Carbon
Turbo Evaporators
EMS 950 Turbo Evaporator
What is CARBON EVAPORATION?
The use of Carbon Evaporation is well known in Electron Microscopy for support films and replicas in TEM, and X-Ray Microanalysis and conducting coatings in SEM.
The films are continuous for thicknesses of 2nm (or 20 Angstroms) or more, and free of significant structure.
The most common form of deposition is from resistance heated carbon, or graphite rods, spectrographically pure. The rods are shaped to achieve a high current density at the point of contact of the rods with sufficient temperature being generated to cause the evaporation. At this point, the appearance being that of small, bright, glowing particles of carbon. To achieve the required vacuum condition of 1x10-4 mbar, or better, requires the use of Diffusion or Turbo Molecular Pumps.
The EMS 950 uses a Turbo Pump, backed up by a Rotary Vacuum Pump, the complete pumping sequence being under fully automatic control, and the vacuum somewhat better than 1 x 10-5 mbar. A variable control is available to pre-heat, and outgas the rods, while the use of an instantaneous evaporate switch allows bust evaporation under user control.
The Rotary Specimen Table is adjustable in height, and can facilitate a range of specimens. This is in addition to the special recess to locate standard glass slides, specifically beneficial for 'Asbestos Analysis' methods requiring carbon coatings.
An alternative Head can be fitted for the 'occasional' use of aperture cleaning.
The normal venting is by restriction to avoid specimen disturbance with the system being fully interlocked.
The Turbo pump can be mounted on any axis, and can 'shutdown' safely to atmosphere.
The head is a quick release head and it stays on the unit and has spring loaded release clips at the sides and can readily fit any of the options. (Sputtering, glow discharge, aperture cleaning, ect.).
Features
- Multi specimen holder.
- Built in penning head and gauge.
- Automatic pumping sequence.
- Turbomolecular pumping.
- Clean vacuum.
- Variable outgas control.
- Evaporation pulse button.
- Restricted vent control avoiding specimen disturbance.
- Rotating specimen table
- Modular electronics.
- Clean line design.
- Polycarbonate safety shield.
Specifications
| Instrument Case | 450mm(W) x 350mm(D) x 175mm(H) |
| Work Chamber | Borosilicate Glass: 165mm(Dia.) x 125mm(H) Plus Aluminum Base: 110mm(Dia.) x 115mm(H) |
| Weight | 28Kg |
| Carbon Source | Rods 3.2mm (Dia.) |
| Rotating Specimen Stage | 60mm (Dia.) Rotate and tilt standard |
| Spacing to Electrodes | 130 mm |
| Vacuum Gauge | ATM 1 x 10-5 mbar |
| High Vacuum | Normal condition indicator |
| Operating Vacuum | 1 x 10-5 mbar |
| Ammeter Gauge | 0-50 Amps |
| Low Voltage | 0-5v-15v-25v |
| Outgas Current | 0-25 Amps |
| Turbomolecular Pump | 60L/Second |
| Supply | 115 volts 60 Hz (12 amp Max incl pump) 230 volts 50 Hz (6 amp Max incl pump) |
| Vacuum Pump | 85L/Min Complete with vacuum hose and oil mist filter |
| Size | 340mm(L) x 150mm(W) x 250mm(H) |
| Weight | 14Kg |
Ordering Information
| 91070 | EMS 950 Turbo Coater complete with carbon sources | POR | Request Quote |
| 91005 | Rotary Vacuum Pump | 2,306.00 | Add to Cart |
Replacement Source
| 91077 | Carbon Rods 6.15mm Dia, 12/pack | 59.00 | Add to Cart |
Replacement Parts
| 91013 | Glass Cylinder 165mm (6") | 175.00 | Add to Cart |
| 91014 | 'L' Gasket to suit 165mm (6") cylinder (1 pair) | 95.00 | Add to Cart |
Optional Accessories
| 94100 | EMS 100 Glow Discharge Head | POR | Request Quote |
| 91004-S | EMS 105 Aperture Cleaning Head | POR | Request Quote |
| 95125 | EMS 110 Carbon Fiber Coating Attach. | POR | Request Quote |
| 91006 | EMS 150 Film Thickness Monitor | POR | Request Quote |
| 92030 | EMS 175 Oscillating Stage | POR | Request Quote |
| 92035 | EMS 180 Heating Stage | POR | Request Quote |
| 91082 | EMS 350 Sputter Coating Attach. | POR | Request Quote |
| 92030 | EMS 175 Oscillating Stage | POR | Request Quote |
EMS 975 Large Chamber Turbo Evaporator & EMS
975S for Semionductor Wafer Coating
Turbo Evaporator and Wafer Coating
The EMS-975 Turbo Evaporator is a multiple application system to enable a range of preparation techniques to be applied with the flexibility and module expansion capability to develop new methods and prepare new specimens.
