Carbon
Turbo Evaporators
EMS 150T Turbo-Pumped Sputter Coater/Carbon Coater
The EMS 150T is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin-film applications. The EMS 150T replaces previous the following models EMS 575X and EMS 950X.
The EMS 150T is available in three formats:
EMS 150T S — a high resolution sputter coater, suitable for oxidising and non-oxidising metals
EMS 150T E — a high vacuum carbon coater for SEM and TEM applications
EMS 150T ES — a high resolution sputter coater and high vacuum carbon evaporator
Key Features
- Metal sputtering or carbon evaporation - or both – in one space saving design
- Fine grain sputtering – for advanced high resolution FESEM applications
- High vacuum turbo pumping – allows sputtering of a wide range of oxidizing and non-oxidizing metals – suitable for SEM, high resolution FESEM and also for many thin film applications
- High vacuum carbon coating – ideal for SEM and TEM carbon coating applications
- Advanced design carbon rod evaation gun – simple operation, reproducible results
- Control of evaation current profile – ensures consistently reproducible carbon films
- Precise thickness control using the film thickness monitor option
- Fully automatic touch screen control – rapid data input, simple operation
- Multiple, customer defined coating schedules can be stored – ideal for multi-user laboratories
- Automatic vacuum control, which can be preprogrammed to suit the process and material – no needle valve to adjust
- “Intelligent” recognition system – automatically detects the type of coating insert fitted
- Easy-to-change, drop-in style specimen stages (rotation stage as standard)
- Vacuum shutdown feature – leaves the process chamber under vacuum when not in use – improved vacuum performance
- Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
- Ergonomic one piece molded case – easy maintenance and service access
- Ethernet with local FTP server connection – simple programmer updates
- Power factor correction – complies with current legislation (CE Certification) – efficient use of power means reduced
Ideal for SEM, high resolution FESEM and TEM applications
EMS150T is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the EMS 150T can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), a carbon coater suitable for SEM and transmission electron microscopy (TEM), or both, in a single easy to use system.
The ability of the EMS150T to rapidly sputter a wide selection of oxidizing and non-oxidizing metals also makes it an ideal platform for many thin film applications.
Molded case with color touch-screen
The EMS150T is presented in a custom molded, one-piece case. The color touch screen allows multiple users to input and store coating protocols. The case houses all the working components, including the efficient 70L/s air-cooled turbo molecular pump. Automatic bleed control ensures optimum vacuum conditions during sputtering.
The vacuum chamber has an external diameter of 165mm (6.5") and comes with an integral implosion guard. The EMS150T includes “vacuum shutdown” which enhances vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use. A variable speed rotary specimen stage is fitted as standard, with other stages available as options.
Sputter coating, carbon coating or both
The EMS150T is available in three formats, each with a range of optional accessories:
- EMS150T S – a high resolution sputter coater for oxidizing and non-oxidizing (noble) metals. A wide selection of sputtering targets is available, including iridium and chromium, which are highly recommended for FESEM applications.
- EMS150T E – a high vacuum carbon coater, ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The system uses economical 3.05mm diameter carbon rods.
- EMS150T ES – a combined system with both sputtering and carbon coating. The deposition inserts can be swapped in seconds and the intelligent system logic automatically recognizes which insert is in place and displays the appropriate operating settings.
Each of the above can be fitted with a range of optional accessories (eg. metal evaporation, carbon fiber coating, film thickness monitor). See options for details.
Rapid data entry
At the operational heart of the EMS 150T is a simple color touch screen which allows even the most inexperienced or occasional operator to rapidly enter and store their own process data. To further aid ease of use, a number of typical sputtering and evaporation profiles are already stored.
Processes
Sputtering: 0-150mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximium sputtering time is 60 minutes (without ‘breaking’ vacuum and with built in rest periods).
Carbon evaporation: A robust, ripple free DC power supply featuring pulse evaporation ensures reproducible carbon evaporation from rod or fiber sources. Current pulse: 1-90A
Metal evaporation and aperture cleaning insert (option): For thermal evaporation of metals from filaments or boats. For cleaning SEM or TEM apertures a standard molybdenum boat (supplied) can be fitted. The metal evaporation head is set up for downwards evaporation, but upward evaporation can be achieved by fitting two terminal extensions (supplied). Evaporation times: up to four minutes.
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| Tilt Rotation Stage and FTM | Carbon Rod Evaporation Insert | Metal Evaporation insert |
Specifications
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Vacuum
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Services and Other Information
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Ordering Information
| 3390 | EMS150T E Turbomolecular pumped carbon evaporator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation insert for 3.05mm Ø carbon rods. Supplied with carbon rods (3.05mm Ø x 300mm) and a carbon rod shaper (manual operation) | POR | Request Quote |
| 3380 | EMS150T S - High resolution turbomolecular pumped sputter coater, including a 54mm Ø x 0.3mm chromium target | POR | Request Quote |
| 3400 | EMS150T ES - High-resolution turbomolecular pumped sputter coater, including a 57mm Ø x 0.3mm chromium target and high vacuum carbon rod evaporation coater for 3.05mm Ø carbon rods. | POR | Request Quote |
Rotary pump requirements (needs to be ordered separately):
| 91003 | Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter | POR | Request Quote |
Options and Accessories
Including details of coating head inserts and specimen stages that are fitted as standard
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| Tilt Angle Stage | Rotary Planetary Stage | 4" Wafer Stage | Glass Microscope Stage | Carbon Evaporation Insert |
Coating head options
A range of interchangeable, plug-in style coating head inserts are available:
| 3200 | Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54mm x 0.3mm thick chromium target as standard. For additional targets see Sputtering Targets section | POR | Request Quote |
| 3210 | Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly. | POR | Request Quote |
| 3230 | Carbon rod evaporation head insert (for 3.05mm Ø rods) | POR | Request Quote |
| 3240 | Carbon rod evaporation head insert (for 6.15mm Ø rods). Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical (less wastage). | POR | Request Quote |
| 3250 | Carbon fiber evaporation head insert | POR | Request Quote |
| 3260 | Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (T E and T ES versions only). Supplied with a pack of ten tungsten filaments and a molybdenum boat. |
POR | Request Quote |
| 3270 | Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens | POR | Request Quote |
| 3280 | Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited | POR | Request Quote |
| 3290 | Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited | POR | Request Quote |
| 3300 | Spare quartz crystals. Pack of three | POR | Request Quote |
| 3320 | Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard) | POR | Request Quote |
Specimen stages
The EMS150T has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage):
| 3330 | Rotation stage, 50mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment | POR | Request Quote |
| 3340 | Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Tilt angle can be pre-set. 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm | POR | Request Quote |
| 3350 | Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm | POR | Request Quote |
| 3360 | Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm | POR | Request Quote |
| 3370 | Rotating specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used | POR | Request Quote |
Sputtering Targets
The EMS150T S and EMS150T ES are fitted as standard with a 0.3mm thick chromium sputter target . Other optional targets:
| 3410 | 57mm Ø x 0.1mm Gold | POR | Request Quote |
| 3411 | 57mm Ø x 0.1mm Gold/Palladium (80/20) | POR | Request Quote |
| 3412 | 57mm Ø x 0.1mm Platinum | POR | Request Quote |
| 3413 | 57mm Ø x 0.1mm Nickel | POR | Request Quote |
