Sputter Coater Targets
Sputter Coater Targets
The following targets are intended for our equipment and are stock items. All other targets are custom made and delivery is about one week.
We are able to supply targets (foil with base) for the following sputtering units: Emitech, Emscope, Bio-Rad, Polaron, Edwards, Balzers, Plasma Sciences and much more. Our targets are available in Gold, Gold/Palladium, Platnium, Chromium, and Silver and are up to 30% thicker than the original. When ordering, please state make and model of the sputtering unit to ensure proper fit.
| 91010 | Gold Target | 60mm diameter by 0.1mm thick | each | 750.00 | Add to Cart |
| 91011 | Gold/Palladium Target (60:40) | 60mm diameter by 0.1mm thick | each | 750.00 | Add to Cart |
| 91012 | Palladium Target | 60mm dia. x 0.1mm thick | each | 1,025.00 | Add to Cart |
Sputtering Targets – Sputter Coater Cathodes
EMS precious metal sputtering targets are made from high purity metals, starting 99.99% with most standard disc sizes, for use on most sputtering units from many manufacturers: Emitech, Emscope, Bio-Rad, Polaron, Edwards, Balzers, Plasma Sciences, Technics Hummers, Denton, Cressington, and much more.
Our targets come in a standard thickness of 0.1 mm (100µm). Other thickness, ranging from 0.05 to 6mm, are available upon request. Targets are avaible mounted or unmounted whichever you prefer. For mounting please always state the make and the model of the sputtering unit so we can tend to it for you. Targets in other materials such as Chromium, Iridium etc. are available upon request. We also can manufacture targets with diameters from 4 mm to 304.8 mm (12"). Call for pricing.
Ordering Information:
EMS strives to maintain accurate pricing. However, due to fluctuations in precious metal prices, pricing on products containing precious metals is not guaranteed. We will contact you if there is a discrepancy.
Gold (Au) and Platinum (Pt)
| Diameter mm | Gold (Au) | Price | Platinum (Pt) | Price | ||
| 20.0 | 91006-Au | 400.00 | Add to Cart | 91006-Pt | 595.00 | Add to Cart |
| 20.4 | 91007-Au | 400.00 | Add to Cart | 91007-Pt | 595.00 | Add to Cart |
| 32.0 | 91008-Au | 495.00 | Add to Cart | 91008-Pt | 595.00 | Add to Cart |
| 39.0 | 91009-Au | 495.00 | Add to Cart | 91009-Pt | 595.00 | Add to Cart |
| 42.0 | 91013-Au | 620.00 | Add to Cart | 91013-Pt | 800.00 | Add to Cart |
| 50.0 | 91014-Au | 650.00 | Add to Cart | 91014-Pt | 975.00 | Add to Cart |
| 50.8 | 91015-Au | 650.00 | Add to Cart | 91015-Pt | 975.00 | Add to Cart |
| 54.0 | 91016-Au | 600.00 | Add to Cart | 91016-Pt | 950.00 | Add to Cart |
| 57.0 | 91017-Au | 625.00 | Add to Cart | 91017-Pt | 950.00 | Add to Cart |
| 60.0 | 91010-Au | 700.00 | Add to Cart | 91012-Pt | 1020.00 | Add to Cart |
| 63.5 | 91018-Au | 725.00 | Add to Cart | 91018-Pt | 975.00 | Add to Cart |
| 75.0 | 91019-Au | 800.00 | Add to Cart | 91019-Pt | 1,200.00 | Add to Cart |
| 76.0 | 91020-Au | 825.00 | Add to Cart | 91020-Pt | 1,225.00 | Add to Cart |
Palladium (Pd) and Gold Palladium 60/40
