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Electron Microscopy Sciences

Vacuum Pumps and Evaporation

arrow13Sputter Coater Targets

arrow12Sputter Coater Targets

The following targets are intended for our equipment and are stock items. All other targets are custom made and delivery is about one week.

We are able to supply targets (foil with base) for the following sputtering units: Emitech, Emscope, Bio-Rad, Polaron, Edwards, Balzers, Plasma Sciences and much more. Our targets are available in Gold, Gold/Palladium, Platnium, Chromium, and Silver and are up to 30% thicker than the original. When ordering, please state make and model of the sputtering unit to ensure proper fit.

91010 Gold Target 60mm diameter by 0.1mm thick each 750.00 Add to Cart
91011 Gold/Palladium Target (60:40) 60mm diameter by 0.1mm thick each 750.00 Add to Cart
91012 Palladium Target 60mm dia. x 0.1mm thick each 1,025.00 Add to Cart

Sputtering Targets, Sputter Coater Cathodesarrow12Sputtering Targets – Sputter Coater Cathodes

EMS precious metal sputtering targets are made from high purity metals, starting 99.99% with most standard disc sizes, for use on most sputtering units from many manufacturers: Emitech, Emscope, Bio-Rad, Polaron, Edwards, Balzers, Plasma Sciences, Technics Hummers, Denton, Cressington, and much more.

Our targets come in a standard thickness of 0.1 mm (100µm). Other thickness, ranging from 0.05 to 6mm, are available upon request. Targets are avaible mounted or unmounted whichever you prefer. For mounting please always state the make and the model of the sputtering unit so we can tend to it for you. Targets in other materials such as Chromium, Iridium etc. are available upon request. We also can manufacture targets with diameters from 4 mm to 304.8 mm (12"). Call for pricing.

Ordering Information:

EMS strives to maintain accurate pricing. However, due to fluctuations in precious metal prices, pricing on products containing precious metals is not guaranteed. We will contact you if there is a discrepancy.

msdsmsdsarrow12Gold (Au) and Platinum (Pt)
Diameter mm Gold (Au) Price   Platinum (Pt) Price  
20.0 91006-Au 400.00 Add to Cart 91006-Pt 595.00 Add to Cart
20.4 91007-Au 400.00 Add to Cart 91007-Pt 595.00 Add to Cart
32.0 91008-Au 495.00 Add to Cart 91008-Pt 595.00 Add to Cart
39.0 91009-Au 495.00 Add to Cart 91009-Pt 595.00 Add to Cart
42.0 91013-Au 620.00 Add to Cart 91013-Pt 800.00 Add to Cart
50.0 91014-Au 650.00 Add to Cart 91014-Pt 975.00 Add to Cart
50.8 91015-Au 650.00 Add to Cart 91015-Pt 975.00 Add to Cart
54.0 91016-Au 600.00 Add to Cart 91016-Pt 950.00 Add to Cart
57.0 91017-Au 625.00 Add to Cart 91017-Pt 950.00 Add to Cart
60.0 91010-Au 700.00 Add to Cart 91012-Pt 1020.00 Add to Cart
63.5 91018-Au 725.00 Add to Cart 91018-Pt 975.00 Add to Cart
75.0 91019-Au 800.00 Add to Cart 91019-Pt 1,200.00 Add to Cart
76.0 91020-Au 825.00 Add to Cart 91020-Pt 1,225.00 Add to Cart
msdsarrow12Palladium (Pd) and Gold Palladium 60/40
Diameter mm Palladium (Pd) Price

 

