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arrow14Carbon Turbo Evaporators

arrow14EMS 150T Turbo-Pumped Sputter Coater/Carbon Coater

Turbo Pumped Sputter Coater Carbon Coater The EMS 150T is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin-film applications. The EMS 150T replaces previous the following models EMS 575X and EMS 950X.

The EMS 150T is available in three formats:

EMS 150T S — a high resolution sputter coater, suitable for oxidising and non-oxidising metals

EMS 150T E — a high vacuum carbon coater for SEM and TEM applications

EMS 150T ES — a high resolution sputter coater and high vacuum carbon evaporator

Key Features

Ideal for SEM, high resolution FESEM and TEM applications

EMS150T closeupEMS150T is available in three formats: sputtering, carbon evaporation or both. Depending upon the selected configuration, the EMS 150T can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), a carbon coater suitable for SEM and transmission electron microscopy (TEM), or both, in a single easy to use system.

The ability of the EMS150T to rapidly sputter a wide selection of oxidizing and non-oxidizing metals also makes it an ideal platform for many thin film applications.

Molded case with color touch-screen

The EMS150T is presented in a custom molded, one-piece case. The color touch screen allows multiple users to input and store coating protocols. The case houses all the working components, including the efficient 70L/s air-cooled turbo molecular pump. Automatic bleed control ensures optimum vacuum conditions during sputtering.

The vacuum chamber has an external diameter of 165mm (6.5") and comes with an integral implosion guard. The EMS150T includes “vacuum shutdown” which enhances vacuum performance by allowing the chamber vacuum to be maintained when the system is not in use. A variable speed rotary specimen stage is fitted as standard, with other stages available as options.

Sputter coating, carbon coating or both

The EMS150T is available in three formats, each with a range of optional accessories:

Each of the above can be fitted with a range of optional accessories (eg. metal evaporation, carbon fiber coating, film thickness monitor). See options for details.

EMS 150T touch screenRapid data entry

At the operational heart of the EMS 150T is a simple color touch screen which allows even the most inexperienced or occasional operator to rapidly enter and store their own process data. To further aid ease of use, a number of typical sputtering and evaporation profiles are already stored.

Processes

Sputtering: 0-150mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximium sputtering time is 60 minutes (without ‘breaking’ vacuum and with built in rest periods).

Carbon evaporation: A robust, ripple free DC power supply featuring pulse evaporation ensures reproducible carbon evaporation from rod or fiber sources. Current pulse: 1-90A

Metal evaporation and aperture cleaning insert (option): For thermal evaporation of metals from filaments or boats. For cleaning SEM or TEM apertures a standard molybdenum boat (supplied) can be fitted. The metal evaporation head is set up for downwards evaporation, but upward evaporation can be achieved by fitting two terminal extensions (supplied). Evaporation times: up to four minutes.

Tilt Rotation Stage Tilt Rotation Stage Metal Evaporation Insert
Tilt Rotation Stage and FTM Carbon Rod Evaporation Insert Metal Evaporation insert

Specifications

Instrument Case 585mm (W) x 470mm (D) x 410mm (H)
(total height with coating head open: 650mm)
Weight 33.4 Kg
Packed dimensions 725mm (W) x 660mm (D) x 680mm (H) (Weight 42 Kg)
Work chamber Borosilicate Glass: 152mm (Inside D) x 127mm H
Safety shield Integral polyethylene terephthalate (PET) cylinder
Display 145mm 320 x 240 colour graphic TFT (Thin Film Transistor) display  
User interface Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last ten coatings carried out and reminders for when maintenance is due  
Sputter target Disc style 57mm. A 0.3mm thick chromium target is fitted as standard. EMS150T S and T ES versions only  

Vacuum

Turbomolecular pump   Internally-mounted, 70L/s air-cooled turbomolecular pump  
Rotary pump Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter  
Vacuum measurement   Pirani gauge as standard. A full range gauge (10428) is available as an option  
Typical ultimate vacuum 5 x 10-5 mbar in a clean system after pre-pumping with dry nitrogen gas  
Sputter vacuum range   Between 5x10-3 and 5x10-1 mbar  
Specimen stage 60mm rotating stage. Rotation speed 8-20 rpm  

Services and Other Information

Gases
Argon sputtering process gas, 99.999% (TS and TES versions); Nitrogen venting gas (optional)
Electrical supply
90-250V ~ 50/60 Hz 1400 VA including RV3 rotary pump power. 110/240V voltage selectable 
Conformity CE conformity
Power factor correction Complies with the current legislation (CE Certification) and ensures efficient use of power, which means reduced running costs

 

Ordering Information

3390 EMS150T E Turbomolecular pumped carbon evaporator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation insert for 3.05mm Ø carbon rods. Supplied with carbon rods (3.05mm Ø x 300mm) and a carbon rod shaper (manual operation) POR Request Quote
3380 EMS150T S - High resolution turbomolecular pumped sputter coater, including a  54mm Ø x 0.3mm chromium target POR Request Quote
3400 EMS150T ES - High-resolution turbomolecular pumped sputter coater, including a  57mm Ø x 0.3mm chromium target and high vacuum carbon rod evaporation coater for 3.05mm Ø carbon rods. POR Request Quote
Rotary pump requirements (needs to be ordered separately):
91003 Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter POR Request Quote
Options and Accessories