| Diameter mm | Palladium (Pd) | Price | Gold Palladium 60/40 | Price | ||
| 20.0 | 91006-Pd | 500.00 | Add to Cart | 91006-AP | 325.00 | Add to Cart |
| 20.4 | 91007-Pd | 500.00 | Add to Cart | 91007-AP | 425.00 | Add to Cart |
| 32.0 | 91008-Pd | 500.00 | Add to Cart | 91008-AP | 395.00 | Add to Cart |
| 39.0 | 91009-Pd | 500.00 | Add to Cart | 91009-AP | 395.00 | Add to Cart |
| 42.0 | 91013-Pd | 525.00 | Add to Cart | 91013-AP | 695.00 | Add to Cart |
| 50.0 | 91014-Pd | 600.00 | Add to Cart | 91014-AP | 625.00 | Add to Cart |
| 50.8 | 91015-Pd | 600.00 | Add to Cart | 91015-AP | 625.00 | Add to Cart |
| 54.0 | 91016-Pd | 525.00 | Add to Cart | 91016-AP | 600.00 | Add to Cart |
| 57.0 | 91017-Pd | 500.00 | Add to Cart | 91017-AP | 600.00 | Add to Cart |
| 60.0 | 91010-Pd | 650.00 | Add to Cart | 91011-AP | 700.00 | Add to Cart |
| 63.5 | 91018-Pd | 650.00 | Add to Cart | 91018-AP | 795.00 | Add to Cart |
| 75.0 | 91019-Pd | 700.00 | Add to Cart | 91019-AP | 850.00 | Add to Cart |
| 76.0 | 91020-Pd | 650.00 | Add to Cart | 91020-AP | 750.00 | Add to Cart |
Platinum / Palladium 80:20 and Silver (Ag)
| Diameter mm | Platinum / Palladium 80:20 |
Price | Silver (Ag) | Price | ||
| 20.0 | 91006-PP | 500.00 | Add to Cart | 91006-Ag | 295.00 | Add to Cart |
| 20.4 | 91007-PP | 500.00 | Add to Cart | 91007-Ag | 400.00 | Add to Cart |
| 32.0 | 91008-PP | 500.00 | Add to Cart | 91008-Ag | 295.00 | Add to Cart |
| 39.0 | 91009-PP | 500.00 | Add to Cart | 91009-Ag | 295.00 | Add to Cart |
| 42.0 | 91013-PP | 650.00 | Add to Cart | 91013-Ag | 300.00 | Add to Cart |
| 50.0 | 91014-PP | 750.00 | Add to Cart | 91014-Ag | 300.00 | Add to Cart |
| 50.8 | 91015-PP | 750.00 | Add to Cart | 91015-Ag | 300.00 | Add to Cart |
| 54.0 | 91016-PP | 750.00 | Add to Cart | 91016-Ag | 292.00 | Add to Cart |
| 57.0 | 91017-PP | 900.00 | Add to Cart | 91017-Ag | 295.00 | Add to Cart |
| 60.0 | 91010-PP | 825.00 | Add to Cart | 91010-Ag | 325.00 | Add to Cart |
| 63.5 | 91018-PP | 825.00 | Add to Cart | 91018-Ag | 350.00 | Add to Cart |
| 75.0 | 91019-PP | 925.00 | Add to Cart | 91019-Ag | 350.00 | Add to Cart |
| 76.0 | 91020-PP | 825.00 | Add to Cart | 91020-Ag | 375.00 | Add to Cart |
Nickel (Ni) and Iridium (Ir)
| Diameter mm | Cat# | Price | Nickel (Ni) | Cat# | Price | Iridium (Ir) |
| 20.0 | 91006-Ni | 150.00 | Add to Cart | 91006-Ir | 1,040.00 | Add to Cart |
| 20.4 | 91007-Ni | 160.00 | Add to Cart | 91007-Ir | 1,075.00 | Add to Cart |
| 32.0 | 91008-Ni | 165.00 | Add to Cart | 91008-Ir | 1,500.00 | Add to Cart |
| 39.0 | 91009-Ni | 170.00 | Add to Cart | 91009-Ir | 1,800.00 | Add to Cart |
| 42.0 | 91013-Ni | 175.00 | Add to Cart | 91013-Ir | 1,900.00 | Add to Cart |
| 50.0 | 91014-Ni | 180.00 | Add to Cart | 91014-Ir | 2,100.00 | Add to Cart |
| 50.8 | 91015-Ni | 182.00 | Add to Cart | 91015-Ir | 2,400.00 | Add to Cart |
| 54.0 | 91016-Ni | 190.00 | Add to Cart | 91016-Ir | 2,200.00 | Add to Cart |
| 57.0 | 91017-Ni | 192.00 | Add to Cart | 91017-Ir | 2,300.00 | Add to Cart |
| 60.0 | 91010-Ni | 198.00 | Add to Cart | 91010-Ir | 2,800.00 | Add to Cart |
