Carbon
Turbo Evaporators
EMS 150T Turbo Pumped Sputter Coater / Carbon Coater
Quick Overview
The EMS150T is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin-film applications. The EMS150T replaces previous the following models EMS575X and EMS950X.
The EMS150T is available in three formats:
EMS150T S – a high resolution sputter coater, suitable for oxidising and non-oxidising metals
EMS150T E – a high vacuum carbon coater for SEM and TEM applications
EMS150T ES – a high resolution sputter coater and high vacuum carbon evaporator
Key Features
- Metal sputtering or carbon evaporation - or both – in one space saving design
- Fine grain sputtering – for advanced high resolution FESEM applications
- High vacuum turbo pumping – allows sputtering of a wide range of oxidizing and non-oxidizing metals – suitable for SEM, high resolution FESEM and also for many thin film applications
- High vacuum carbon coating – ideal for SEM and TEM carbon coating applications
- Advanced design carbon rod evaporation gun – simple operation, reproducible results
- Control of evaporation current profile – ensures consistently reproducible carbon films
- Precise thickness control using the film thickness monitor option
- Fully automatic touch screen control – rapid data input, simple operation
- Multiple, customer defined coating schedules can be stored – ideal for multi-user laboratories
- Automatic vacuum control, which can be pre-programmed to suit the process and material – no needle valve to adjust
- “Intelligent” recognition system – automatically detects the type of coating insert fitted
- Easy-to-change, drop-in style specimen stages (rotation stage as standard) • Vacuum shutdown feature – leaves the process chamber under vacuum when not in use – improved vacuum performance
- Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
- Ergonomic one piece molded case – easy maintenance and service access
- Ethernet with local FTP server connection – simple programmer updates
- Power factor correction – complies with current legislation (CE Certification) – efficient use of power means reduced running costs
- Three-year warranty
Product Description
Ideal for SEM, high resolution FESEM and TEM applications
EMS150T is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the EMS 150T can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), a carbon coater suitable for SEM and transmission electron microscopy (TEM), or both, in a single easy to use system.
The ability of the EMS150T to rapidly sputter a wide selection of oxidizing and non-oxidizing metals also makes it an ideal platform for many thin film applications.
Molded case with color touch-screen
The EMS150T is presented in a custom molded, one-piece case. The color touch screen allows multiple users to input and store coating protocols. The case houses all the working components, including the efficient 70L/s air-cooled turbo molecular pump. Automatic bleed control ensures optimum vacuum conditions during sputtering.
The vacuum chamber has an external diameter of 165mm (6.5”) and comes with an integral implosion guard. The EMS150T includes “vacuum shutdown” which enhances vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use. A variable speed rotary specimen stage is fitted as standard, with other stages available as options.
Sputter coating, carbon coating or both
The EMS150T is available in three formats, each with a range of optional accessories:
- EMS150T S – a high resolution sputter coater for oxidizing and non-oxidizing (noble) metals. A wide selection of sputtering targets is available, including iridium and chromium, which are highly recommended for FESEM applications.
- EMS150T E – a high vacuum carbon coater, ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The system uses economical 3.05mm diameter carbon rods.
- EMS150T ES – a combined system with both sputtering and carbon coating. The deposition inserts can be swapped in seconds and the intelligent system logic automatically recognizes which insert is in place and displays the appropriate operating settings.
Each of the above can be fitted with a range of optional accessories (eg metal evaporation, carbon fiber coating, film thickness monitor). See options for details.
Rapid data entry
At the operational heart of EMS150T is a simple color touch screen, which allows even the most inexperienced or occasional operators to rapidly enter and store their own process data. To further aid ease of use a number of typical sputtering and evaporation profiles are already stored.