Gold Palladium 60/40 Price  
20.0 91006-Pd 500.00 Add to Cart 91006-AP 325.00 Add to Cart
20.4 91007-Pd 500.00 Add to Cart 91007-AP 425.00 Add to Cart
32.0 91008-Pd 500.00 Add to Cart 91008-AP 395.00 Add to Cart
39.0 91009-Pd 500.00 Add to Cart 91009-AP 395.00 Add to Cart
42.0 91013-Pd 525.00 Add to Cart 91013-AP 695.00 Add to Cart
50.0 91014-Pd 600.00 Add to Cart 91014-AP 625.00 Add to Cart
50.8 91015-Pd 600.00 Add to Cart 91015-AP 625.00 Add to Cart
54.0 91016-Pd 525.00 Add to Cart 91016-AP 600.00 Add to Cart
57.0 91017-Pd 500.00 Add to Cart 91017-AP 600.00 Add to Cart
60.0 91010-Pd 650.00 Add to Cart 91011-AP 700.00 Add to Cart
63.5 91018-Pd 650.00 Add to Cart 91018-AP 795.00 Add to Cart
75.0 91019-Pd 700.00 Add to Cart 91019-AP 850.00 Add to Cart
76.0 91020-Pd 650.00 Add to Cart 91020-AP 750.00 Add to Cart
arrow12Platinum / Palladium 80:20 and Silver (Ag)
Diameter mm Platinum /
Palladium 80:20
Price   Silver (Ag) Price  
20.0 91006-PP 500.00 Add to Cart 91006-Ag 295.00 Add to Cart
20.4 91007-PP 500.00 Add to Cart 91007-Ag 400.00 Add to Cart
32.0 91008-PP 500.00 Add to Cart 91008-Ag 295.00 Add to Cart
39.0 91009-PP 500.00 Add to Cart 91009-Ag 295.00 Add to Cart
42.0 91013-PP 650.00 Add to Cart 91013-Ag 300.00 Add to Cart
50.0 91014-PP 750.00 Add to Cart 91014-Ag 300.00 Add to Cart
50.8 91015-PP 750.00 Add to Cart 91015-Ag 300.00 Add to Cart
54.0 91016-PP 750.00 Add to Cart 91016-Ag 292.00 Add to Cart
57.0 91017-PP 900.00 Add to Cart 91017-Ag 295.00 Add to Cart
60.0 91010-PP 825.00 Add to Cart 91010-Ag 325.00 Add to Cart
63.5 91018-PP 825.00 Add to Cart 91018-Ag 350.00 Add to Cart
75.0 91019-PP 925.00 Add to Cart 91019-Ag 350.00 Add to Cart
76.0 91020-PP 825.00 Add to Cart 91020-Ag 375.00 Add to Cart
msdsarrow12Nickel (Ni) and Iridium (Ir)
Diameter mm Cat# Price Nickel (Ni) Cat# Price Iridium (Ir)
20.0 91006-Ni 150.00 Add to Cart 91006-Ir 1,040.00 Add to Cart
20.4 91007-Ni 160.00 Add to Cart 91007-Ir 1,075.00 Add to Cart
32.0 91008-Ni 165.00 Add to Cart 91008-Ir 1,500.00 Add to Cart
39.0 91009-Ni 170.00 Add to Cart 91009-Ir 1,800.00 Add to Cart
42.0 91013-Ni 175.00 Add to Cart 91013-Ir 1,900.00 Add to Cart
50.0 91014-Ni 180.00 Add to Cart 91014-Ir 2,100.00 Add to Cart
50.8 91015-Ni 182.00 Add to Cart 91015-Ir 2,400.00 Add to Cart
54.0 91016-Ni 190.00 Add to Cart 91016-Ir 2,200.00 Add to Cart
57.0 91017-Ni 192.00 Add to Cart 91017-Ir 2,300.00 Add to Cart
60.0 91010-Ni 198.00 Add to Cart 91010-Ir 2,800.00 Add to Cart
63.5 91018-Ni 199.00 Add to Cart 91018-Ir 3,000.00 Add to Cart
75.0 91019-Ni 225.00 Add to Cart 91019-Ir 3,300.00 Add to Cart
76.0 91020-Ni 240.00 Add to Cart 91020-Ir 3,500.00 Add to Cart
msdsarrow12Copper (Cu) and Chromium (Cr)
Diameter mm Cat# Price Copper (Cu) Cat# Price Chromium (Cr)
20.0 91006-Cu 110.00 Add to Cart 91006-Cr POR Quote
20.4 91007-Cu 110.00 Add to Cart 91007-Cr POR Quote
32.0 91008-Cu 140.00 Add to Cart 91008-Cr POR Quote
39.0 91009-Cu 160.00 Add to Cart 91009-Cr POR Quote
42.0 91013-Cu 165.00 Add to Cart 91013-Cr POR Quote
50.0 91014-Cu 168.00 Add to Cart 91014-Cr POR Quote
50.8 91015-Cu 170.00 Add to Cart 91015-Cr POR Quote
54.0 91016-Cu 184.00 Add to Cart 91016-Cr POR Quote
57.0 91017-Cu 192.00 Add to Cart 91017-Cr 675.00 Quote
60.0 91010-Cu 208.00 Add to Cart 91010-Cr POR Quote
63.5 91018-Cu 220.00 Add to Cart 91018-Cr POR Quote
75.0 91019-Cu 250.00 Add to Cart 91019-Cr POR Quote
76.0 91020-Cu 260.00 Add to Cart 91020-Cr POR Quote
arrow12Tungsten (W) and Carbon (C)
Diameter mm Cat# Price Tungsten (W) Cat# Price Carbon (C)
20.0 91006-W 90.00 Add to Cart 91006-C POR Quote
20.4 91007-W 92.00 Add to Cart 91007-C POR Quote
32.0 91008-W 104.00 Add to Cart 91008-C POR Quote
39.0 91009-W 110.00 Add to Cart 91009-C POR Quote
42.0 91013-W 130.00 Add to Cart 91013-C POR Quote
50.0 91014-W 160.00 Add to Cart 91014-C POR Quote
50.8 91015-W 165.00 Add to Cart 91015-C POR Quote
54.0 91016-W 172.00 Add to Cart 91016-C POR Quote
57.0 91017-W 180.00 Add to Cart 91017-C POR Quote
60.0 91010-W 188.00 Add to Cart 91010-C POR Quote
63.5 91018-W 206.00 Add to Cart 91018-C POR Quote
75.0 91019-W 240.00 Add to Cart 91019-C POR Quote
76.0 91020-W 250.00 Add to Cart 91020-C POR Quote
arrow12Titanium (Ti) and Iron (Fe)
Diameter mm Cat# Price Titanium (Ti) Cat# Price Iron (Fe)
20.0 91006-Ti 160.00 Add to Cart 91006-Fe 42.00 Add to Cart
20.4 91007-Ti 165.00 Add to Cart 91007-Fe 50.00 Add to Cart
32.0 91008-Ti 170.00 Add to Cart 91008-Fe 60.00 Add to Cart
39.0 91009-Ti 208.00 Add to Cart 91009-Fe 66.00 Add to Cart