| 63.5 | 91018-Ni | 199.00 | Add to Cart | 91018-Ir | 3,000.00 | Add to Cart |
| 75.0 | 91019-Ni | 225.00 | Add to Cart | 91019-Ir | 3,300.00 | Add to Cart |
| 76.0 | 91020-Ni | 240.00 | Add to Cart | 91020-Ir | 3,500.00 | Add to Cart |
Copper (Cu) and Chromium (Cr)
| Diameter mm | Cat# | Price | Copper (Cu) | Cat# | Price | Chromium (Cr) |
| 20.0 | 91006-Cu | 110.00 | Add to Cart | 91006-Cr | POR | Quote |
| 20.4 | 91007-Cu | 110.00 | Add to Cart | 91007-Cr | POR | Quote |
| 32.0 | 91008-Cu | 140.00 | Add to Cart | 91008-Cr | POR | Quote |
| 39.0 | 91009-Cu | 160.00 | Add to Cart | 91009-Cr | POR | Quote |
| 42.0 | 91013-Cu | 165.00 | Add to Cart | 91013-Cr | POR | Quote |
| 50.0 | 91014-Cu | 168.00 | Add to Cart | 91014-Cr | POR | Quote |
| 50.8 | 91015-Cu | 170.00 | Add to Cart | 91015-Cr | POR | Quote |
| 54.0 | 91016-Cu | 184.00 | Add to Cart | 91016-Cr | POR | Quote |
| 57.0 | 91017-Cu | 192.00 | Add to Cart | 91017-Cr | 675.00 | Quote |
| 60.0 | 91010-Cu | 208.00 | Add to Cart | 91010-Cr | POR | Quote |
| 63.5 | 91018-Cu | 220.00 | Add to Cart | 91018-Cr | POR | Quote |
| 75.0 | 91019-Cu | 250.00 | Add to Cart | 91019-Cr | POR | Quote |
| 76.0 | 91020-Cu | 260.00 | Add to Cart | 91020-Cr | POR | Quote |
Tungsten (W) and Carbon (C)
| Diameter mm | Cat# | Price | Tungsten (W) | Cat# | Price | Carbon (C) |
| 20.0 | 91006-W | 90.00 | Add to Cart | 91006-C | POR | Quote |
| 20.4 | 91007-W | 92.00 | Add to Cart | 91007-C | POR | Quote |
| 32.0 | 91008-W | 104.00 | Add to Cart | 91008-C | POR | Quote |
| 39.0 | 91009-W | 110.00 | Add to Cart | 91009-C | POR | Quote |
| 42.0 | 91013-W | 130.00 | Add to Cart | 91013-C | POR | Quote |
| 50.0 | 91014-W | 160.00 | Add to Cart | 91014-C | POR | Quote |
| 50.8 | 91015-W | 165.00 | Add to Cart | 91015-C | POR | Quote |
| 54.0 | 91016-W | 172.00 | Add to Cart | 91016-C | POR | Quote |
| 57.0 | 91017-W | 180.00 | Add to Cart | 91017-C | POR | Quote |
| 60.0 | 91010-W | 188.00 | Add to Cart | 91010-C | POR | Quote |
| 63.5 | 91018-W | 206.00 | Add to Cart | 91018-C | POR | Quote |
| 75.0 | 91019-W | 240.00 | Add to Cart | 91019-C | POR | Quote |
| 76.0 | 91020-W | 250.00 | Add to Cart | 91020-C | POR | Quote |
Titanium (Ti) and Iron (Fe)
| Diameter mm | Cat# | Price | Titanium (Ti) | Cat# | Price | Iron (Fe) |
| 20.0 | 91006-Ti | 160.00 | Add to Cart | 91006-Fe | 42.00 | Add to Cart |
| 20.4 | 91007-Ti | 165.00 | Add to Cart | 91007-Fe | 50.00 | Add to Cart |
| 32.0 | 91008-Ti | 170.00 | Add to Cart | 91008-Fe | 60.00 | Add to Cart |
| 39.0 | 91009-Ti | 208.00 | Add to Cart | 91009-Fe | 66.00 | Add to Cart |
| 42.0 | 91013-Ti | 225.00 | Add to Cart | 91013-Fe | 80.00 | Add to Cart |
| 50.0 | 91014-Ti | 265.00 | Add to Cart | 91014-Fe | 110.00 | Add to Cart |
| 50.8 | 91015-Ti | 265.00 | Add to Cart | 91015-Fe | 115.00 | Add to Cart |
| 54.0 | 91016-Ti | 280.00 | Add to Cart | 91016-Fe | 170.00 | Add to Cart |
| 57.0 | 91017-Ti | 290.00 | Add to Cart | 91017-Fe | 240.00 | Add to Cart |