Options and Accessories
Including details of coating head inserts and specimen stages that are fitted as standard
Coating head options
A range of interchangeable, plug-in style coating head inserts are available:
| 3200 | Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54mm Ø x 0.3mm thick chromium target as standard. For additional targets see Ordering Information section | POR | Request Quote |
| 3210 | Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly, individual targets can also be purchased | POR | Request Quote |
| 3230 | Carbon rod evaporation head insert (for 3.05mm Ø rods) | POR | Request Quote |
| 3240 | Carbon rod evaporation head insert (for 6.15mm Ø rods). Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical (less wastage) | POR | Request Quote |
| 3250 | Carbon fiber evaporation head insert | POR | Request Quote |
| 3260 | Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (T E and T ES versions only). Supplied with a pack of ten tungsten filaments and a molybdenum boat |
POR | Request Quote |
| 3270 | Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens | POR | Request Quote |
| 3280 | Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited | POR | Request Quote |
| 3290 | Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited | POR | Request Quote |
| 3300 | Spare quartz crystals. Pack of three | POR | Request Quote |
| 3320 | Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard) | POR | Request Quote |
Specimen stages
The EMS150T has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage):
| 3330 | Rotation stage, 50mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment | POR | Request Quote |
| 3340 | Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Tilt angle can be pre-set. 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm | POR | Request Quote |
| 3350 | Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm | POR | Request Quote |
| 3360 | Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm | POR | Request Quote |
| 3370 | Rotating specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used | POR | Request Quote |
| 3380 | EMS150T S High resolution turbomolecular pumped sputter coater, including a 54mm Ø x 0.3mm chromium target |
POR | Request Quote |
| 3390 | EMS150T E Turbomolecular pumped carbon evaporator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation insert for 3.05mm Ø carbon rods. Supplied with carbon rods (3.05mm Ø x 300mm) and a carbon rod shaper (manual operation) |
POR | Request Quote |
| 3400 | EMS150T ES High-resolution turbomolecular pumped sputter coater, including a 57mm Ø x 0.3mm chromium target and high vacuum carbon rod evaporation coater for 3.05mm Ø carbon rods. |
POR | Request Quote |
Note: coating inserts are interchangeable
Rotary pump requirements (needs to be ordered separately):
| 91003 | Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter | Request Quote |
Sputtering Targets
The EMS150T S and EMS150T ES are fitted as standard with a 0.3mm thick chromium sputter target . Other optional targets:
| 3410 | 57mm 0 x 0.1mm Gold | POR | Request Quote |
| 3411 | 57mm 0 x 0.1mm Gold/Palladium (80/20) | POR | Request Quote |
| 3412 | 57mm 0 x 0.1mm Platinum | POR | Request Quote |
| 3413 | 57mm 0 x 0.1mm Nickel | POR | Request Quote |
| 3414 | 57mm 0 x 0.1mm Silver | POR | Request Quote |
| 3415 | 57mm 0 x 0.1mm Palladium | POR | Request Quote |
| 3416 | 57mm 0 x 0.1mm Copper | POR | Request Quote |
| 3417 | 57mm 0 x 0.3mm Chromium | POR | Request Quote |
| 3418 | 57mm 0 x 0.5mm Tungsten | POR | Request Quote |
| 3419 | 57mm 0 x 1.5mm Chromium | POR | Request Quote |
| 3420 | 57mm 0 x 0.2mm Tungsten | POR | Request Quote |
| 3421 | 54mm 0 x 1.5mm Carbon | POR | Request Quote |
| 3422 | 57mm 0 x 0.1mm Aluminium | POR | Request Quote |
| 3423 | 57mm 0 x 0.1mm Platinum/Palladium (80/20) | POR | Request Quote |
| 3424 | 57mm 0 x 1.5mm Titanium | POR | Request Quote |
| 3425 | 57mm 0 x 0.3mm Platinum/Palladium (80/20) | POR | Request Quote |
| 3426 | 57mm 0 x 0.3mm Gold | POR | Request Quote |
| 3427 | 57mm 0 x 0.3mm Gold/Palladium (80/20) | POR | Request Quote |
| 3428 | 57mm 0 x 0.3mm Platinum | POR | Request Quote |
| 3429 | 57mm 0 x 0.5mm Titanium | POR | Request Quote |
| 3430 | 57mm 0 x 0.1mm Iron | POR | Request Quote |
| 3431 | 57mm 0 x 0.3mm Iridium | POR | Request Quote |
| 3432 | 57mm 0 x 0.1mm Cobalt | POR | Request Quote |
| 3433 | 57mm 0 x 0.1mm Tin | POR | Request Quote |
| 3434 | 57mm 0 x 0.1mm Molybdenum | POR | Request Quote |
| 3435 | 57mm 0 x 0.3mm Magnesium | POR | Request Quote |
| 3436 | 57mm 0 x 0.1mm Tantalum | POR | Request Quote |
| 3437 | 57mm 0 x 3mm Indium Tin Oxide (90/10) | POR | Request Quote |
