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arrow13Ultra-Fine Coater

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arrow14EMS 150V Plus Automatic Coater




  • Single electrospinning fiber tear coated with 1nm Au x 90k magnification
  • Algae spore trapped in spider silk coated with 5nm Au x 11k magnification
  • Microsporangium, spore size 150nm, coated with 3nm of Au x 70k magnification
  • Microscope slide stage
  • Rotation stage
  • Wafer stage
  • Rotacota planetary stage
  • 10µm Magnification
  • 5µm Magnification

The EMS 150V Plus is optimized for high-vacuum applications, with an ultimate vacuum of 1 x 10-6 mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidizing metals with ultra-fine grain sizes, which are suitable for high resolution imaging. The lower background pressure removes oxygen nitrogen and water vapour from the chamber, avoiding chemical reactions during the sputter process, which could otherwise lead to impurities or defects in the coatings. Similarly, lower scattering allows for high purity, amorphous carbon films of high density.

The EMS 150V Plus offers all the benefits of the EMS 150T Plus, but with a finer grain size and thinner coating, for ultra-high-resolution applications (above x 200,000 magnification).

Recommended applications for EMS 150V Plus

  • Ultra-high-resolution magnification SEM
  • Carbon coating of TEM grids
  • Protective platinum layers for FIB
  • R&D of corrosion-, friction-, and wear-protective layers
  • Protective layers on medical devices
  • BSE imaging
  • EDX, WDS, EBSD analysis
  • Carbon coating of replicas
  • Nano-technology e.g. Zeolites, polymer nanobrushes

These products are for Research Use Only.

Key Features

  • Ultimate vacuum of 1 x 10-6 mbar
  • New multi-color LED visual status indicator
  • 16 Gb of flash memory can store more than 1000 recipes
  • New software sorts recipes per user according to recent use
  • Multiple-user profiles can be set up on one machine
  • New touch and swipe capacitive screen

Product Description

The EMS 150V Plus is available in three configurations:

  • EMS 150V S Plus – An automatic sputter coater for oxidizing metals with ultra-fine grain size. Available sputtering targets include chromium, iridium and all noble metals.
  • EMS 150V E Plus – An automatic carbon coater (rod/cord) for TEM applications. For carbon coating TEM grids.
  • EMS 150V ES Plus – A combined system capable of both sputtering and carbon coating. The deposition head inserts can be swapped in seconds. Metal evaporation/aperture cleaning option available.

Recommended applications for EMS 150V Plus

  • High-resolution magnification SEM
  • Protective platinum layers for FIB
  • R&D of corrosion-, friction-, and wear-protective layers
  • Protective layers on medical devices
  • BSE imaging
  • EDX, WDS, EBSD analysis
  • Carbon coating of replicas

These products are for Research Use Only.

Improved interface

  • Capacitive touch screen is more sensitive for ease of use
  • User interface software has been extensively revised, using a modern smartphone-style interface
  • Comprehensive context-sensitive help screen
  • USB interface allows easy software updates and backing up/copying of recipe files to USB stick
  • Process log files can be exported via USB port in .csv format for analysis in Excel or similar. Log files include date, time and process parameters.
  • 16GB of flash memory can store more than 1000 recipes
  • Dual-core ARM processor for a fast, responsive display

Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.

Intelligent system logic automatically detects which insert is in place and displays the appropriate operating settings and controls for that process.

System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.

Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.

Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.

Controlled ramped carbon rod evaporation

Careful evaporation allows precise control of carbon thickness (with or without the optional film thickness monitor). The quality of the resulting carbon films is also enhanced by the eradication of "sparking" that is a common feature of less advanced coaters.

For reproducible high-quality carbon films, we would recommend the use of shaped carbon rods. Rods are higher purity, less susceptible to debris and easier to control. Pulsed and ramped carbon rod recipes are supplied as standard.

Cool Magnetron Sputtering

Sputter coating is a technique widely used in various applications. It is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for electron microscopy applications because it will heat the sample and can result in damage when the plasma interacts with the sample. The EMS 150V Plus series uses low temperature enhanced-plasma magnetrons optimized for the rotary pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.

The EMS 150V S Plus and EMS 150V ES Plus use easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidizing and noble metals. The EMS 150V S Plus and EMS 150V ES Plus are fitted as standard with a chromium (Cr) sputter target. Other targets options include Au, Au/Pd, Pt/Pd, Pd, Pt, Cu, Ir, W, ITO and Al. Others are available on request.

Pulsed cleaning for Aluminum sputtering

Aluminum (Al) rapidly forms an oxide layer which can be difficult to remove, but the EMS 150V ES Plus & EMS 150V S Plus have special recipes for Al that reduce the oxide removal time and prevent excessive pre-sputtering of the target.

Interchangeable plug-in heads

This allows the user to configure the system as a sputter coater, evaporator or glow discharge system – all in one space saving format. A carbon cord evaporation insert is available as an option. Automatic detection of the head type when changed.

Detachable chamber with built-in implosion guard

Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples. Tall chamber option is available for carbon evaporation to avoid sample heating, improved uniformity for sputtering and to hold taller samples.

Multiple stage options

The EMS 150V Plus has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage).

Some examples:

  • Rotation stage (supplied as standard): 50 mm Ø can accommodate six standard stubs. Height can be pre-set.
  • Rotate-tilt stage for improved uniform coating: 50 mm Ø. Tilt and height can be pre-set.
  • Variable angle, rotary planetary stage for heavily contoured samples.
  • Large flat rotation stage with offset gear box for 4"/100 mm wafers.
  • Rotation stage for glass microscope slides.

Other options are available on request.

Safety

The EMS 150V Plus meets key industry CE standards

  • All electronic components are protected by covers
  • Implosion guard prevents user injury in event of chamber failure
  • Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened
  • Electrical interlocks remove power when source head cover opened
  • Overheating protection shuts down power supply

Specifications

Instrument Case 585 mm W x 470 mm D x 410 mm H
Total height with coating head open is 650 mm
Weight 33.4 kg (Packed 42 kg)
Packed dimensions 725 mm W x 660 mm D x 680 mm H
Work Chamber Borosilicate glass 150 mm ID x 133 mm H
Display 115.5 mm W x 86.4 mm H (active area), 640 RGB x 480 (display format), capacitive touch color display
User Interface Full graphical interface with touch screen buttons. Includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.
Sputter Target Disc-style 57 mm Ø 0.3 mm thick chromium (Cr) target is fitted as standard. V S and V ES versions only
Specimen Stage 50 mm Ø rotation stage with rotation speed of 8-20 rpm.
Other stages available on request.

Vacuum

Rotary pump 5m3/hr two-stage rotary pump with oil mist filter. Hydraulically-formed bellows stainless-steel backing line.
Turbo pump Internally mounted 70 L/s air-cooled
Vacuum measurement Wide range guage
Ultimate Vacuum 1 x 10-6 mbar
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas.
Pump Down Time 5 x 10-6 mbar in 30 mins
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas.
Sputter vacuum range Between 5 x 10-3 and 1 x 10-1 mbar for gold targets

Processes

Sputtering Sputter current 0-150 mA to a predetermined thickness (with optional FTM) or by the built-in timer. The maximum sputtering time is 60 minutes (without breaking vacuum and with automatically built-in cooling periods)
Evaporation Carbon evaporation using rods/cord. Thermal evaporation of metals from filaments or boats. For cleaning TEM apertures, a standard molybdenum boat (supplied) can be fitted.

Visual status indicator

A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

The indicator LED shows the following states:

  • Initialization
  • Process running
  • Idle
  • Coating in progress
  • Process completed
  • Process ended in fault condition

Audio indication also sounds on completion of the process.

Ordering Information

EMS 150V S Plus
5700 EMS 150V S Plus Sputter Coater optimized for high-vacuum applications. High resolution turbomolecular pumped capacitive touch-screen controled sputter coater with status LED indicator, including quick release sputter insert and one 57 mm diameter x 0.3 mm chromium target. A rotating specimen stage, 50 mm diameter, supplied as standard. POR Quote
EMS 150V E Plus
5710 EMS 150V E Plus Carbon Evaporator optimized for high-vacuum applications. Turbomolecular pumped capacitive touch-screen controled carborn evaporator with status LED indicator suitable for TEM and SEM applications. Fitted with a carbon rod evaporation head for 3.05 mm diameter carbon rods. Supplied with carbon rods (C5422 3.05 mm x 300 mm) and a carbon rod shaper (manual operation). A rotating specimen stage, 50 mm diameter, supplied as standard. POR Quote
EMS 150V ES Plus
5720 EMS 150V ES Plus Combined Sputtering and Carbon Coating System optimized for high-vacuum applications. The deposition heads can be swapped in seconds and the intelligent system logic automatically recognizes which head is in place and displays the appropriate operating settings. Consists of high resolution turbomolecular pumped capacitive touch-screen controled sputter coater and carborn evaporator with status LED indicator, including quick release sputter insert and one 57 mm diameter x 0.3 mm chromium target, and high vacuum carbon rod evaporation coater, including quick-release carbon rod insert for 3.05 mm diameter carbon rods. Coating inserts are interchangeable. A rotating specimen stage, 50 mm diameter, supplied as standard. POR Quote

