Innovative and versatile Sputter Coater and Carbon Evaporator for SEM ApplicationsQuick Overview
The EMS150R is a compact rotary pumped coating system ideally suited for SEM and other coating applications. The EMS150R is available in three formats:
EMS150R S – a compact rotary pumped sputter coater, suitable for non-oxidising metals, such as gold (Au) and platinum (Pt)
EMS150R E – a compact rotary pumped carbon fiber coater suitable for SEM applications
EMS150R ES – a compact rotary pumped combined sputter coater and carbon evaporator
Key Features
- Metal sputtering or carbon evaporation - or both – in one space saving design
- Rotary pumped sputter coating – allows sputtering of a wide range of non-oxidising (noble) metals, such as gold (Au), platinum (Pt), silver (Ag) and palladium (Pd)
- Carbon fiber coating – ideal for SEM carbon coating applications (eg EDS and WDS)
- Advanced design carbon evaporation gun – simple operation, reproducible results
- Glow discharge option – for modification of sample surface properties (eg hydrophobic
to hydrophilic conversion) or for cleaning / removal of contaminating surface residues
- Control of evaporation current profile – ensures consistently reproducible carbon films
- Repeatable thickness control using the film thickness monitor option
- Fully automatic touch screen control – rapid data input, simple operation
- Multiple, customer defined coating protocols can be stored – ideal for multi-user labs
- Automatic vacuum control, which can be pre-programmed to suit the process and material – no needle valve to adjust
- “Intelligent” recognition system – automatically detects the type of coating insert fitted
- Easy-to-change, drop-in style specimen stages (rotation stage as standard)
- Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
- Ergonomic one piece moulded case – easy maintenance and service access
- Ethernet with local FTP server connection – simple programmer updates
Please visit www.emsdiasum.com/microscopy for complete details.
The EMS 150R ES is a combined sputter coater and carbon evaporator.