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arrow13Rotary-Pumped Carbon and Sputter Coating System

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arrow14EMS 150R Plus Rotary Pumped Coater

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  • Sputtering insert. Gold (Au) fitted as standard, but other metals available
  • Carbon fiber evaporation insert and automatic source shutter
  • optional glow discharge attachment (for R S and R ES versions)
  • Base plate. Standard specimen stage and optional film thickness monitor (FTM)
  • Optional flat rotation stage for 100 mm/4 wafers
  • Optional rotation stage for glass microscope slides
  • Pure silk coated 10nm Au x 18k magnification
  • Ladybird larvae hair coated 10nm Au x 2.5k magnification

The EMS 150R Plus is suitable for use with Tungsten/LaB6 SEM and Benchtop SEM.

Typical uses

Sputter coating of noble metals using the EMS 150R S Plus & EMS 150R ES Plus

Recommended for magnifications:

  • Up to x 50k using Au, Au/Pd
  • Up to x 100k using Pt (optional)

Carbon cord coating for elemental analysis using the EMS 150R S Plus & EMS 150R ES Plus.

Key Features

  • Capable of achieving vacuum of 2 x 10-3 mbar
  • New touch and swipe capacitive screen
  • USB port for upgrades and download of log files
  • Multiple-user profiles can be set up on one machine
  • New software sorts recipes per user, according to recent use
  • 16GB of memory can store more than 1000 recipes
  • New multi-color LED visual status indicator
  • Interchangeable stage options and plug-in heads

Product Description

The EMS 150R Plus is available in three configurations:

  • EMS 150R S Plus – An automatic sputter coater for non-oxidizing metals. Available sputtering targets including gold, gold/palladium and platinum.
  • EMS 150R E Plus – An automatic carbon cord coater for SEM applications such as EDS and WDS.
  • EMS 150R ES Plus – A combined system system capable of both sputtering and carbon coating. The deposition heads can be swapped in seconds.

Recommended applications for EMS 150R Plus

  • Low and medium magnifications
  • SE signal boost (1nm or less)
  • Table-top SEM coating
  • Elemental analysis
  • Copper metallization layers

These products are for Research Use Only.

Improved interface

  • Capacitive touch screen is more sensitive for ease of use
  • User interface software has been extensively revised, using a modern smartphone-style interface
  • Comprehensive context-sensitive help screen
  • USB interface allows easy software updates and backing up/copying of recipe files to USB stick
  • Process log files can be exported via USB port in .csv format for analysis in Excel or similar. Log files include date, time and process parameters.
  • 16GB of flash memory can store more than 1000 recipes
  • Dual-core ARM processor for a fast, responsive display

Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.

Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.

System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.

Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.

Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.

Automatic, controlled pulsed carbon cord evaporation

The carbon evaporation process can be terminated using the optional film thickness monitor, which incorporates a quartz crystal monitor, fitted as standard on E and ES models. This recipe ensures that carbon is evaporated in short controlled pulses, which has two effects: protecting the sample from heating and ensuring the accuracy of the film thickness monitor. Pulsing also significantly reduces the amount of debris (including large carbon fragments) associated with traditional carbon "flash" evaporation. Pulsed and ramped carbon rod recipes are supplied as standard.

Cool Magnetron Sputtering

Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for electron microscopy applications because it will heat the sample and can result in damage when the plasma interacts with the sample. The EMS 150R Plus series uses low temperature enhanced-plasma magnetrons optimized for the rotary pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.

The EMS 150R S Plus and EMS 150R ES Plus use easy-change, 57 mm diameter, disc-style targets which are designed to sputter non-oxidizing (noble) metals – ideal for W-SEM applications. The EMS 150R S Plus and EMS 150R ES Plus are fitted as standard with a gold (Au) sputter target.

Other targets options include Au/Pd, Pt/Pd, Pd, and Cu. Platinum (Pt) can also be sputtered with the optional Pt coating vacuum hose assembly.

Interchangeable Plug-in Heads

This allows the user to configure the system as a sputter coater, evaporator or glow discharge system – all in one space saving format. A carbon cord evaporation insert is available as an option. Automatic detection of the head type when changed.

Detachable chamber with built-in implosion guard

Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process.

Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples.

Tall chamber option is available for carbon evaporation to avoid sample heating, to improve uniformity for sputtering and to hold taller samples.

Multiple stage options

The EMS 150R Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage). Some examples:

  • Rotation stage (supplied as standard): 50 mm Ø can accommodate six standard stubs. Height can be pre-set.
  • Rotate-tilt stage for improved uniform coating: 50 mm Ø. Tilt and height can be pre-set.
  • Variable angle, rotary planetary stage for heavily contoured samples
  • Large flat rotation stage with offset gear box for 4"/100 mm wafers
  • Rotation stage for glass microscope slides

Other options are available on request.

Safety

The EMS 150R Plus meets key industry CE standards:

  • All electronic components are protected by covers
  • Implosion guard prevents user injury in event of chamber failure
  • Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened
  • Electrical interlocks remove power when source head cover opened
  • Overheating protection shuts down power supply

Specifications

Instrument Case 585 mm W x 470 mm D x 410 mm H
Total height with coating head open is 650 mm
Weight 28.4 kg (Packed 42 kg)
Packed dimensions 725 mm W x 660 mm D x 680 mm H
Work Chamber Borosilicate glass 150 mm ID x 127 mm H
Display 115.5 mm W x 86.4 mm H (active area), 640 RGB x 480 (display format), capacitive touch color display
User Interface Full graphical interface with touch screen buttons. Includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Sputter Target Disc-style 57 mm Ø 0.1 mm thick gold (Au) target is fitted as standard. R S and R ES versions only
Specimen Stage 50 mm Ø rotation stage with rotation speed of 8-20 rpm.
Other stages available on request.

Vacuum

Rotary pump Optional 5 m3/hr two-stage rotary pump with oil mist filter (order separately)
Vacuum measurement Pirani gauge
Ultimate vacuum 2 x 10-2 mbar
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping with dry nitrogen gas
Sputter vacuum range Between 7 x 10-3 and 1 x 10-1 mbar for gold

Processes

Sputtering Sputter current 0-80 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without breaking vacuum and with automatically built-in cooling periods).
Carbon evaporation A robust, ripple free DC power supply featuring pulse evaporation ensures reproducible carbon evaporation from cord sources. Current pulse: 1-70 A current.

Visual status indicator

A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

The indicator LED shows the following states:

  • Initialization
  • Process running
  • Idle
  • Coating in progress
  • Process completed
  • Process ended in fault condition

Audio indication also sounds on completion of the process.

Ordering Information

EMS 150R S Plus
4500 EMS 150R S Plus Fully automatic, capacitive touch-screen controlled rotary-pumped sputter coater with status LED indicator.
Including quick-release sputter insert, one 57 mm diameter x 0.1 mm gold target, and 50 mm diameter rotating specimen stage.
POR Quote
EMS 150R E Plus
4503 EMS 150R E Plus Fully automatic, capacitive touch-screen controlled rotary pumped carbon fiber evaporation coater with status LED indicator. Including quick-release carbon fiber insert for evaporation of carbon cord, carbon fiber cord, and 50 mm diameter rotating specimen stage. POR Quote
EMS 150R ES Plus
4507 EMS 150R ES Plus Fully automatic, capacitive touch-screen controlled rotary pumped sputter coater and carbon evaporator with status LED indicator.
Including quick release sputter insert, one 57 mm diameter x 0.1 mm gold target, and carbon fiber evaporation coater, including quick-release carbon fiber insert for evaporation of carbon cord*, and 50 mm diameter rotating specimen stage.
*Coating inserts are interchangeable and can be swapped in seconds. The intelligent system logic automatically recognizes which insert is in place and displays the appropriate operating settings.
POR Quote