| 60.0 | 91010-Ti | 300.00 | Add to Cart | 91010-Fe | 250.00 | Add to Cart |
| 63.5 | 91018-Ti | 320.00 | Add to Cart | 91018-Fe | 260.00 | Add to Cart |
| 75.0 | 91019-Ti | 390.00 | Add to Cart | 91019-Fe | 290.00 | Add to Cart |
| 76.0 | 91020-Ti | 400.00 | Add to Cart | 91020-Fe | 295.00 | Add to Cart |
Cobalt (Co) and Molybdenum (Mo)
| Diameter mm | Cat# | Price | Cobalt (Co) | Cat# | Price | Molybdenum (Mo) |
| 20.0 | 91006-Co | 180.00 | Add to Cart | 91006-Mo | 85.00 | Add to Cart |
| 20.4 | 91007-Co | 190.00 | Add to Cart | 91007-Mo | 90.00 | Add to Cart |
| 32.0 | 91008-Co | 275.00 | Add to Cart | 91008-Mo | 92.00 | Add to Cart |
| 39.0 | 91009-Co | 350.00 | Add to Cart | 91009-Mo | 96.00 | Add to Cart |
| 42.0 | 91013-Co | 360.00 | Add to Cart | 91013-Mo | 100.00 | Add to Cart |
| 50.0 | 91014-Co | 380.00 | Add to Cart | 91014-Mo | 110.00 | Add to Cart |
| 50.8 | 91015-Co | 400.00 | Add to Cart | 91015-Mo | 112.00 | Add to Cart |
| 54.0 | 91016-Co | 420.00 | Add to Cart | 91016-Mo | 120.00 | Add to Cart |
| 57.0 | 91017-Co | 500.00 | Add to Cart | 91017-Mo | 125.00 | Add to Cart |
| 60.0 | 91010-Co | 550.00 | Add to Cart | 91010-Mo | 140.00 | Add to Cart |
| 63.5 | 91018-Co | 600.00 | Add to Cart | 91018-Mo | 142.00 | Add to Cart |
| 75.0 | 91019-Co | 625.00 | Add to Cart | 91019-Mo | 150.00 | Add to Cart |
| 76.0 | 91020-Co | 630.00 | Add to Cart | 91020-Mo | 160.00 | Add to Cart |
Magnesium (Mg) and Tantalum (Ta)
| Diameter mm | Cat# | Price | Magnesium (Mg) | Cat# | Price | Tantalum (Ta) |
| 20.0 | 91006-Mg | POR | Quote | 91006-Ta | 100.00 | Add to Cart |
| 20.4 | 91007-Mg | POR | Quote | 91007-Ta | 102.00 | Add to Cart |
| 32.0 | 91008-Mg | POR | Quote | 91008-Ta | 110.00 | Add to Cart |
| 39.0 | 91009-Mg | POR | Quote | 91009-Ta | 120.00 | Add to Cart |
| 42.0 | 91013-Mg | POR | Quote | 91013-Ta | 145.00 | Add to Cart |
| 50.0 | 91014-Mg | POR | Quote | 91014-Ta | 175.00 | Add to Cart |
| 50.8 | 91015-Mg | POR | Quote | 91015-Ta | 179.00 | Add to Cart |
| 54.0 | 91016-Mg | POR | Quote | 91016-Ta | 185.00 | Add to Cart |
| 57.0 | 91017-Mg | 125.00 | Add to Cart | 91017-Ta | 200.00 | Add to Cart |
| 60.0 | 91010-Mg | POR | Quote | 91010-Ta | 206.00 | Add to Cart |
| 63.5 | 91018-Mg | POR | Quote | 91018-Ta | 220.00 | Add to Cart |
| 75.0 | 91019-Mg | POR | Quote | 91019-Ta | 250.00 | Add to Cart |
| 76.0 | 91020-Mg | POR | Quote | 91020-Ta | 260.00 | Add to Cart |
Annular Targets (Outside Diameter x Inside Diameter, mm)
Gold (Au) and Platinum (Pt)
| OD x ID | Gold (Au) | Price | Platinum (Pt) | Price | ||
| 117 x 89 | 91030-Au | 2,000.00 | Add to Cart | 91030-Pt | 1,500.00 | Add to Cart |
| 87 x 57 | 91031-Au | 960.00 | Add to Cart | 91031-Pt | 1,500.00 | Add to Cart |
| 59 x 33 | 91032-Au | 925.00 | Add to Cart | 91032-Pt | 1,100.00 | Add to Cart |
| 57 x 40 | 91033-Au | 925.00 | Add to Cart | 91033-Pt | 1,100.00 | Add to Cart |
Palladium (Pd) and Gold Palladium 60/40
| OD x ID mm | Palladium (Pd) | Price | 60/40 Gold Palladium | Price | ||
| 117 x 89 | 91030-Pd | 900.00 | Add to Cart | 91030-AP | 900.00 | Add to Cart |