| 3500 | Carbon rods – 6.15mm 0 x 100mm length (unshaped) pack of 10 | POR | Request Quote |
| 3510 | Carbon rods – 6.15mm 0 x 50mm length (shaped) pack of 10 | POR | Request Quote |
| 3520 | Carbon rods - 3.05mm 0 x 50mm length (shaped) pack of 10 | POR | Request Quote |
| 3530 | Carbon rods 3.05mm 0 x 300mm length (unshaped) pack of 10) | POR | Request Quote |
Carbon supplies
| 3540 | Carbon fibre cord - high purity - 1m | POR | Request Quote |
| 3550 | Carbon fibre cord - high purity - 5m | POR | Request Quote |
| 3560 | Carbon fibre cord - standard grade - 1m | POR | Request Quote |
| 3570 | Carbon fibre cord - standard grade - 10m | POR | Request Quote |
| 3580 | Carbon fibre cord - standard grade - 100m | POR | Request Quote |
| 3590 | Manual rod shaper for 6.15mm Ø carbon rods | POR | Request Quote |
| 3595 | Manual rod shaper for 3.05mm Ø carbon rods | POR | Request Quote |
Other consumables and spare kits
| 3600 | Metal evaporation basket - pack of 10 (for use with metal evaporation head) | POR | Request Quote |
| 3610 | Two-year spares kit for EMS150T S Includes: chromium target, glass cylinder, carbon fibre cord, quartz crystals, O-rings |
POR | Request Quote |
| 3620 | Two-year spares kit for EMS150T E Includes: chromium target, glass cylinder, carbon fibre cord, carbon fibre - fine, carbon rods 3.05mm, quartz crystals, O-rings |
POR | Request Quote |
| 3630 | Two-year spares kit for EMS150T ES Includes: chromium target, glass cylinder, carbon fibre cord, carbon fibre - fine, carbon rods 3.05mm, quartz crystals, O-rings |
POR | Request Quote |
Specifications
| Instrument case | 585mm W x 470mm D x 410mm H (total height with coating head open: 650mm) |
| Weight | 33.4kg |
| Packed dimensions | 725mm W x 660mm D x 680mm H (42kg) |
| Work chamber | Borosilicate glass 152mm Ø (inside) x 127mm H |
| Safety shield | Integral polyethylene terephthalate (PET) cylinder |
| Display | 145mm 320 x 240 colour graphic TFT (Thin Film Transistor) display |
| User Interface | Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last ten coatings carried out and reminders for when maintenance is due |
| Sputtering target | Disc style 57mm Ø. A 0.3mm thick chromium target is fitted as standard. EMS150T S and T ES versions only |
| Specimen stage | 60mm Ø rotating stage. Rotation speed 8-20 rpm |
Vacuum
| Turbomolecular pump | Internally mounted 70L/s air-cooled turbomolecular pump |
| Rotary pump | Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter (Order separately: EK3175) |
| Vacuum measurement | Pirani gauge fitted as standard. A full range gauge (10428) is available as an option |
| Typical ultimate vacuum | 5 x 10-5mbar in a clean system after pre pumping with dry nitrogen gas |
| Sputter vacuum range | Between 5 x 10-3 and 5 x 10-1mbar |
Processes
| Sputtering | 0-150mA to a pre-determined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without “breaking” vacuum and with built in rest periods) |
| Carbon evaporation | A robust, ripple free D.C. power supply featuring pulse evaporation ensures reproducible carbon evaporation from rod or fibre sources. Current pulse: 1-90 Amps |
| Metal evaporation & aperture cleaning insert (option) | For thermal evaporation of metals from filaments or boats. For cleaning SEM or TEM apertures a standard molybdenum boat can be fitted. The metal evaporation head is set up for downwards evaporation, but upward evaporation can be achieved by fitting two terminal extensions (supplied). Evaporation time: up to four minutes |
Services and other information
| Gases | Argon sputtering process gas, 99.999% (T S and T ES versions). Nitrogen venting gas (optional) |
| Electrical supply | 90-250V ~ 50/60 Hz 1400 VA including RV3 rotary pump power.110/240V voltage selectable |
| Conformity | CE conformity |
| Power factor correction | Complies with the current legislation (CE Certification) and ensures efficient use of power which means reduced running costs |
EMS 950 Turbo Evaporator
What is CARBON EVAPORATION?
The use of Carbon Evaporation is well known in Electron Microscopy for support films and replicas in TEM, and X-Ray Microanalysis and conducting coatings in SEM.
The films are continuous for thicknesses of 2nm (or 20 Angstroms) or more, and free of significant structure.
The most common form of deposition is from resistance heated carbon, or graphite rods, spectrographically pure. The rods are shaped to achieve a high current density at the point of contact of the rods with sufficient temperature being generated to cause the evaporation. At this point, the appearance being that of small, bright, glowing particles of carbon. To achieve the required vacuum condition of 1x10-4 mbar, or better, requires the use of Diffusion or Turbo Molecular Pumps.