Including details of coating head inserts and specimen stages that are fitted as standard

Tilt Angle Stage Rotary Planetary Stage 4" Wafer Stage Glass Microscope Stage Carbon Evaporation Insert
Tilt Angle Stage Rotary Planetary Stage 4" Wafer Stage Glass Microscope Stage Carbon Evaporation Insert
Coating head options

A range of interchangeable, plug-in style coating head inserts are available:

3200 Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54mm x 0.3mm thick chromium target as standard. For additional targets see Sputtering Targets section POR Request Quote
3210 Additional sputter insert for quick metal change. Note: this is an entire sputtering assembly. POR Request Quote
3230 Carbon rod evaporation head insert (for 3.05mm Ø rods) POR Request Quote
3240 Carbon rod evaporation head insert (for 6.15mm Ø rods). Note that EMS recommends 3.05mm Ø rods as they offer greater process control and are more economical (less wastage). POR Request Quote
3250 Carbon fiber evaporation head insert POR Request Quote
3260 Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (T E and T ES
versions only). Supplied with a pack of ten tungsten filaments  and a molybdenum boat.
POR Request Quote
3270 Extended height vacuum chamber (214mm high – the standard chamber is 127mm high). For increased source to sample distance and for coating large specimens POR Request Quote
3280 Vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS150T when bench depth is limited POR Request Quote
3290 Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This ‘modification’ is used to measure and control the thickness of material deposited POR Request Quote
3300 Spare quartz crystals. Pack of three POR Request Quote
3320 Full range vacuum gauge for low and high vacuum measurement (a low vacuum Pirani gauge is fitted as standard) POR Request Quote
Specimen stages

The EMS150T has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except  rotary planetary stage):

3330 Rotation stage, 50mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment POR Request Quote
3340 Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37mm-60mm). Tilt angle can be pre-set. 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm POR Request Quote
3350 Variable angle “Rotacota” rotary planetary stage with 50mm Ø specimen platform. Has six stub positions for 15mm or 6.5mm or 1/8" pin stubs. Stage rotation speed variable between 8 and 20rpm POR Request Quote
3360 Flat rotation specimen stage for 100mm / 4” wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm POR Request Quote
3370 Rotating specimen stage for glass microscope slides (up to two x 75mm x 25mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used POR Request Quote
Sputtering Targets

The EMS150T S and EMS150T ES are fitted as standard with a 0.3mm thick chromium sputter target . Other optional targets:

3410 57mm Ø x 0.1mm Gold POR Request Quote
3411 57mm Ø x 0.1mm Gold/Palladium (80/20) POR Request Quote
3412 57mm Ø x 0.1mm Platinum POR Request Quote
3413 57mm Ø x 0.1mm Nickel POR Request Quote
3414 57mm Ø x 0.1mm Silver POR Request Quote
3415 57mm Ø x 0.1mm Palladium POR Request Quote
3416 57mm Ø x 0.1mm Copper POR Request Quote
3417 57mm Ø x 0.3mm Chromium POR Request Quote
3418 57mm Ø x 0.5mm Tungsten POR Request Quote
3419 57mm Ø x 1.5mm Chromium POR Request Quote
3420 57mm Ø x 0.2mm Tungsten POR Request Quote
3421 54mm Ø x 1.5mm Carbon POR Request Quote
3422 57mm Ø x 0.1mm Aluminium POR Request Quote
3423 57mm Ø x 0.1mm Platinum/Palladium (80/20) POR Request Quote
3424 57mm Ø x 1.5mm Titanium POR Request Quote
3425 57mm Ø x 0.3mm Platinum/Palladium (80/20) POR Request Quote
3426 57mm Ø x 0.3mm Gold POR Request Quote
3427 57mm Ø x 0.3mm Gold/Palladium (80/20) POR Request Quote
3428 57mm Ø x 0.3mm Platinum POR Request Quote
3429 57mm Ø x 0.5mm Titanium POR Request Quote
3430 57mm Ø x 0.1mm Iron POR Request Quote
3431 57mm Ø x 0.3mm Iridium POR Request Quote
3432 57mm Ø x 0.1mm Cobalt POR Request Quote
3433 57mm Ø x 0.1mm Tin POR Request Quote
3434 57mm Ø x 0.1mm Molybdenum POR Request Quote
3435 57mm Ø x 0.3mm Magnesium POR Request Quote
3436 57mm Ø x 0.1mm Tantalum POR Request Quote
3437 57mm Ø x 3mm Indium Tin Oxide (90/10) POR Request Quote
Carbon supplies
3500 Carbon rods – 6.15mm Ø x 100mm length (unshaped) pack of 10 POR Request Quote
3510 Carbon rods – 6.15mm Ø x 50mm length (shaped) pack of 10 POR Request Quote
3520 Carbon rods - 3.05mm Ø x 50mm length (shaped) pack of 10 POR Request Quote
3530 Carbon rods 3.05mm Ø x 300mm length (unshaped) pack of 10 POR Request Quote
3540 Carbon fibre cord - high purity - 1m POR Request Quote 
3550 Carbon fibre cord - high purity - 5m POR Request Quote
3560 Carbon fibre cord - standard grade - 1m POR Request Quote
3570 Carbon fibre cord - standard grade - 10m POR Request Quote
3580 Carbon fibre cord - standard grade - 100m POR Request Quote
3590 Manual rod shaper for 6.15mm Ø carbon rods POR Request Quote
3595 Manual rod shaper for 3.05mm Ø carbon rods POR Request Quote
Other consumables and spare kits --> CFW Might be discontinued leave until find out
3600 Metal evaporation basket - pack of 10 (for use with  metal evaporation head) POR Request Quote
3610 Two-year spares kit for EMS150T S
Includes: chromium target, glass cylinder,  carbon fibre cord, quartz crystals, O-rings
POR Request Quote
3620 Two-year spares kit for EMS150T E
Includes:  chromium target, glass cylinder,  carbon fibre cord,  carbon fibre - fine,  carbon rods 3.05mm, quartz crystals, O-rings
POR Request Quote
3630 Two-year spares kit for EMS150T ES
Includes:  chromium target, glass cylinder,  carbon fibre cord,  carbon fibre - fine,  carbon rods 3.05mm,  quartz crystals, O-rings
POR Request Quote