42.0 91013-Ti 225.00 Add to Cart 91013-Fe 80.00 Add to Cart
50.0 91014-Ti 265.00 Add to Cart 91014-Fe 110.00 Add to Cart
50.8 91015-Ti 265.00 Add to Cart 91015-Fe 115.00 Add to Cart
54.0 91016-Ti 280.00 Add to Cart 91016-Fe 170.00 Add to Cart
57.0 91017-Ti 290.00 Add to Cart 91017-Fe 240.00 Add to Cart
60.0 91010-Ti 300.00 Add to Cart 91010-Fe 250.00 Add to Cart
63.5 91018-Ti 320.00 Add to Cart 91018-Fe 260.00 Add to Cart
75.0 91019-Ti 390.00 Add to Cart 91019-Fe 290.00 Add to Cart
76.0 91020-Ti 400.00 Add to Cart 91020-Fe 295.00 Add to Cart
arrow12Cobalt (Co) and Molybdenum (Mo)
Diameter mm Cat# Price Cobalt (Co) Cat# Price Molybdenum (Mo)
20.0 91006-Co 180.00 Add to Cart 91006-Mo 85.00 Add to Cart
20.4 91007-Co 190.00 Add to Cart 91007-Mo 90.00 Add to Cart
32.0 91008-Co 275.00 Add to Cart 91008-Mo 92.00 Add to Cart
39.0 91009-Co 350.00 Add to Cart 91009-Mo 96.00 Add to Cart
42.0 91013-Co 360.00 Add to Cart 91013-Mo 100.00 Add to Cart
50.0 91014-Co 380.00 Add to Cart 91014-Mo 110.00 Add to Cart
50.8 91015-Co 400.00 Add to Cart 91015-Mo 112.00 Add to Cart
54.0 91016-Co 420.00 Add to Cart 91016-Mo 120.00 Add to Cart
57.0 91017-Co 500.00 Add to Cart 91017-Mo 125.00 Add to Cart
60.0 91010-Co 550.00 Add to Cart 91010-Mo 140.00 Add to Cart
63.5 91018-Co 600.00 Add to Cart 91018-Mo 142.00 Add to Cart
75.0 91019-Co 625.00 Add to Cart 91019-Mo 150.00 Add to Cart
76.0 91020-Co 630.00 Add to Cart 91020-Mo 160.00 Add to Cart
arrow12Magnesium (Mg) and Tantalum (Ta)
Diameter mm Cat# Price Magnesium (Mg) Cat# Price Tantalum (Ta)
20.0 91006-Mg POR Quote 91006-Ta 100.00 Add to Cart
20.4 91007-Mg POR Quote 91007-Ta 102.00 Add to Cart
32.0 91008-Mg POR Quote 91008-Ta 110.00 Add to Cart
39.0 91009-Mg POR Quote 91009-Ta 120.00 Add to Cart
42.0 91013-Mg POR Quote 91013-Ta 145.00 Add to Cart
50.0 91014-Mg POR Quote 91014-Ta 175.00 Add to Cart
50.8 91015-Mg POR Quote 91015-Ta 179.00 Add to Cart
54.0 91016-Mg POR Quote 91016-Ta 185.00 Add to Cart
57.0 91017-Mg 125.00 Add to Cart 91017-Ta 200.00 Add to Cart
60.0 91010-Mg POR Quote 91010-Ta 206.00 Add to Cart
63.5 91018-Mg POR Quote 91018-Ta 220.00 Add to Cart
75.0 91019-Mg POR Quote 91019-Ta 250.00 Add to Cart
76.0 91020-Mg POR Quote 91020-Ta 260.00 Add to Cart