The EMS 950 uses a Turbo Pump, backed up by a Rotary Vacuum Pump, the complete pumping sequence being under fully automatic control, and the vacuum somewhat better than 1 x 10-5 mbar. A variable control is available to pre-heat, and outgas the rods, while the use of an instantaneous evaporate switch allows bust evaporation under user control.
The Rotary Specimen Table is adjustable in height, and can facilitate a range of specimens. This is in addition to the special recess to locate standard glass slides, specifically beneficial for 'Asbestos Analysis' methods requiring carbon coatings.
An alternative Head can be fitted for the 'occasional' use of aperture cleaning.
The normal venting is by restriction to avoid specimen disturbance with the system being fully interlocked.
The Turbo pump can be mounted on any axis, and can 'shutdown' safely to atmosphere.
The head is a quick release head and it stays on the unit and has spring loaded release clips at the sides and can readily fit any of the options. (Sputtering, glow discharge, aperture cleaning, ect.).
Features
- Multi specimen holder.
- Built in penning head and gauge.
- Automatic pumping sequence.
- Turbomolecular pumping.
- Clean vacuum.
- Variable outgas control.
- Evaporation pulse button.
- Restricted vent control avoiding specimen disturbance.
- Rotating specimen table
- Modular electronics.
- Clean line design.
- Polycarbonate safety shield.
Specifications
| Instrument Case | 450mm(W) x 350mm(D) x 175mm(H) |
| Work Chamber | Borosilicate Glass: 165mm(Dia.) x 125mm(H) Plus Aluminum Base: 110mm(Dia.) x 115mm(H) |
| Weight | 28Kg |
| Carbon Source | Rods 3.2mm (Dia.) |
| Rotating Specimen Stage | 60mm (Dia.) Rotate and tilt standard |
| Spacing to Electrodes | 130 mm |
| Vacuum Gauge | ATM 1 x 10-5 mbar |
| High Vacuum | Normal condition indicator |
| Operating Vacuum | 1 x 10-5 mbar |
| Ammeter Gauge | 0-50 Amps |
| Low Voltage | 0-5v-15v-25v |
| Outgas Current | 0-25 Amps |
| Turbomolecular Pump | 60L/Second |
| Supply | 115 volts 60 Hz (12 amp Max incl pump) 230 volts 50 Hz (6 amp Max incl pump) |
| Vacuum Pump | 85L/Min Complete with vacuum hose and oil mist filter |
| Size | 340mm(L) x 150mm(W) x 250mm(H) |
| Weight | 14Kg |
Ordering Information
| 91070 | EMS 950 Turbo Coater complete with carbon sources | POR | Request Quote |
| 91005 | Rotary Vacuum Pump | 2,444.00 | Add to Cart |
Replacement Source
| 91077 | Carbon Rods 6.15mm Dia, 12/pack | 59.00 | Add to Cart |
Replacement Parts
| 91013 | Glass Cylinder 165mm (6") | 175.00 | Add to Cart |
| 91014 | 'L' Gasket to suit 165mm (6") cylinder (1 pair) | 95.00 | Add to Cart |
Optional Accessories
| 94100 | EMS 100 Glow Discharge Head | POR | Request Quote |
| 91004-S | EMS 105 Aperture Cleaning Head | POR | Request Quote |
| 95125 | EMS 110 Carbon Fiber Coating Attach. | POR | Request Quote |
| 91006 | EMS 150 Film Thickness Monitor | POR | Request Quote |
| 92030 | EMS 175 Oscillating Stage | POR | Request Quote |
| 92035 | EMS 180 Heating Stage | POR | Request Quote |
| 91082 | EMS 350 Sputter Coating Attach. | POR | Request Quote |
| 92030 | EMS 175 Oscillating Stage | POR | Request Quote |
EMS 975 Large Chamber Turbo Evaporator & EMS
975S for Semionductor Wafer Coating
Turbo Evaporator and Wafer Coating
The EMS-975 Turbo Evaporator is a multiple application system to enable a range of preparation techniques to be applied with the flexibility and module expansion capability to develop new methods and prepare new specimens.
It allows for carbon evaporation, metal evaporation from both baskets and crucibles and sputter coating option. A range of techniques can be practiced including carbon support films and replicas for TEM, carbon/metal evaporation, low angle shadowing and sequential layer coating using dual source evaporation and the sputter option can be used for a range of target materials.