Technical Data sheet

SEM/TEM Carbon Coaters Techniques and Applications

EMS 975 Large Chamber Turbo Evaporator & EMS 975S for Semionductor Wafer Coatingarrow14EMS 975 Large Chamber Turbo Evaporator & EMS 975S for Semiconductor Wafer Coating

The EMS 975 Turbo Evaporator is a multiple application system to enable a range of preparation techniques to be applied with the flexibility and module expansion capability to develop new methods and prepare new specimens.

The EMS 975 allows for carbon evaporation, metal evaporation from both baskets and crucibles and sputter coating option. A range of techniques can be practiced including carbon support films and replicas for TEM, carbon/metal evaporation, low angle shadowing and sequential layer coating using dual source evaporation and the sputter option can be used for a range of target materials.

The system flexibility is further enhanced by the use of a microcontroller, which readily allows the customer access to a range of options, but readily ‘defaults’ to optimum operating conditions, allowing both fully automatic and manual override as required. The unique loading rack out drawer system gives the user easy sample access with good sample size and the hinged lid assembly makes any other areas of the system readily accessible.

The unit has a turbo pump, externally mounted for convenience and easy exchange, and is backed up by a Rotary Vacuum Pump. The complete pumping sequence is under fully automatic control, achieving a high vacuum for evaporation.

The unit is bench mounted, with easy to use controls, and cannot be damaged by inadvertent use.

The EMS-975S is based on the EMS-975, however it has a special load lock door which allows the entry of 8” wafers with carbon coating, or other samples up to 140mm x 140mm square.

Features

Specifications

Dimensions and Weight 450mm (W) x 500mm (D) x 300mm (H). 65kg
Work Chamber Borosilicate Glass 250mm (Dia.) x 300mm (H) with hinged top plate (can accommodate samples to 200mm) (8”) in Dia.
Implosion Guard Polycarbonate - readily removable for maintenance
Carbon source Adjustable height with tilt control of 0-200°. Uses 6.15mm Ø carbon rods (source for 3.05mm Ø carbon rods can be fitted - please specify at time of ordering)
Metal source Adjustable height with tilt control 0-200°. Supplied with pack of 10 B5230 tungsten specimen baskets
Specimen Stage With tilt facility 0-45°
Vacuum Gauge range Atm to 1 x 10-7-7 mbar
Operating Vacuum Towards 1 x10-5 mbar, typically achieved within 15 minutes
Low voltage evaporation supply Pulsed or variable control. Selectable: 0-5V-15V-25V, out-gas current: 0-25A
Services Nitrogen gas (if used for venting). Argon gas (if the optional sputtering attachment is fitted)
Vacuum pumping 100L/s turbomolecular pump. Requires a 50L/m ‘backing’ rotary pump with oil mist filter
Electrical supply

230V/50Hz (8A max including pump), 115V/60Hz (16A max including pump)

Supplied with Accessory kit including: carbon rods (6.15mm x 100mm), evaporation filaments, manual rod shaper and operating manual

Ordering Information

91090 EMS 975 Large Chamber Turbo Evaporator complete with carbon source POR Request Quote
91090-S EMS 975S Turbo Evaporator for Semi Conductor Wafer Coating POR Request Quote
91005 Rotary Vacuum Pump needed to backup the turbo pump 2566.00 Add to cart

Replacement Source

91077 Carbon Rods (6.15mm Dia.), 12/pack 59.00 Add to Cart

Replacement Parts

91033 Glass Cylinder 650.00 Add to Cart
91034 "L" Gaskets 400.00 Request Quote

Optional Accessories

91004-S EMS 105 Aperture Cleaning Head POR Request Quote
92060 EMS 190 Low Angle Shadowing POR Request Quote
91082 EMS Sputter Coater Attachment POR Request Quote

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