| 3414 | 57mm Ø x 0.1mm Silver | POR | Request Quote |
| 3415 | 57mm Ø x 0.1mm Palladium | POR | Request Quote |
| 3416 | 57mm Ø x 0.1mm Copper | POR | Request Quote |
| 3417 | 57mm Ø x 0.3mm Chromium | POR | Request Quote |
| 3418 | 57mm Ø x 0.5mm Tungsten | POR | Request Quote |
| 3419 | 57mm Ø x 1.5mm Chromium | POR | Request Quote |
| 3420 | 57mm Ø x 0.2mm Tungsten | POR | Request Quote |
| 3421 | 54mm Ø x 1.5mm Carbon | POR | Request Quote |
| 3422 | 57mm Ø x 0.1mm Aluminium | POR | Request Quote |
| 3423 | 57mm Ø x 0.1mm Platinum/Palladium (80/20) | POR | Request Quote |
| 3424 | 57mm Ø x 1.5mm Titanium | POR | Request Quote |
| 3425 | 57mm Ø x 0.3mm Platinum/Palladium (80/20) | POR | Request Quote |
| 3426 | 57mm Ø x 0.3mm Gold | POR | Request Quote |
| 3427 | 57mm Ø x 0.3mm Gold/Palladium (80/20) | POR | Request Quote |
| 3428 | 57mm Ø x 0.3mm Platinum | POR | Request Quote |
| 3429 | 57mm Ø x 0.5mm Titanium | POR | Request Quote |
| 3430 | 57mm Ø x 0.1mm Iron | POR | Request Quote |
| 3431 | 57mm Ø x 0.3mm Iridium | POR | Request Quote |
| 3432 | 57mm Ø x 0.1mm Cobalt | POR | Request Quote |
| 3433 | 57mm Ø x 0.1mm Tin | POR | Request Quote |
| 3434 | 57mm Ø x 0.1mm Molybdenum | POR | Request Quote |
| 3435 | 57mm Ø x 0.3mm Magnesium | POR | Request Quote |
| 3436 | 57mm Ø x 0.1mm Tantalum | POR | Request Quote |
| 3437 | 57mm Ø x 3mm Indium Tin Oxide (90/10) | POR | Request Quote |
Carbon supplies
| 3500 | Carbon rods – 6.15mm Ø x 100mm length (unshaped) pack of 10 | POR | Request Quote |
| 3510 | Carbon rods – 6.15mm Ø x 50mm length (shaped) pack of 10 | POR | Request Quote |
| 3520 | Carbon rods - 3.05mm Ø x 50mm length (shaped) pack of 10 | POR | Request Quote |
| 3530 | Carbon rods 3.05mm Ø x 300mm length (unshaped) pack of 10 | POR | Request Quote |
| 3540 | Carbon fibre cord - high purity - 1m | POR | Request Quote |
| 3550 | Carbon fibre cord - high purity - 5m | POR | Request Quote |
| 3560 | Carbon fibre cord - standard grade - 1m | POR | Request Quote |
| 3570 | Carbon fibre cord - standard grade - 10m | POR | Request Quote |
| 3580 | Carbon fibre cord - standard grade - 100m | POR | Request Quote |
| 3590 | Manual rod shaper for 6.15mm Ø carbon rods | POR | Request Quote |
| 3595 | Manual rod shaper for 3.05mm Ø carbon rods | POR | Request Quote |
Other consumables and spare kits --> CFW Might be discontinued leave until find out
| 3600 | Metal evaporation basket - pack of 10 (for use with metal evaporation head) | POR | Request Quote |
| 3610 | Two-year spares kit for EMS150T S Includes: chromium target, glass cylinder, carbon fibre cord, quartz crystals, O-rings |
POR | Request Quote |
| 3620 | Two-year spares kit for EMS150T E Includes: chromium target, glass cylinder, carbon fibre cord, carbon fibre - fine, carbon rods 3.05mm, quartz crystals, O-rings |
POR | Request Quote |
| 3630 | Two-year spares kit for EMS150T ES Includes: chromium target, glass cylinder, carbon fibre cord, carbon fibre - fine, carbon rods 3.05mm, quartz crystals, O-rings |
POR | Request Quote |
SEM/TEM Carbon Coaters Techniques and Applications
EMS 975 Large Chamber Turbo Evaporator & EMS 975S for Semiconductor Wafer Coating
The EMS 975 Turbo Evaporator is a multiple application system to enable a range of preparation techniques to be applied with the flexibility and module expansion capability to develop new methods and prepare new specimens.
The EMS 975 allows for carbon evaporation, metal evaporation from both baskets and crucibles and sputter coating option. A range of techniques can be practiced including carbon support films and replicas for TEM, carbon/metal evaporation, low angle shadowing and sequential layer coating using dual source evaporation and the sputter option can be used for a range of target materials.