The system flexibility is further enhanced by the use of a microcontroller, which readily allows the customer access to a range of options, but readily 'defaults' to optimum operating conditions, allowing both fully automatic and manual override as required. The unique loading rack out drawer system gives the user easy sample access with good sample size and the hinged lid assembly makes any other areas of the system readily accessible.
The unit has a turbo pump, externally mounted for convenience and easy exchange, and is backed up by a Rotary Vacuum Pump. The complete pumping sequence is under fully automatic control, achieving a high vacuum for evaporation.
The unit is bench mounted, with easy to use controls, and cannot be damaged by inadvertent use.
The EMS 975S is based on the EMS 975, however it has a special load lock door which allows the entry of 8" wafers with carbon coating, or other samples up to 140mm x 140mm square.
Features
- Turbomolecular Pump.
- Automatic pumping sequence.
- Clean vacuum.
- Variable outgas control.
- Evaporation pulse button.
- Unique "anti stick" carbon rod gun evaporation assembly (patent pending).
- Rack out drawer sample loading system.
- Specimen table with tilt facility (standard).
- Rotating plate specimen table, with external accurate tilt control (option).
- Large Sample capacity, 150mm (6") using drawer with up to 200mm (8") for top loading.
- Sample holders range of options, including grid holders, stub holders.
- Carbon and carbon/platinum evaporation.
- Full range vacuum measuring system.
- Fast pumping cycle.
- Protective Polycarbonate Implosion Shield.
- Selectable evaporation supplies giving x 4 evaporation settings.
- Restricted or full vent control to avoid disturbances of samples.
- Microcontroller with LCD displays of status and customer data entry for control of systems.
- Modular electronics.
- Bench mounted unit.
- Sputter coating (option) for range of metal targets.
- Film thickness measurement for carbon and metal depositions.
Specifications
| Instrument Case | 450mm(W)x500mm(D) x 300mm(H) |
| Work chamber | Borosilicate Glass: 250mm(Dia.)x300mm(H) with hinged top plate (can accommodate samples to 200mm) (8") in Dia. |
| Polycarbonate Implosion Guard | To suit work chamber readily removable for maintenance |
| Weight | 65kg |
| Carbon Gun | Adjustable height with tilt control 0-20°. Uses 6.15mm carbon rods |
| Turbomolecular Pump | 100L/ Sec as standard Optional sizes available |
| Vacuum Gauges | Active Gauge Head: Atm to 1 x 10-7 mbar |
| Working Vacuum | within 15 minutes |
| Operating Vacuum | Into x10-5 mbar range (liquid nitrogen trap option) |
| Evaporation supply (Pulsed or variable control) |
4 x selectable, low voltage volts a.c. V, 5V, 15V, 25V @ 25 amps. 7V @ 100 amps. |
| Specimen Table | With tilt facility 1-45° |
| Rotating Specimen Table Option |
60mm(Dia.) tilling 0-45° with variable speed control 15 rpm to 45 rpm |
| Sputtering
Option Deposition |
0-100mA |
| Deposition Rate | 0-50nm/min. gold (Au) |
| Standard Target | 57mm Au (options Pt, Pt/Pd, Pd, Cr, Ni, Cu, Ag) |
| Timer (HT Safety Interlocked) | 0-4 min. |
| Services | Argon (for sputtering option) - Nominal 4 psi. |
| Vacuum pump | No. 2 pump (2mVhr) Pumping speed oil mist filter vacuum hose (included with instrument) |
| Supply | 115V 60 Hz (16 amp including pump) 230V 50 Hz (8 amp including pump) |
Ordering Information
| 91090 | EMS 975 Large Chamber Turbo Evaporator complete with carbon source | POR | Request Quote |
| 91090-S | EMS 975S Turbo Evaporator for Semi Conductor Wafer Coating | POR | Request Quote |
| 91005 | Rotary Vacuum Pump | 2444.00 | Add to cart |
Replacement Source
| 91077 | Carbon Rods (6.15mm Dia.), 12/pack | 59.00 | Add to Cart |
Replacement Parts
| 91033 | Glass Cylinder | 650.00 | Add to Cart |
| 91034 | "L" Gaskets | 400.00 | Request Quote |
Optional Accessories
| 91004-S | EMS 105 Aperture Cleaning Head | POR | Request Quote |
| 92060 | EMS 190 Low Angle Shadowing | POR | Request Quote |
| 91082 | EMS Sputter Coater Attachment | POR | Request Quote |