Options and Accessories

Rotary pump requirements – order separately
91003 5m3 hr two-stage Pfeiffer Duo 6 rotary pump with oil mist filter POR Quote
Head inserts and glow discharge
4511 Additional sputter insert for quick metal change (R E and R ES only). Note: this is an entire sputtering assembly – individual noble metal targets can also be purchased POR Quote
4512 Carbon rod evaporation insert for 3.05 mm Ø rods (R E and R ES only). Includes manual rod shaper and 3.05 mm Ø carbon rod POR Quote
4513 Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (R S and R ES only). Can be retrofitted POR Quote
4514 Additional standard glass chamber assembly POR Quote
4515 Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens POR Quote
4516 Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS 150R Plus when bench depth is limited POR Quote
4517 Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This "modification" is used to measure and control the thickness of material deposited POR Quote
4518 Spare quartz crystal 95.00 Add to Cart
13530 Standard coating shield assembly POR Quote
11880 Extended height coating shield assembly POR Quote
1371 Platinum coating vacuum hose assembly POR Quote
Specimen stages
All rotating stages have variable rotation of between 8 and 20 rpm.
4519 50 mm Ø rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Has six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm POR Quote
4520 90 mm Ø rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm POR Quote
4521 Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm POR Quote
4522 Flat rotation specimen stage for 100 mm / 4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm POR Quote
23850 Tilt stage sub-assembly 4" POR Quote
msdsCarbon Supplies
4538 Carbon fiber cord – high purity – 1m POR Quote
4539 Carbon fiber cord – high purity – 5m POR Quote
4540 Carbon fiber cord – standard grade – 1m POR Quote
4541 Carbon fiber cord – standard grade – 10m POR Quote
4542 Carbon fiber cord – standard grade – 100m POR Quote
4543 Carbon rods – 3.05 mm Ø x 50 mm length (shaped) pack of 10 POR Quote
4544 Carbon rods 3.05 mm Ø x 300 mm length (unshaped) pack of 10) POR Quote
4546 Manual rod shaper for 3.05 mm Ø carbon rods POR Quote
12097 Wedge Tool POR Quote
Sputtering Targets
4523 57 mm Ø x 0.1 mm Gold POR Quote
4524 57 mm Ø x 0.2 mm Gold POR Quote
4525 57 mm Ø x 0.3 mm Gold POR Quote
4526 57 mm Ø x 0.1 mm Gold/Palladium (80/20) POR Quote
4527 57 mm Ø x 0.2 mm Gold/Palladium (80/20) POR Quote
4528 57 mm Ø x 0.3 mm Gold/Palladium (80/20) POR Quote
4529 57 mm Ø x 0.1 mm Platinum POR Quote
4530 57 mm Ø x 0.2 mm Platinum POR Quote
4531 57 mm Ø x 0.3 mm Platinum POR Quote
4532 57 mm Ø x 0.1 mm Nickel POR Quote
4533 57 mm Ø x 0.1 mm Silver POR Quote
4534 57 mm Ø x 0.1 mm Palladium POR Quote
4535 57 mm Ø x 0.1 mm Copper POR Quote
4536 57 mm Ø x 0.1 mm Platinum/Palladium (80/20) POR Quote
4537 57 mm Ø x 0.3 mm Platinum/Palladium (80/20) POR Quote
Spare kits
4547 Two-year spares kit for EMS 150R S Plus
Includes: 57 mm Ø x 0.1 mm gold target, standard glass chamber assembly quartz crystals, O-rings
POR Quote
4548 Two-year spares kit for EMS 150R E Plus
Includes: carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs
POR Quote
4549 Two-year spares kit for EMS 150R ES Plus
Includes: 57 mm Ø x 0.1 mm gold target, carbon fiber / cord, standard glass chamber assembly, quartz crystals, O-rings, springs
POR Quote

Technical Data sheet

SEM/TEM Carbon Coaters Techniques and Applications
Sputter Coater Principles
Silver as a Removable Coating for Scanning Electron Microscopy

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