msdsarrow12Annular Targets (Outside Diameter x Inside Diameter, mm)

arrow12Gold (Au) and Platinum (Pt)
OD x ID Gold (Au) Price   Platinum (Pt) Price  
117 x 89 91030-Au 2,000.00 Add to Cart 91030-Pt 1,500.00 Add to Cart
87 x 57 91031-Au 960.00 Add to Cart 91031-Pt 1,500.00 Add to Cart
59 x 33 91032-Au 925.00 Add to Cart 91032-Pt 1,100.00 Add to Cart
57 x 40 91033-Au 925.00 Add to Cart 91033-Pt 1,100.00 Add to Cart
arrow12Palladium (Pd) and Gold Palladium 60/40
OD x ID mm Palladium (Pd) Price   60/40 Gold Palladium Price  
117 x 89 91030-Pd 900.00 Add to Cart 91030-AP 900.00 Add to Cart
87 x 57 91031-Pd 900.00 Add to Cart 91031-AP 870.00 Add to Cart
59 x 33 91032-Pd 875.00 Add to Cart 91032-AP 750.00 Add to Cart
57 x 40 91033-Pd 875.00 Add to Cart 91033-AP 750.00 Add to Cart
arrow12Platinum / Palladium 80:20 and Silver (Ag)
OD x ID mm 80:20 Pt/Pd Price   Silver (Ag) Price  
117 x 89 91030-PP 925.00 Add to Cart 91030-Ag 600.00 Add to Cart
87 x 57 91031-PP 925.00 Add to Cart 91031-Ag 800.00 Add to Cart
59 x 33 91032-PP 900.00 Add to Cart 91032-Ag 475.00 Add to Cart
57 x 40 91033-PP 900.00 Add to Cart 91033-Ag 475.00 Add to Cart
arrow12Nickel (Ni) and Iridium (Ir)
OD x ID mm Nickel (Ni) Price   Iridium (Ir) Price  
117 x 89 91030-Ni 400.00 Add to Cart 91030-Ir 2,600.00 Add to Cart
87 x 57 91031-Ni 400.00 Add to Cart 91031-Ir 2,400.00 Add to Cart
59 x 33 91032-Ni 360.00 Add to Cart 91032-Ir 2,200.00 Add to Cart
57 x 40 91033-Ni 350.00 Add to Cart 91033-Ir 2,200.00 Add to Cart
arrow12Copper (Cu) and Chromium (Cr)
OD x ID mm Copper (Cu) Price   Chromium (Cr) Price  
117 x 89 91030-CU 320.00 Add to Cart 91030-CR POR Quote
87 x 57 91031-CU 320.00 Add to Cart 91031-CR POR Quote
59 x 33 91032-CU 280.00 Add to Cart 91032-CR POR Quote
57 x 40 91033-CU 290.00 Add to Cart 91033-CR POR Quote
arrow12Tungsten (W) and Carbon (C)
OD x ID mm Tungsten (W) Price   Carbon (C) Price  
117 x 89 91030-W 395.00 Add to Cart 91030-C POR Quote
87 x 57 91031-W 396.00 Add to Cart 91031-C POR Quote
59 x 33 91032-W 366.00 Add to Cart 91032-C POR Quote
57 x 40 91033-W 350.00 Add to Cart 91033-C POR Quote
arrow12Titanium (Ti) and Iron (Fe)
OD x ID mm Titanium (Ti) Price   Iron (Fe) Price  
117 x 89 91030-Ti 450.00 Add to Cart 91030-Fe 400.00 Add to Cart
87 x 57 91031-Ti 420.00 Add to Cart 91031-Fe 360.00 Add to Cart
59 x 33 91032-Ti 400.00 Add to Cart 91032-Fe 340.00 Add to Cart
57 x 40 91033-Ti 400.00 Add to Cart 91033-Fe 325.00 Add to Cart
arrow12Cobalt (Co) and Molybdenum (Mo)
OD x ID mm Cobalt (Co) Price   Molybdenum (Mo) Price  
117 x 89 91030-Co 640.00 Add to Cart 91030-Mo 250.00 Add to Cart
87 x 57 91031-Co 600.00 Add to Cart 91031-Mo 220.00 Add to Cart
59 x 33 91032-Co 600.00 Add to Cart 91032-Mo 210.00 Add to Cart
57 x 40 91033-Co 575.00 Add to Cart 91033-Mo 200.00 Add to Cart
arrow12Magnesium (Mg) and Tantalum (Ta)
OD x ID mm Magnesium (Mg) Price   Tantalum (Ta) Price  
117 x 89 91030-Mg POR Quote 91030-Ta 420.00 Add to Cart
87 x 57 91031-Mg POR Quote 91031-Ta 410.00 Add to Cart
59 x 33 91032-Mg POR Quote 91032-Ta 400.00 Add to Cart
57 x 40 91033-Mg POR Quote 91033-Ta 390.00 Add to Cart

Spill Control, Stabilizers, and Cleanup arrow13arrow13