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| Amorphous Silicon | Porous Nanocrystalline Silicon | Silicon Dioxide | Silicon Nitride | Standard Carbon | Ultrathin Carbon | |
| Actual Thickness(nm) | 5, 9, 15 | 15 | 20 & 40 | 5, 10, 20, 50 | 20-50 | ~10 |
| Image Quality | Excellent | Good | Ok | Good | Ok | Good |
| Plasma Cleanable | Yes | Yes | Yes | Yes | No | No |
| Elemental Analysis Background | Si Only | Si Only | Si, O | Si, N | C, H | C, H |
| Thermal Stability | ~600C | >1000C | >1000C | >1000C | ~400C | ~400C |
| Chemical Stability | Avoid Strong Bases | Avoid Strong Bases | Good | Excellent | Good | Good |
| Tolerates High Beam Currents | Excellent | Excellent | Ok | Ok | Excellent | Excellent |
| Potential Contamination Source | None | None | None | None | Carbon | Carbon |
| Open Nanoscale Pores | No | Yes | No | No | No | No |
| Background | Featureless | Nanocrystalline | Featureless | Featureless | Featureless | Featureless |
Silicon Nitride TEM Window Grids, Pure Silicon TEM Window Grids, Silicon Dioxide TEM Window Grids