| 87 x 57 | 91031-Pd | 900.00 | Add to Cart | 91031-AP | 870.00 | Add to Cart |
| 59 x 33 | 91032-Pd | 875.00 | Add to Cart | 91032-AP | 750.00 | Add to Cart |
| 57 x 40 | 91033-Pd | 875.00 | Add to Cart | 91033-AP | 750.00 | Add to Cart |
Platinum / Palladium 80:20 and Silver (Ag)
| OD x ID mm | 80:20 Pt/Pd | Price | Silver (Ag) | Price | ||
| 117 x 89 | 91030-PP | 925.00 | Add to Cart | 91030-Ag | 600.00 | Add to Cart |
| 87 x 57 | 91031-PP | 925.00 | Add to Cart | 91031-Ag | 800.00 | Add to Cart |
| 59 x 33 | 91032-PP | 900.00 | Add to Cart | 91032-Ag | 475.00 | Add to Cart |
| 57 x 40 | 91033-PP | 900.00 | Add to Cart | 91033-Ag | 475.00 | Add to Cart |
Nickel (Ni) and Iridium (Ir)
| OD x ID mm | Nickel (Ni) | Price | Iridium (Ir) | Price | ||
| 117 x 89 | 91030-Ni | 400.00 | Add to Cart | 91030-Ir | 2,600.00 | Add to Cart |
| 87 x 57 | 91031-Ni | 400.00 | Add to Cart | 91031-Ir | 2,400.00 | Add to Cart |
| 59 x 33 | 91032-Ni | 360.00 | Add to Cart | 91032-Ir | 2,200.00 | Add to Cart |
| 57 x 40 | 91033-Ni | 350.00 | Add to Cart | 91033-Ir | 2,200.00 | Add to Cart |
Copper (Cu) and Chromium (Cr)
| OD x ID mm | Copper (Cu) | Price | Chromium (Cr) | Price | ||
| 117 x 89 | 91030-CU | 320.00 | Add to Cart | 91030-CR | POR | Quote |
| 87 x 57 | 91031-CU | 320.00 | Add to Cart | 91031-CR | POR | Quote |
| 59 x 33 | 91032-CU | 280.00 | Add to Cart | 91032-CR | POR | Quote |
| 57 x 40 | 91033-CU | 290.00 | Add to Cart | 91033-CR | POR | Quote |
Tungsten (W) and Carbon (C)
| OD x ID mm | Tungsten (W) | Price | Carbon (C) | Price | ||
| 117 x 89 | 91030-W | 395.00 | Add to Cart | 91030-C | POR | Quote |
| 87 x 57 | 91031-W | 396.00 | Add to Cart | 91031-C | POR | Quote |
| 59 x 33 | 91032-W | 366.00 | Add to Cart | 91032-C | POR | Quote |
| 57 x 40 | 91033-W | 350.00 | Add to Cart | 91033-C | POR | Quote |
Titanium (Ti) and Iron (Fe)
| OD x ID mm | Titanium (Ti) | Price | Iron (Fe) | Price | ||
| 117 x 89 | 91030-Ti | 450.00 | Add to Cart | 91030-Fe | 400.00 | Add to Cart |
| 87 x 57 | 91031-Ti | 420.00 | Add to Cart | 91031-Fe | 360.00 | Add to Cart |
| 59 x 33 | 91032-Ti | 400.00 | Add to Cart | 91032-Fe | 340.00 | Add to Cart |
| 57 x 40 | 91033-Ti | 400.00 | Add to Cart | 91033-Fe | 325.00 | Add to Cart |
Cobalt (Co) and Molybdenum (Mo)
| OD x ID mm | Cobalt (Co) | Price | Molybdenum (Mo) | Price | ||
| 117 x 89 | 91030-Co | 640.00 | Add to Cart | 91030-Mo | 250.00 | Add to Cart |
| 87 x 57 | 91031-Co | 600.00 | Add to Cart | 91031-Mo | 220.00 | Add to Cart |
| 59 x 33 | 91032-Co | 600.00 | Add to Cart | 91032-Mo | 210.00 | Add to Cart |
| 57 x 40 | 91033-Co | 575.00 | Add to Cart | 91033-Mo | 200.00 | Add to Cart |
Magnesium (Mg) and Tantalum (Ta)
| OD x ID mm | Magnesium (Mg) | Price | Tantalum (Ta) | Price | ||
| 117 x 89 | 91030-Mg | POR | Quote | 91030-Ta | 420.00 | Add to Cart |
| 87 x 57 | 91031-Mg | POR | Quote | 91031-Ta | 410.00 | Add to Cart |
| 59 x 33 | 91032-Mg | POR | Quote | 91032-Ta | 400.00 | Add to Cart |
| 57 x 40 | 91033-Mg | POR | Quote | 91033-Ta | 390.00 | Add to Cart |