The system flexibility is further enhanced by the use of a microcontroller, which readily allows the customer access to a range of options, but readily ‘defaults’ to optimum operating conditions, allowing both fully automatic and manual override as required. The unique loading rack out drawer system gives the user easy sample access with good sample size and the hinged lid assembly makes any other areas of the system readily accessible.
The unit has a turbo pump, externally mounted for convenience and easy exchange, and is backed up by a Rotary Vacuum Pump. The complete pumping sequence is under fully automatic control, achieving a high vacuum for evaporation.
The unit is bench mounted, with easy to use controls, and cannot be damaged by inadvertent use.
The EMS-975S is based on the EMS-975, however it has a special load lock door which allows the entry of 8” wafers with carbon coating, or other samples up to 140mm x 140mm square.
Features
- Turbomolecular Pump.
- Automatic pumping sequence.
- Clean vacuum.
- Variable outgas control.
- Evaporation pulse button.
- Unique “anti stick” carbon rod gun evaporation assembly (patent pending).
- Rack out drawer sample loading system.
- Rotating plate specimen table with external accurate tilt control (option).
- Large sample capacity,150mm (6") using drawer with up 200mm (8") for top loading.
- Sample holders range of options, including grid holders, stub holders.
- Carbon and Carbon/Platinum evaporation.
- Full range vacuum measuring system.
- Fast pumping cycle.
- Protective Polycarbonate Implosion Shield.
- Selectable evaporation supplies giving x 4 evaporation settings.
- Restricted or full vent control to avoid disturbances of samples.
- Microcontroller with LCD displays of status and customer data entry for control of systems.
- Modular electronics.
- Bench mounted unit.
- Sputter coating (option) for range of metal targets.
- Film thickness measurement for carbon and metal depositions.
Specifications
| Dimensions and Weight | 450mm (W) x 500mm (D) x 300mm (H). 65kg |
| Work Chamber | Borosilicate Glass 250mm (Dia.) x 300mm (H) with hinged top plate (can accommodate samples to 200mm) (8”) in Dia. |
| Implosion Guard | Polycarbonate - readily removable for maintenance |
| Carbon source | Adjustable height with tilt control of 0-200°. Uses 6.15mm Ø carbon rods (source for 3.05mm Ø carbon rods can be fitted - please specify at time of ordering) |
| Metal source | Adjustable height with tilt control 0-200°. Supplied with pack of 10 B5230 tungsten specimen baskets |
| Specimen Stage | With tilt facility 0-45° |
| Vacuum Gauge range | Atm to 1 x 10-7-7 mbar |
| Operating Vacuum | Towards 1 x10-5 mbar, typically achieved within 15 minutes |
| Low voltage evaporation supply | Pulsed or variable control. Selectable: 0-5V-15V-25V, out-gas current: 0-25A |
| Services | Nitrogen gas (if used for venting). Argon gas (if the optional sputtering attachment is fitted) |
| Vacuum pumping | 100L/s turbomolecular pump. Requires a 50L/m ‘backing’ rotary pump with oil mist filter |
| Electrical supply | 230V/50Hz (8A max including pump), 115V/60Hz (16A max including pump) |
| Supplied with | Accessory kit including: carbon rods (6.15mm x 100mm), evaporation filaments, manual rod shaper and operating manual |
Ordering Information
| 91090 | EMS 975 Large Chamber Turbo Evaporator complete with carbon source | POR | Request Quote |
| 91090-S | EMS 975S Turbo Evaporator for Semi Conductor Wafer Coating | POR | Request Quote |
| 91005 | Rotary Vacuum Pump needed to backup the turbo pump | 2566.00 | Add to cart |
Replacement Source
| 91077 | Carbon Rods (6.15mm Dia.), 12/pack | 59.00 | Add to Cart |
Replacement Parts
| 91033 | Glass Cylinder | 650.00 | Add to Cart |
| 91034 | "L" Gaskets | 400.00 | Request Quote |
Optional Accessories
| 91004-S | EMS 105 Aperture Cleaning Head | POR | Request Quote |
| 92060 | EMS 190 Low Angle Shadowing | POR | Request Quote |
| 91082 | EMS Sputter Coater Attachment | POR | Request Quote |