Rotary pump requirements (needs to be ordered separately)

91003 Edwards RV3 50L/s two-stage rotary pump, with vacuum hose, coupling kit and oil mist filter 2,429.00 Add to Cart
6550-A Diaphragm pump. A "dry" alternative to the standard 91003 oil-based rotary pump complete with vacuum hose, coupling kit and oil mist filter POR Quote

Options and Accessories

Including details of coating head inserts and specimen stages that are fitted as standard.

Coating head options

A range of interchangeable, plug-in style coating head inserts are available:

3200 Sputtering head insert suitable for oxidizing and non-oxidizing metals. Supplied with a 54 mm x 0.3 mm thick chromium (Cr) target as standard. For additional targets see Sputtering Targets section POR Quote
3210 Additional sputter insert for quick metal change (V E and V ES versions only). Note: this is an entire sputtering assembly. POR Quote
3230 Carbon rod evaporation head insert (for 3.05 mm Ø rods) POR Quote
3240 Carbon rod evaporation head insert (for 6.15 mm Ø rods). Note that EMS recommends 3.05 mm Ø rods as they offer greater process control and are more economical (less wastage). POR Quote
3250 Carbon fiber evaporation head insert POR Quote
3260 Metal evaporation and aperture cleaning head insert, including the ability to evaporate upwards or downwards (V E and V ES versions only). Supplied with a pack of ten tungsten filaments and a molybdenum boat. POR Quote
3270 Extended height vacuum chamber (214 mm high – the standard chamber is 127 mm high). For increased source to sample distance and for coating large specimens POR Quote
3280 Rotating vacuum spigot allows more convenient connection of the vacuum hose to the rear of the EMS 150V Pluswhen bench depth is limited POR Quote
3290 Film thickness monitor (FTM) attachment. Consists of a built in chamber mounted quartz crystal oscillator (includes crystal). As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited POR Quote
3300 Spare quartz crystal for FTM. 95.00 Add to cart
13530 Standard coating shield assembly POR Quote
27691 Extended glass cylinder assembly, 220 mm H POR Quote
11880 Extended height coating shield assembly POR Quote
4513 Glow discharge insert to modify surface properties (e.g. hydrophobic to hydrophilic conversion) or to clean surface residues (VS and V ES only). Can be retrofitted POR Quote
Specimen stages

The EMS 150V Plushas specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except rotary planetary stage):

3330 Rotation stage, 50 mm Ø (supplied as standard). This stage only rotates – no tilt or height adjustment POR Quote
3340 Rotate-tilt specimen stage with adjustable tilt (up to 90 degrees) and height (37 mm-60 mm). Tilt angle can be preset. 50 mm Ø specimen platform with six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm POR Quote
3350 Variable angle "Rotacota" rotary planetary stage with 50 mm Ø specimen platform. Has six stub positions for 15 mm or 6.5 mm or ⅛" pin stubs. Stage rotation speed variable between 8 and 20rpm POR Quote
3360 Flat rotation specimen stage for 100 mm / 4" wafers, includes gearbox for increased coverage. Stage rotation speed variable between 8 and 20rpm POR Quote
3370 Rotating specimen stage for glass microscope slides (up to two x 75 mm x 25 mm slides). Stage rotation speed variable between 8 and 20rpm. Includes gear box to allow optional FTM to be used POR Quote
23850 Tilt stage sub-assembly 4" POR Quote
Evaporation Supplies
73830-SP Tungsten wire baskets – pack of 10 POR Quote
73810-SP Molybdenum boats – pack of 10 POR Quote
Sputtering Targets

The EMS 150V S Plus and EMS 150V ES Plus are fitted as standard with a 0.3 mm thick chromium (Cr) sputter target. Other optional targets:

3410 57 mm Ø x 0.1 mm Gold POR Quote
3410-2 57 mm Ø x 0.2 mm Gold POR Quote
3411 57 mm Ø x 0.1 mm Gold/Palladium (80/20) POR Quote
3411-2 57 mm Ø x 0.2 mm Gold/Palladium (80/20) POR Quote
3412 57 mm Ø x 0.1 mm Platinum POR Quote
3412-2 57 mm Ø x 0.2 mm Platinum POR Quote
3413 57 mm Ø x 0.1 mm Nickel POR Quote
3414 57 mm Ø x 0.1 mm Silver POR Quote
3415 57 mm Ø x 0.1 mm Palladium POR Quote
3416 57 mm Ø x 0.1 mm Copper POR Quote
3417 57 mm Ø x 0.3 mm Chromium POR Quote
3418 57 mm Ø x 0.5 mm Tungsten POR Quote
3419 57 mm Ø x 1.5 mm Chromium POR Quote
3420 57 mm Ø x 0.2 mm Tungsten POR Quote
3421 54 mm Ø x 1.5 mm Carbon POR Quote
3422 57 mm Ø x 0.1 mm Aluminum POR Quote
3423 57 mm Ø x 0.1 mm Platinum/Palladium (80/20) POR Quote
3424 57 mm Ø x 1.5 mm Titanium POR Quote
3425 57 mm Ø x 0.3 mm Platinum/Palladium (80/20) POR Quote
3426 57 mm Ø x 0.3 mm Gold POR Quote
3427 57 mm Ø x 0.3 mm Gold/Palladium (80/20) POR Quote
3428 57 mm Ø x 0.3 mm Platinum POR Quote
3429 57 mm Ø x 0.5 mm Titanium POR Quote
3430 57 mm Ø x 0.1 mm Iron POR Quote
3431 57 mm Ø x 0.3 mm Iridium POR Quote
3432 57 mm Ø x 0.1 mm Cobalt POR Quote
3433 57 mm Ø x 0.1 mm Tin POR Quote
3434 57 mm Ø x 0.1 mm Molybdenum POR Quote
3435 57 mm Ø x 0.3 mm Magnesium POR Quote
3436 57 mm Ø x 0.1 mm Tantalum POR Quote
3437 57 mm Ø x 3 mm Indium Tin Oxide (90/10) POR Quote
msdsCarbon supplies
3500 Carbon rods – 6.15 mm Ø x 100 mm length (unshaped) pack of 10 POR Quote
3510 Carbon rods – 6.15 mm Ø x 50 mm length (shaped) pack of 10 POR Quote
3520 Carbon rods – 3.05 mm Ø x 50 mm length (shaped) pack of 10 POR Quote
3525  Carbon rods – 3.05 mm Ø x 100 mm length (unshaped) pack of 10 POR Quote
3530 Carbon rods 3.05 mm Ø x 300 mm length (unshaped) pack of 10 POR Quote
3540 Carbon fiber cord – high purity – 1m POR Quote
3550 Carbon fiber cord – high purity – 5m POR Quote
3560 Carbon fiber cord – standard grade – 1m POR Quote
3570 Carbon fiber cord – standard grade – 10m POR Quote
3580 Carbon fiber cord – standard grade – 100m POR Quote
3590 Manual rod shaper for 6.15 mm Ø carbon rods POR Quote
3595 Manual rod shaper for 3.05 mm Ø carbon rods POR Quote
12097 Wedge Tool POR Quote
Other consumables and spare kits
3600 Metal evaporation basket – pack of 10 (for use with metal evaporation head) POR Quote
07803 Basic Oil Mist Filter (spare) POR Quote
13233 Rotary Pump Oil (spare), 1L POR Quote
13235 Rotary Pump Oil (spare), 5L POR Quote
27508 O-ring (each) 2 required per coater POR Quote
27607 Non-seal L Gasket POR Quote
6413 Additional Standard Glass Cylinder Assembly POR Quote
3610 Two-year spares kit for EMS 150V S Plus
Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, quartz crystals, O-rings
POR Quote
3620 Two-year spares kit for EMS 150V E Plus
Includes: chromium (Cr) target, glass cylinder,carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings
POR Quote
3630 Two-year spares kit for EMS 150V ES Plus
Includes: chromium (Cr) target, glass cylinder, carbon fiber cord, carbon fiber – fine, carbon rods 3.05 mm, quartz crystals, O-rings
POR Quote

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