Calibration for SEM

Magnification Reference Standards - SPM, AFM, SEM Calibration Standards

EMS offers a series of calibration standards with one and two dimension calibrated patterns. The standards come in two grid spacings – 300 nanometers and 700 nanometers. These standards
are created utilizing holographic interference of a particular laser frequency. They are typically accurate to <1% across the entire surface of the standard.

White area material: Tungsten.
Black area material: Tungsten, or other metal.

Materials: The calibration specimen consists of a silicon chip with a thin (100 nm) polymer layer containing the pattern and a thin tungsten film over-coating the entire surface. The tungsten film varies from 20 nm to 60 nm in thickness, depending on the particular model. This structure has been proven under a wide variety of beam conditions, from 30kV to sub 12 kV.

Dimensions: 300 nm or 700 nm nominal (exact dimension will be provided with sample). Measurements are made from leading edge to leading edge, etc. Width of individual bars and spaces is not calibrated.

Background

EMS MXS "CE" and "BE" series SEM magnification reference gratings and grids set new standards for sub-micron accuracy and ease-of-use. Designed to meet the requirements for a reasonable cost, accurate sub-micron reference standard, "CE" Series Reference Standards can be tailored to meet a variety of needs.

  • They are ideal for student practice and instruction, testing new ideas or applications, or other uses where you need a good quality standard but do not want to put an expensive sample at risk.
  • Exceptional accuracy, repeatability, and uniformity are assured since each individual standard is an original or master produced directly from a holographic interference pattern.

These reference standards are remarkably durable under typical operating conditions. The surface contamination behavior is also very good. There are no better sub-micron reference standard available in this price range.

One test site indicated that on a scale of 1 to 5 with respect to ease of use, contrast/brightness, durability, and accuracy, "CE" series reference standards earn a 4.7 out of 5 average in comparison to other available standards. Comments from various other test sites included "very good contrast/brightness levels at all voltages used," "easy to use," and "could become my secondary standard of choice."

Application

EMS's MXS "CE" series reference standards provide a calibrated dimension of either 300 nm or 700 nm nominal length. ("BE" series available only 300 nm)

  • The larger dimension provides accurate, multiple period measurement from about 5000x to over 45,000x while
  • the smaller dimension is useful from about 10,000x to over 100,000x.

Throughout this magnification range, these standards provide excellent image contrast, an enormous useful calibration area, and a 3-sigma accuracy of at worst 3%, with typical values around 1%.

Sort by
Product Name Ordering Info

Low Magnification Finder Grid Substrate

Low Magnification Finder Grid Substrate, used with SEM, FIB, XPS/ESCA, Auger, and LM. Made from Ultra-flat silicon, P Boron doped with a die size of 4 mm x 4 mm, calibration area of 3 mm x 3 mm and resistivity of 5-10 ohm/cm.
Cat # Description Pack Price Quote Quantity
Cat #: 80104-01 Description: Low Magnification Finder Grid Substrate Pack: Each Price: $24.00 Add to Quote:

1 µm Pitch Silicon Calibration Specimen

1 µm Pitch Silicon Calibration Specimen, usedwith SEM, FIB, Sims, Auger, and LM. Made from Ultra-flat silicon, P Boron doped with a die size of 4 mm x 4 mm, calibration area of 3 mm x 3 mm and resistivity of 5-10 ohm/cm
Cat # Description Pack Price Quote Quantity
Cat #: 79505-11 Description: 1 μm Specimen, Traceable, Unmounted Pack: Each Price: $110.00 Add to Quote:
Cat #: 79505-11-A Description: 1 μm Specimen, Traceable, A Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-B Description: 1 μm Specimen, Traceable, B Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-C Description: 1 μm Specimen, Traceable, C Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-D Description: 1 μm Specimen, Traceable, D Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-E Description: 1 μm Specimen, Traceable, E Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-F Description: 1 μm Specimen, Traceable, F Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-G Description: 1 μm Specimen, Traceable, G Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-H Description: 1 μm Specimen, Traceable, H Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-J Description: 1 μm Specimen, Traceable, J Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-K Description: 1 μm Specimen, Traceable, K Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-L Description: 1 μm Specimen, Traceable, L Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-M Description: 1 μm Specimen, Traceable, M Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-N Description: 1 μm Specimen, Traceable, N Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-P Description: 1 μm Specimen, Traceable, P Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-11-Q Description: 1 μm Specimen, Traceable, Q Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-12 Description: 1 μm Specimen, Certified, Unmounted Pack: Each Price: $759.00 Add to Quote:
Cat #: 79505-12-A Description: 1 μm Specimen, Certified, A Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-B Description: 1 μm Specimen, Certified, B Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-C Description: 1 μm Specimen, Certified, C Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-D Description: 1 μm Specimen, Certified, D Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-E Description: 1 μm Specimen, Certified, E Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-F Description: 1 μm Specimen, Certified, F Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-G Description: 1 μm Specimen, Certified, G Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-H Description: 1 μm Specimen, Certified, H Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-J Description: 1 μm Specimen, Certified, J Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-K Description: 1 μm Specimen, Certified, K Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-L Description: 1 μm Specimen, Certified, L Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-M Description: 1 μm Specimen, Certified, M Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-N Description: 1 μm Specimen, Certified, N Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-P Description: 1 μm Specimen, Certified, P Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-12-Q Description: 1 μm Specimen, Certified, Q Mount Pack: Each Price: $798.00 Add to Quote:

10 µm Pitch Silicon Calibration Specimen

10 µm Pitch Silicon Calibration Specimen, used with SEM, FIB, Sims, Auger, and LM. Made from Ultra-flat silicon, P Boron doped with a die size of 4 mm x 4 mm, calibration area of 3 mm x 3 mm and resistivity of 5-10 ohm/cm.
Cat # Description Pack Price Quote Quantity
Cat #: 79505-21 Description: 10 µm Specimen, Traceable, Unmounted Pack: Each Price: $110.00 Add to Quote:
Cat #: 79505-21-A Description: 10 µm Specimen, Traceable, A Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-B Description: 10 µm Specimen, Traceable, B Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-C Description: 10 µm Specimen, Traceable, C Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-D Description: 10 µm Specimen, Traceable, D Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-E Description: 10 µm Specimen, Traceable, E Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-F Description: 10 µm Specimen, Traceable, F Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-G Description: 10 µm Specimen, Traceable, G Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-H Description: 10 µm Specimen, Traceable, H Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-J Description: 10 µm Specimen, Traceable, J Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-K Description: 10 µm Specimen, Traceable, K Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-L Description: 10 µm Specimen, Traceable, L Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-M Description: 10 µm Specimen, Traceable, M Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-N Description: 10 µm Specimen, Traceable, N Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-P Description: 10 µm Specimen, Traceable, P Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-Q Description: 10 µm Specimen, Traceable, Q Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-22 Description: 10 µm Specimen, Certified, Unmounted Pack: Each Price: $759.00 Add to Quote:
Cat #: 79505-22-A Description: 10 µm Specimen, Certified, A Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-B Description: 10 µm Specimen, Certified, B Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-C Description: 10 µm Specimen, Certified, C Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-D Description: 10 µm Specimen, Certified, D Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-E Description: 10 µm Specimen, Certified, E Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-F Description: 10 µm Specimen, Certified, F Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-G Description: 10 µm Specimen, Certified, G Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-H Description: 10 µm Specimen, Certified, H Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-J Description: 10 µm Specimen, Certified, J Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-K Description: 10 µm Specimen, Certified, K Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-L Description: 10 µm Specimen, Certified, L Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-M Description: 10 µm Specimen, Certified, M Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-N Description: 10 µm Specimen, Certified, N Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-P Description: 10 µm Specimen, Certified, P Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-Q Description: 10 µm Specimen, Certified, Q Mount Pack: Each Price: $798.00 Add to Quote:

Critical Dimension Magnification Standard, X-Axis

Economical Standard, X Axis features calibration with a wide range of measurements without stage rotation.
Cat # Description Pack Price Quote Quantity
Cat #: 79505-01 Description: X-Axis Standard, Traceable, Unmounted, 2mm-100nm Pack: Each Price: $495.00 Add to Quote:
Cat #: 79505-01-A Description: X-Axis Mag Standard, Traceable, A Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-B Description: X-Axis Mag Standard, Traceable, B Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-C Description: X-Axis Mag Standard, Traceable, C Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-D Description: X-Axis Mag Standard, Traceable, D Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-E Description: X-Axis Mag Standard, Traceable, E Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-F Description: X-Axis Mag Standard, Traceable, F Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-G Description: X-Axis Mag Standard, Traceable, G Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-H Description: X-Axis Mag Standard, Traceable, H Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-J Description: X-Axis Mag Standard, Traceable, J Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-K Description: X-Axis Mag Standard, Traceable, K Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-L Description: X-Axis Mag Standard, Traceable, L Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-M Description: X-Axis Mag Standard, Traceable, M Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-N Description: X-Axis Mag Standard, Traceable, N Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-P Description: X-Axis Mag Standard, Traceable, P Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-01-Q Description: X-Axis Mag Standard, Traceable, Q Mount, 2mm-100nm Pack: Each Price: $297.00 Add to Quote:
Cat #: 79505-02 Description: X-Axis Standard, Certfied, Unmounted, 2mm-100nm Pack: Each Price: $1,111.00 Add to Quote:
Cat #: 79505-02-A Description: X-Axis Mag Standard, Certified, A Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-B Description: X-Axis Mag Standard, Certified, B Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-C Description: X-Axis Mag Standard, Certified, C Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-D Description: X-Axis Mag Standard, Certified, D Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-E Description: X-Axis Mag Standard, Certified, E Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-F Description: X-Axis Mag Standard, Certified, F Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-G Description: X-Axis Mag Standard, Certified, G Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-H Description: X-Axis Mag Standard, Certified, H Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-J Description: X-Axis Mag Standard, Certified, J Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-K Description: X-Axis Mag Standard, Certified, K Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-L Description: X-Axis Mag Standard, Certified, L Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-M Description: X-Axis Mag Standard, Certified, M Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-N Description: X-Axis Mag Standard, Certified, N Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-P Description: X-Axis Mag Standard, Certified, P Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-02-Q Description: X-Axis Mag Standard, Certified, Q Mount, 2mm-100nm Pack: Each Price: $1,128.00 Add to Quote:
Cat #: 79505-03 Description: X-Axis Mag Standard, Traceable, Unmounted, 2mm-1μm Pack: Each Price: $88.00 Add to Quote:
Cat #: 79505-03-A Description: X-Axis Mag. Standard, Traceable, A Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-B Description: X-Axis Mag. Standard, Traceable, B Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-C Description: X-Axis Mag. Standard, Traceable, C Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-D Description: X-Axis Mag. Standard, Traceable, D Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-E Description: X-Axis Mag. Standard, Traceable, E Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-F Description: X-Axis Mag. Standard, Traceable, F Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-G Description: X-Axis Mag. Standard, Traceable, G Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-H Description: X-Axis Mag. Standard, Traceable, H Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-J Description: X-Axis Mag. Standard, Traceable, J Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-K Description: X-Axis Mag. Standard, Traceable, K Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-L Description: X-Axis Mag. Standard, Traceable, L Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-M Description: X-Axis Mag. Standard, Traceable, M Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-N Description: X-Axis Mag. Standard, Traceable, N Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-P Description: X-Axis Mag. Standard, Traceable, P Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-03-Q Description: X-Axis Mag. Standard, Traceable, Q Mount, 2mm-1μm Pack: Each Price: $116.00 Add to Quote:
Cat #: 79505-04 Description: X-Axis Mag Standard, Certified, Unmounted, 2mm-1μm Pack: Each Price: $215.00 Add to Quote:
Cat #: 79505-04-A Description: X-Axis Mag. Standard, Certified, A Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-B Description: X-Axis Mag. Standard, Certified, B Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-C Description: X-Axis Mag. Standard, Certified, C Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-D Description: X-Axis Mag. Standard, Certified, D Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-E Description: X-Axis Mag. Standard, Certified, E Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-F Description: X-Axis Mag. Standard, Certified, F Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-G Description: X-Axis Mag. Standard, Certified, G Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-H Description: X-Axis Mag. Standard, Certified, H Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-J Description: X-Axis Mag. Standard, Certified, J Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-K Description: X-Axis Mag. Standard, Certified, K Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-L Description: X-Axis Mag. Standard, Certified, L Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-M Description: X-Axis Mag. Standard, Certified, M Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-N Description: X-Axis Mag. Standard, Certified, N Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-P Description: X-Axis Mag. Standard, Certified, P Mount,, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:
Cat #: 79505-04-Q Description: X-Axis Mag. Standard, Certified, Q Mount, 2mm-1μm Pack: Each Price: $248.00 Add to Quote:

Critical Dimension Magnification Standard, X- and Y-Axis

Standard, X and Y-Axis features calibration with a wide range of measurements without stage rotation.
Cat # Description Pack Price Quote Quantity
Cat #: 79505-05 Description: X&Y Axis Standard, Traceable, Unmounted, 2mm-100nm Pack: Each Price: $737.00 Add to Quote:
Cat #: 79505-05-A Description: X&Y Axis Standard, Traceable, A Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-B Description: X&Y Axis Standard, Traceable, B Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-C Description: X&Y Axis Standard, Traceable, C Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-D Description: X&Y Axis Standard, Traceable, D Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-E Description: X&Y Axis Standard, Traceable, E Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-F Description: X&Y Axis Standard, Traceable, F Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-G Description: X&Y Axis Standard, Traceable, G Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-H Description: X&Y Axis Standard, Traceable, H Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-J Description: X&Y Axis Standard, Traceable, J Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-K Description: X&Y Axis Standard, Traceable, K Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-L Description: X&Y Axis Standard, Traceable, L Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-M Description: X&Y Axis Standard, Traceable, M Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-N Description: X&Y Axis Standard, Traceable, N Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-P Description: X&Y Axis Standard, Traceable, P Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-05-Q Description: X&Y Axis Standard, Traceable, Q Mount, 2mm-100nm Pack: Each Price: $770.00 Add to Quote:
Cat #: 79505-06 Description: X&Y Axis Standard, Certified, Unmounted, 2mm-100nm Pack: Each Price: $1,760.00 Add to Quote:
Cat #: 79505-06-A Description: X&Y Axis Standard, Certified, A Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-B Description: X&Y Axis Standard, Certified, B Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-C Description: X&Y Axis Standard, Certified, C Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-D Description: X&Y Axis Standard, Certified, D Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-E Description: X&Y Axis Standard, Certified, E Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-F Description: X&Y Axis Standard, Certified, F Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-G Description: X&Y Axis Standard, Certified, G Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-H Description: X&Y Axis Standard, Certified, H Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-J Description: X&Y Axis Standard, Certified, J Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-K Description: X&Y Axis Standard, Certified, K Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-L Description: X&Y Axis Standard, Certified, L Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-M Description: X&Y Axis Standard, Certified, M Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-N Description: X&Y Axis Standard, Certified, N Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-P Description: X&Y Axis Standard, Certified, P Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-06-Q Description: X&Y Axis Standard, Certified, Q Mount, 2mm-100nm Pack: Each Price: $1,870.00 Add to Quote:
Cat #: 79505-07 Description: X&Y Axis Standard, Traceable, Unmounted, 2mm-1μm Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-07-A Description: X&Y Axis Standard, Traceable, A Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-B Description: X&Y Axis Standard, Traceable, B Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-C Description: X&Y Axis Standard, Traceable, C Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-D Description: X&Y Axis Standard, Traceable, D Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-E Description: X&Y Axis Standard, Traceable, E Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-F Description: X&Y Axis Standard, Traceable, F Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-G Description: X&Y Axis Standard, Traceable, G Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-H Description: X&Y Axis Standard, Traceable, H Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-J Description: X&Y Axis Standard, Traceable, J Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-K Description: X&Y Axis Standard, Traceable, K Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-L Description: X&Y Axis Standard, Traceable, L Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-M Description: X&Y Axis Standard, Traceable, M Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-N Description: X&Y Axis Standard, Traceable, N Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-P Description: X&Y Axis Standard, Traceable, P Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-07-Q Description: X&Y Axis Standard, Traceable, Q Mount, 2mm-1μm Pack: Each Price: $149.00 Add to Quote:
Cat #: 79505-08 Description: X&Y Axis Standard, Certified, Unmounted, 2mm-1μm Pack: Each Price: $1,155.00 Add to Quote:
Cat #: 79505-08-A Description: X&Y Axis Standard, Certified, A Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-B Description: X&Y Axis Standard, Certified, B Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-C Description: X&Y Axis Standard, Certified, C Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-D Description: X&Y Axis Standard, Certified, D Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-E Description: X&Y Axis Standard, Certified, E Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-F Description: X&Y Axis Standard, Certified, F Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-G Description: X&Y Axis Standard, Certified, G Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-H Description: X&Y Axis Standard, Certified, H Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-J Description: X&Y Axis Standard, Certified, J Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-K Description: X&Y Axis Standard, Certified, K Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-L Description: X&Y Axis Standard, Certified, L Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-M Description: X&Y Axis Standard, Certified, M Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-N Description: X&Y Axis Standard, Certified, N Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-P Description: X&Y Axis Standard, Certified, P Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:
Cat #: 79505-08-Q Description: X&Y Axis Standard, Certified, Q Mount, 2mm-1μm Pack: Each Price: $1,183.00 Add to Quote:

Very High Resolution Calibration Reference and Traceable Standard for AFM, SEM, Auger, and FIB

This very high resolution calibration reference and traceable standard uses a precision pattern for accurate calibration in the horizontal plane.
Cat # Description Pack Price Quote Quantity
Cat #: 80127-1DC Description: Calibration Standard, Model 70-1D with Cert Unmounted Pack: Each Price: $4,883.00 Add to Quote:
Cat #: 80127-1DC-PIN Description: Calibration Standard Model 70-1D with Cert Mounted on Pin Stub Pack: Each Price: $4,281.00 Add to Quote:
Cat #: 80127-1D-AFM Description: Calibration Standard Model 70-1D with Cert Mounted on 15mm Steel Disk for AFM Pack: Each Price: $1,661.00 Add to Quote:
Cat #: 80127-1DC-AFM Description: Calibration Standard Model 70-1D with Cert mounted on Steel Disk for AFM Pack: Each Price: $4,281.00 Add to Quote:
Cat #: 80127-1DC-X Description: Calibration Standard Model 70-1D with Cert - Choose Mount Pack: Each Price: $4,981.00 Add to Quote:

X-Checker™

Complete calibration aid for SEM/EDS Systems with test for vacuum pump oil contamination on detector window. Two grid sizes for checking accuracy of image analysis.
Cat # Description Pack Price Quote Quantity
Cat #: 80058-ST Description: X-CHECKER, STANDARD Pack: Each Price: $660.00 Add to Quote:
Cat #: 80058-BN Description: X-CHECKER WITH BORON NITRIDE Pack: Each Price: $770.00 Add to Quote:
Cat #: 80058-EX Description: X-CHECKER, EXTRA Pack: Each Price: $880.00 Add to Quote:

Chessy Test Specimen

A precise SEM calibration specimen of more than 1.6 million 1 micron gold squares on silicon that forms a 4-fold checkerboard pattern. in an area of 5 mm square. Ideal for calibration of SEM magnification in all ranges between 20x and 50,000x.
Cat # Description Pack Price Quote Quantity
Cat #: 79503-01 Description: CHESSY; TEST SPECIMEN Pack: Each Price: $2,085.00 Add to Quote:

High Resolution Gold on Carbon Test

For resolution test of SE and BSE image and chemical mapping in high-resolution systems. Consists of gold particles range from 5 to 150 nm on a square grid pattern with large crystals in center of square and very fine crystals at edges.
Cat # Description Pack Price Quote Quantity
Cat #: 79510-01 Description: HIGH RESOLUTION AU-C ON 12.5MM STUB Pack: Each Price: $189.00 Add to Quote:
Cat #: 79510-02 Description: HIGH RESOLUTION AU-C ON JEOL STUB Pack: Each Price: $189.00 Add to Quote:
Cat #: 79510-03 Description: HIGH RESOLUTION AU-C ON ISI STUB Pack: Each Price: $189.00 Add to Quote:
Cat #: 79510-04 Description: HIGH RESOLUTION AU-C ON HITACHI STUB Pack: Each Price: $189.00 Add to Quote:
Cat #: 79510-05 Description: HIGH RESOLUTION AU-C ON CARBON PLANCHET STUB Pack: Each Price: $189.00 Add to Quote:

Very High Resolution Gold on Carbon Test

For very high resolution performance testing this specimen has a gold particle size ranging from 2 nm to 30 nm. Ideal for testing at instrument magnifications of 50,000x and above.
Cat # Description Pack Price Quote Quantity
Cat #: 79511-01 Description: VERY HIGH RESOLUTION ON 12.5MM STUB Pack: Each Price: $303.00 Add to Quote:
Cat #: 79511-02 Description: VERY HIGH RESOLUTION ON JEOL STUB Pack: Each Price: $303.00 Add to Quote:
Cat #: 79511-03 Description: VERY HIGH RESOLUTION ON ISI STUB Pack: Each Price: $303.00 Add to Quote:
Cat #: 79511-04 Description: VERY HIGH RESOLUTION ON HITACHI STUB Pack: Each Price: $303.00 Add to Quote:
Cat #: 79511-05 Description: VERY HIGH RESOLUTION ON CARBON PLANCHET STUB Pack: Each Price: $303.00 Add to Quote:

Ultra High Resolution Gold (<2 nm - 30 nm) on Carbon Test

Gold particles ranging from <1 nm to 20 nm are suitable for ultra high resolution FE-SEM tests with magnifications of at least 80,000x.
Cat # Description Pack Price Quote Quantity
Cat #: 79512-01 Description: ULTRA HIGH RESOLUTION ON 12.5MM STUB Pack: Each Price: $429.00 Add to Quote:
Cat #: 79512-02 Description: ULTRA HIGH RESOLUTION ON JEOL STUB Pack: Each Price: $429.00 Add to Quote:
Cat #: 79512-03 Description: ULTRA HIGH RESOLUTION ON ISI STUB Pack: Each Price: $429.00 Add to Quote:
Cat #: 79512-04 Description: ULTRA HIGH RESOLUTION ON HITACHI STUB Pack: Each Price: $429.00 Add to Quote:
Cat #: 79512-05 Description: ULTRA HIGH RESOLUTION ON CARBON PLANCHET STUB Pack: Each Price: $429.00 Add to Quote:

Low Voltage Resolution Gold (30 nm - 500 nm) on Carbon Test

Larger gold particles in this test allow for a higher contrast and smaller gaps allow resolution to be measured. This helps to make the test easier to use when operating conditions are not optimal.
Cat # Description Pack Price Quote Quantity
Cat #: 79513-01 Description: Low Voltage Resolution Au-C Test on 12.5mm Pin Stub Pack: Each Price: $207.00 Add to Quote:
Cat #: 79513-02 Description: Low Voltage Resolution Au-C Test on JEOL Stub Pack: Each Price: $207.00 Add to Quote:
Cat #: 79513-03 Description: Low Voltage Resolution Au-C Test on ISI Stub Pack: Each Price: $207.00 Add to Quote:
Cat #: 79513-04 Description: Low Voltage Resolution Au-C Test on Hitachi Stub Pack: Each Price: $207.00 Add to Quote:

Medium Resolution Gold (0.1 μm - 1 μm) on Carbon Test

Larger gold particles in this test with wider gaps, allow for structured microscope setup. Magnification range is 800-10,000x.
Cat # Description Pack Price Quote Quantity
Cat #: 79516-01 Description: Medium Resolution Au-C Test on 12.5mm Pin Stub Pack: Each Price: $237.00 Add to Quote: