon rod evaation gun – simple operation, reproducible results
• Control of evaation current profile – ensures consistently reproducible carbon films
• Precise thickness control using the film thickness monitor option
• Fully automatic touch screen control – rapid data input, simple operation
• Multiple, customer defined coating schedules can be stored – ideal for multi-user laboratories
• Automatic vacuum control, which can be preprogrammed to suit the process and material – no needle valve to adjust
• “Intelligent” recognition system – automatically detects the type of coating insert fitted
• Easy-to-change, drop-in style specimen stages (rotation stage as standard)
• Vacuum shutdown feature – leaves the process chamber under vacuum when not in use – improved vacuum performance
• Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
• Ergonomic one piece molded case – easy maintenance and service access
• Ethernet with local FTP server connection – simple programmer updates
• Power factor correction – complies with current legislation (CE Certification) – efficient use of power means reduced

Ideal for SEM, high resolution FESEM and TEM applications

EMS150T is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the EMS 150T can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), a carbon coater suitable for SEM and transmission electron microscopy (TEM), or both, in a single easy to use system.

The ability of the EMS150T to rapidly sputter a wide selection of oxidizing and non-oxidizing metals also makes it an ideal platform for many thin film applications.

Molded case with color touch-screen

The EMS150T is presented in a custom molded, one-piece case. The color touch screen allows multiple users to input and store coating protocols. The case houses all the working components, including the efficient 70L/s air-cooled turbo molecular pump. Automatic bleed control ensures optimum vacuum conditions during sputtering.

The vacuum chamber has an external diameter of 165mm (6.5") and comes with an integral implosion guard. The EMS150T includes “vacuum shutdown” which enhances vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use. A variable speed rotary specimen stage is fitted as standard, with other stages available as options.

Sputter coating, carbon coating or both

The EMS150T is available in three formats, each with a range of optional accessories:

• EMS150T S – a high resolution sputter coater for oxidizing and non-oxidizing (noble) metals. A wide selection of sputtering targets is available, including iridium and chromium, which are highly recommended for FESEM applications.
• EMS150T E – a high vacuum carbon coater, ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The system uses economical 3.05mm diameter carbon rods.
• EMS150T ES – a combined system with both sputtering and carbon coating. The deposition inserts can be swapped in seconds and the intelligent system logic automatically recognizes which insert is in place and displays the appropriate operating settings.

Each of the above can be fitted with a range of optional accessories (eg. metal evaporation, carbon fiber coating, film thickness monitor). See options for details.

Rapid data entry

At the operational heart of the EMS 150T is a simple color touch screen which allows even the most inexperienced or occasional operator to rapidly enter and store their own process data. To further aid ease of use, a number of typical sputtering and evaporation profiles are already stored.

Glow Discharge Attachment

The primary application of glow discharge is as a technique for the surface modification, or ‘wetting’ or hydrophilisation of newly-evaporated transmission electron microscopy (TEM) carbon support films.

Freshly-made TEM carbon support films tend to have hydrophobic surfaces which inhibits the spreading of suspensions of particles in negative staining solutions. However, after glow discharge treatment with air, the carbon film is made hydrophilic and negatively charged, thus allowing easy spreading of aqueous suspensions. With subsequent magnesium acetate treatment the surface is made hydrophilic and positively charged.

In addition to glow discharge treatment using air, other process gases may be used to modify surface properties. For example, methanol as a process gas results in the surface becoming hydrophobic and negatively charged. Such treatment can facilitate the optional absorption of selected biomolecules

Processes

Sputtering: 0-150mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximium sputtering time is 60 minutes (without ‘breaking’ vacuum and with built in rest periods).

Carbon evaporation: A robust, ripple free DC power supply featuring pulse evaporation ensures reproducible carbon evaporation from rod or fiber sources. Current pulse: 1-90A

Metal evaporation and aperture cleaning insert (option): For thermal evaporation of metals from filaments or boats. For cleaning SEM or TEM apertures a standard molybdenum boat (supplied) can be fitted. The metal evaporation head is set up for downwards evaporation, but upward evaporation can be achieved by fitting two terminal extensions (supplied). Evaporation times: up to four minutes.

Tilt Rotation Stage and FTM	Carbon Rod Evaporation Insert	Metal Evaporation insert

Specifications

Instrument Case	585mm (W) x 470mm (D) x 410mm (H) (total height with coating head open: 650mm)
Weight	33.4 Kg
Packed dimensions	725mm (W) x 660mm (D) x 680mm (H) (Weight 42 Kg)
Work chamber	Borosilicate Glass: 152mm (Inside D) x 127mm H
Safety shield	Integral polyethylene terephthalate (PET) cylinder
Display	145mm 320 x 240 colour graphic TFT (Thin Film Transistor) display
User interface	Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last ten coatings carried out and reminders for when maintenance is due
Sputter target	Disc style 57mm. A 0.3mm thick chromium target is fitted as standard. EMS150T S and T ES versions only

Vacuum

Turbomolecular pump	Internally-mounted, 70L/s air-cooled turbomolecular pump
Rotary pump	Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter
Vacuum measurement	Pirani gauge as standard. A full range gauge (10428) is available as an option
Typical ultimate vacuum	5 x 10-5 mbar in a clean system after pre-pumping with dry nitrogen gas
Sputter vacuum range	Between 5x10-3 and 5x10-1 mbar
Specimen stage	60mm rotating stage. Rotation speed 8-20 rpm

Services and Other Information

Gases	Argon sputtering process gas, 99.999% (TS and TES versions); Nitrogen venting gas (optional)
Electrical supply	90-250V ~ 50/60 Hz 1400 VA including RV3 rotary pump power. 110/240V voltage selectable
Conformity	CE conformity
Power factor correction	Complies with the current legislation (CE Certification) and ensures efficient use of power, which means reduced running costs

Ordering Information

Buy a new unit today and get a $500 credit towards the purchase of any accessories we offer.

3390	EMS150T E Turbomolecular pumped carbon evaporator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation insert for 3.05mm Ø carbon rods. Supplied with carbon rods (3.05mm Ø x 300mm) and a carbon rod shaper (manual operation)	POR	Quote
3380	EMS150T S - High resolution turbomolecular pumped sputter coater, including a  54mm Ø x 0.3mm chromium target	POR	Quote
3400	EMS150T ES - High-resolution turbomolecular pumped sputter coater, including a  57mm Ø x 0.3mm chromium target and high vacuum carbon rod evaporation coater for 3.05mm Ø carbon rods.	POR	Quote

Rotary pump requirements (needs to be ordered separately):

91003

Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter

POR

Quote

Options and Accessories

Including details of coating head inserts and specimen stages that are fitted as standard

Tilt Angle Stage	Rotary Planetary Stage	4" Wafer Stage	Glass Microscope Stage	Carbon Evaporation Insert

Coating head options

A range of interchangeable, plug-in style coating head inserts are available:

3200	Sputtering head insert suitable for oxidizing and non-xidizing metals. Supplied with a 54mm x 0.3mm thick chromium target as standard. For additional targets see Sputtering Targets section	POR	Quote
3210	Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly.	POR	Quote
3230	Carbon rod evaporation head insert (for 3.05mm Ø rods)	POR	Quote
3240	Carbon rod evaporation head insert (for 6.15mm Ø rods). Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical (less wastage).	POR	Quote
3250	Carbon fiber evaporation head insert	POR	Quote
3260	Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (T E and T ES versions only). Supplied with a pack of ten tungsten filaments  and a molybdenum boat.	POR	Quote
3270	Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens	POR	Quote
3280	Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited	POR	Quote
3290	Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited	POR	Quote
3300	Spare quartz crystals for FTM. Pack of three	95.00	Add to cart
3320	Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard)	POR	Quote
4513	Glow discharge insert to modify surface properties (eg hydrophobic to hydrophilic conversion) or to clean surface residues (TS and T ES only). Can be retrofitted	POR	Quote

Specimen stages

The EMS150T has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except  rotary planetary stage):

3330	Rotation stage, 50mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment	POR	Quote
3340	Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Tilt angle can be pre-set. 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm	POR	Quote
3350	Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm	POR	Quote
3360	Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm	POR	Quote
3370	Rotating specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used	POR	Quote

Sputtering Targets

The EMS150T S and EMS150T ES are fitted as standard with a 0.3mm thick chromium sputter target . Other optional targets:

3410	57mm Ø x 0.1mm Gold	POR	Quote
3411	57mm Ø x 0.1mm Gold/Palladium (80/20)	POR	Quote
3412	57mm Ø x 0.1mm Platinum	POR	Quote
3413	57mm Ø x 0.1mm Nickel	POR	Quote
3414	57mm Ø x 0.1mm Silver	POR	Quote
3415	57mm Ø x 0.1mm Palladium	POR	Quote
3416	57mm Ø x 0.1mm Copper	POR	Quote
3417	57mm Ø x 0.3mm Chromium	POR	Quote
3418	57mm Ø x 0.5mm Tungsten	POR	Quote
3419	57mm Ø x 1.5mm Chromium	POR	Quote
3420	57mm Ø x 0.2mm Tungsten	POR	Quote
3421	54mm Ø x 1.5mm Carbon	POR	Quote
3422	57mm Ø x 0.1mm Aluminium	POR	Quote
3423	57mm Ø x 0.1mm Platinum/Palladium (80/20)	POR	Quote
3424	57mm Ø x 1.5mm Titanium	POR	Quote
3425	57mm Ø x 0.3mm Platinum/Palladium (80/20)	POR	Quote
3426	57mm Ø x 0.3mm Gold	POR	Quote
3427	57mm Ø x 0.3mm Gold/Palladium (80/20)	POR	Quote
3428	57mm Ø x 0.3mm Platinum	POR	Quote
3429	57mm Ø x 0.5mm Titanium	POR	Quote
3430	57mm Ø x 0.1mm Iron	POR	Quote
3431	57mm Ø x 0.3mm Iridium	POR	Quote
3432	57mm Ø x 0.1mm Cobalt	POR	Quote
3433	57mm Ø x 0.1mm Tin	POR	Quote
3434	57mm Ø x 0.1mm Molybdenum	POR	Quote
3435	57mm Ø x 0.3mm Magnesium	POR	Quote
3436	57mm Ø x 0.1mm Tantalum	POR	Quote
3437	57mm Ø x 3mm Indium Tin Oxide (90/10)	POR	Quote

Carbon supplies

3500	Carbon rods – 6.15mm Ø x 100mm length (unshaped) pack of 10	POR	Quote
3510	Carbon rods – 6.15mm Ø x 50mm length (shaped) pack of 10	POR	Quote
3520	Carbon rods - 3.05mm Ø x 50mm length (shaped) pack of 10	POR	Quote
3530	Carbon rods 3.05mm Ø x 300mm length (unshaped) pack of 10	POR	Quote
3540	Carbon fibre cord - high purity - 1m	POR	Quote
3550	Carbon fibre cord - high purity - 5m	POR	Quote
3560	Carbon fibre cord - standard grade - 1m	POR	Quote
3570	Carbon fibre cord - standard grade - 10m	POR	Quote
3580	Carbon fibre cord - standard grade - 100m	POR	Quote
3590	Manual rod shaper for 6.15mm Ø carbon rods	POR	Quote
3595	Manual rod shaper for 3.05mm Ø carbon rods	POR	Quote

Other consumables and spare kits

3600	Metal evaporation basket - pack of 10 (for use with  metal evaporation head)	POR	Quote
3610	Two-year spares kit for EMS150T S Includes: chromium target, glass cylinder,  carbon fibre cord, quartz crystals, O-rings	POR	Quote
3620	Two-year spares kit for EMS150T E Includes:  chromium target, glass cylinder,  carbon fibre cord,  carbon fibre - fine,  carbon rods 3.05mm, quartz crystals, O-rings	POR	Quote
3630	Two-year spares kit for EMS150T ES Includes:  chromium target, glass cylinder,  carbon fibre cord,  carbon fibre - fine,  carbon rods 3.05mm,  quartz crystals, O-rings	POR	Quote

 

Large Chamber Sputter Coaters