It allows for carbon evaporation, metal evaporation from both baskets and crucibles and sputter coating option. A range of techniques can be practiced including carbon support films and replicas for TEM, carbon/metal evaporation, low angle shadowing and sequential layer coating using dual source evaporation and the sputter option can be used for a range of target materials.
The system flexibility is further enhanced by the use of a microcontroller, which readily allows the customer access to a range of options, but readily 'defaults' to optimum operating conditions, allowing both fully automatic and manual override as required. The unique loading rack out drawer system gives the user easy sample access with good sample size and the hinged lid assembly makes any other areas of the system readily accessible.
The unit has a turbo pump, externally mounted for convenience and easy exchange, and is backed up by a Rotary Vacuum Pump. The complete pumping sequence is under fully automatic control, achieving a high vacuum for evaporation.
The unit is bench mounted, with easy to use controls, and cannot be damaged by inadvertent use.
The EMS 975S is based on the EMS 975, however it has a special load lock door which allows the entry of 8" wafers with carbon coating, or other samples up to 140mm x 140mm square.
Features
- Turbomolecular Pump.
- Automatic pumping sequence.
- Clean vacuum.
- Variable outgas control.
- Evaporation pulse button.
- Unique "anti stick" carbon rod gun evaporation assembly (patent pending).
- Rack out drawer sample loading system.
- Specimen table with tilt facility (standard).
- Rotating plate specimen table, with external accurate tilt control (option).
- Large Sample capacity, 150mm (6") using drawer with up to 200mm (8") for top loading.
- Sample holders range of options, including grid holders, stub holders.
- Carbon and carbon/platinum evaporation.
- Full range vacuum measuring system.
- Fast pumping cycle.
- Protective Polycarbonate Implosion Shield.
- Selectable evaporation supplies giving x 4 evaporation settings.
- Restricted or full vent control to avoid disturbances of samples.
- Microcontroller with LCD displays of status and customer data entry for control of systems.
- Modular electronics.
- Bench mounted unit.
- Sputter coating (option) for range of metal targets.
- Film thickness measurement for carbon and metal depositions.
Specifications
| Instrument Case | 450mm(W)x500mm(D) x 300mm(H) |
| Work chamber | Borosilicate Glass: 250mm(Dia.)x300mm(H) with hinged top plate (can accommodate samples to 200mm) (8") in Dia. |
| Polycarbonate Implosion Guard | To suit work chamber readily removable for maintenance |
| Weight | 65kg |
| Carbon Gun | Adjustable height with tilt control 0-20°. Uses 6.15mm carbon rods |
| Turbomolecular Pump | 100L/ Sec as standard Optional sizes available |
| Vacuum Gauges | Active Gauge Head: Atm to 1 x 10-7 mbar |
| Working Vacuum | within 15 minutes |
| Operating Vacuum | Into x10-5 mbar range (liquid nitrogen trap option) |
| Evaporation supply (Pulsed or variable control) |
4 x selectable, low voltage volts a.c. V, 5V, 15V, 25V @ 25 amps. 7V @ 100 amps. |
| Specimen Table | With tilt facility 1-45° |
| Rotating Specimen Table Option |
60mm(Dia.) tilling 0-45° with variable speed control 15 rpm to 45 rpm |
| Sputtering
Option Deposition |
0-100mA |
| Deposition Rate | 0-50nm/min. gold (Au) |
| Standard Target | 57mm Au (options Pt, Pt/Pd, Pd, Cr, Ni, Cu, Ag) |
| Timer (HT Safety Interlocked) | 0-4 min. |
| Services | Argon (for sputtering option) - Nominal 4 psi. |
| Vacuum pump | No. 2 pump (2mVhr) Pumping speed oil mist filter vacuum hose (included with instrument) |
| Supply | 115V 60 Hz (16 amp including pump) 230V 50 Hz (8 amp including pump) |
Ordering Information
| 91090 | EMS 975 Large Chamber Turbo Evaporator complete with carbon source | POR | Request Quote |
| 91090-S | EMS 975S Turbo Evaporator for Semi Conductor Wafer Coating | POR | Request Quote |
| 91005 | Rotary Vacuum Pump | 2306.00 | Add to cart |
Replacement Source
| 91077 | Carbon Rods (6.15mm Dia.), 12/pack | 59.00 | Add to Cart |
Replacement Parts
| 91033 | Glass Cylinder | 650.00 | Add to Cart |
| 91034 | "L" Gaskets | 400.00 | Request Quote |
Optional Accessories
| 91004-S | EMS 105 Aperture Cleaning Head | POR | Request Quote |
| 92060 | EMS 190 Low Angle Shadowing | POR | Request Quote |
| 91082 | EMS Sputter Coater Attachment | POR | Request Quote |
