Decontaminators

The Evactron® Plasma Decontaminator is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers, improving electron microscope imaging and analytical performance. Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples.

The Evactron Decontaminator plasma source can be rack mounted or installed on most vacuum chambers and electron microscopes. A wide range of products and connectors are available to best meet your needs.

See the ordering tables for recommendations based on your equipment. Flanges for common brands of equipment are available at the end of the page. If you do not see your brand listed, please contact us for additional options.

Applications

  • Hydrocarbon removal in high vacuum chambers
  • Clean SEMs and FIBs for better imaging
  • Improve resolution contrast and scanning time
  • Achieve pristine vacuum conditions
  • Prepare specimens for artifact-free imaging

*New Feature*

Evactron plasma cleaners can now be configured for alternate gases!

The Evactron E50 alternate gas PRS has two configurations: an ultra-high purity filter (0.003 µm pore size) version to meet the stringent requirements of the semiconductor industry SEMI F38-0699 directive and the precision filter (0.5 µm pore size) version for general lab conditions.

The in-line filters prevent the introduction of particulates from gas feedlines into the plasma stream. Alternate gases which have been tested include O2, CDA, Ar/H2, Ar/O2, N2/H2, N2. The use of 100% H2 is not recommended for safety reasons.

 

Sort by
Product Name Ordering Info

Evactron Model E50 Plasma Decontaminators

Compact, high performance powerful plasma cleaners for SEMs, TEMs, and FIBs operate over a wide range of pressures. They enable high quality artifact free imaging and improved detector and probe sensitivity.
Cat # Description Pack Price Quote Quantity
Cat #: 91000-01 Description: Evactron E50 Plasma Decontaminator-Hitachi/JEOL Pack: POR Price: $0.00 Add to Quote:
Cat #: 91000-02 Description: Evactron E50 Plasma Decontaminator-FEI/Tescan/Zeiss Pack: POR Price: $0.00 Add to Quote:
Cat #: 91000-03 Description: Evactron E50 Plasma Decontaminator w/ Alt. Gas Feed Pack: POR Price: $0.00 Add to Quote:

NEW! Evactron® E50 E-TC Plasma Decontaminator

RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers, improving electron microscope imaging and analytical performance. With a wired touchpad programming interface.
Cat # Description Pack Price Quote Quantity
Cat #: 91000-27 Description: Evactron E50 E-TC Plasma De-Contaminator, Hitachi/JEOL Pack: POR Price: $0.00 Add to Quote:
Cat #: 91000-28 Description: Evactron E50 E-TC Plasma De-Contaminator, FEI/Tescan/Zeiss Pack: POR Price: $0.00 Add to Quote:
Cat #: 91000-29 Description: Evactron E50 E-TC Decontaminator w/Ultra Filter Pack: POR Price: $0.00 Add to Quote:
Cat #: 91000-30 Description: Evactron E50 E-TC Decontaminator w/ Alt. Gas Feed Pack: POR Price: $0.00 Add to Quote:

Evactron® Model EP Plasma Decontaminators

Reduces hydrocarbon contamination from high vacuum chambers by breaking down the carbon and turning it into a gas phase that is removed by the pumping system. For use with SEM/FIB.
Cat # Description Pack Price Quote Quantity
Cat #: 91000-11 Description: Evactron EP Plasma Decontaminator + Android For Hitachi Pack: POR Price: $0.00 Add to Quote:
Cat #: 91000-12 Description: Evactron EP Plasma Decontaminator + Android For JEOL Pack: POR Price: $0.00 Add to Quote:
Cat #: 91000-13 Description: Evactron EP Plasma Decontaminator + Android For Zeiss Pack: POR Price: $0.00 Add to Quote:

Evactron® Zephyr™ Plasma Decontaminators

For SEM/FIB systems with turbo molecular pumps. IT provides fast and efficient hydrocarbon removal using a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber. There is no damage to samples.
Cat # Description Pack Price Quote Quantity
Cat #: 91000-10 Description: Evactron 25 Zephyr Plasma Decontaminator Pack: POR Price: $0.00 Add to Quote:

SoftClean System

Improve electron microscope image with the SoftClean Chamber. Pre-clean specimens, specimen mounts, and holders with proven downstream plasma ashing process before examination in the SEM chamber.
Cat # Description Pack Price Quote Quantity
Cat #: 91000-15 Description: Evactron SoftClean EP Pack: POR Price: $0.00 Add to Quote:

CombiClean System

Decontaminates specimens and columns of SEMs and FIBs. The system combines onboard vacuum cleaning chamber and external PRS (Plasma Radical Source) control in one unified system.
Cat # Description Pack Price Quote Quantity
Cat #: 91000-18 Description: TEM Adapter for Jeol Pack: Each Price: $2,450.00 Add to Quote:
Cat #: 91000-19 Description: TEM Adapter for FEI Pack: Each Price: $2,450.00 Add to Quote:
Cat #: 91000-20 Description: TEM Adapter for Zeiss Pack: Each Price: $2,450.00 Add to Quote:
Cat #: 91000-21 Description: TEM Adapter for Hitachi Pack: Each Price: $2,450.00 Add to Quote:
Cat #: 91000-17 Description: Evactron CombiClean System Pack: POR Price: $0.00 Add to Quote:
Cat #: 91000-22 Description: TEM Adapter for JEOL Sample Rod Pack: Each Price: $2,472.00 Add to Quote:
Cat #: 91000-23 Description: TEM Adapter for Hitachi Sample Rod Pack: Each Price: $2,450.00 Add to Quote:
Cat #: 91000-24 Description: TEM Adapter for FEI Sample Rod Pack: Each Price: $2,450.00 Add to Quote:
Cat #: 91000-25 Description: Evactron PRS-Z Pack: POR Price: $0.00 Add to Quote:
Cat #: 91000-26 Description: Evactron Cable Bundle Pack: POR Price: $0.00 Add to Quote:

Evactron® Adapter Flanges

Evactron adaptor flanges are identified by physical dimensions of the blank plate in the SEM/FIB. ORID is a measurement of the inner diameter of the O ring.
Cat # Description Pack Price Quote Quantity
Cat #: 230090-01 Description: FEI, 64 X 80, 50 ORID, 4H, OCTG, ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230141-01 Description: FEI, 100 OD, 75 ORID, 6H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230142-01 Description: FEI, 100 OD, 72 ORID, 88 BC, 3H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230143-01 Description: FEI, 90 OD, 60 ORID, 78BC, 3H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230153-01 Description: FEI, 85 OD, 60 ORID, 76 BC, 3H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230154-01 Description: FEI, 100 OD, 70 ORID 84.5 BC, 3H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230155-01 Description: FEI, 64 OD, 38 ORID, 57 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230235-01 Description: FEI, 70 OD, 33 ORID, 61 BC, 4H, PLUG, 1 PC. Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230335-01 Description: FEI, 87 OD, 60 ORID, 74 BC, 3H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230350-01 Description: FEI, 120 OD, 93 ORID, 109 BC, 6H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230351-00 Description: FEI, 59 OD, 38 ORID, 52 BC, 4H, 1 PC. Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230359-01 Description: FEI, 90 OD, 70 ORID, 80 BC, 3H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230006-01 Description: HITACHI, 57 OD, 34.5 ORID, 50 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230320-01 Description: HITACHI, 58 X 58, 24 ORID, 41.5 BC, 4H, PLUG, 1 PC. Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230568-01 Description: HITACHI, 69 OD, 47.5 ORID, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230001-01 Description: JEOL, 64 OD, 40 ORID, 55 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230002-01 Description: JEOL, 99 OD , 75 ORID, 89 BC, 4H, 38 (1.5") LONG NIPPLE Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230002-02 Description: JEOL, 99 OD, 75 ORID, 89 BC, 4H, 64 (2.5") LONG NIPPLE Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230003-01 Description: JEOL, 86 X 206, NO O-RING, 4H ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230010-01 Description: JEOL, 73 OD, 50 ORID, 64 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230011-01 Description: JEOL, 74 X 90, OVAL O-RING, 4H, ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230013-01 Description: JEOL, 88 OD, 45 ORID,79 BC, 4H, ASYM, 90 LONG NIPPLE Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230022-01 Description: JEOL, 100 X 355, NO O-RING, 5H, ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230023-01 Description: JEOL, 72 X 86, OVAL O-RING, 4H, ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230311-01 Description: JEOL, 88 OD, 45 ORID, 79 BC, 4H, ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230322-01 Description: JEOL, 75 X 98 (ARCHED, ONE SIDE), OVAL O-RING, 4H, ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230325-01 Description: JEOL, 154 X 204, RECT O-RING, 4H, ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230664-01 Description: JEOL, 95 OD, 71.5 ORID, 85.5 BC, 3H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230008-01 Description: ZEISS, 55 OD, 30 ORID, 45 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230012-01 Description: ZEISS, 64 X 64, 54 ORID, 57 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230014-01 Description: ZEISS, 79 OD, 53 ORID, 70.5 BC 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230015-01 Description: ZEISS, 84 OD, 54 ORID, 72 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230016-01 Description: ZEISS, 70 OD, 45 ORID, 57 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230017-01 Description: ZEISS, 113.5 OD, 46.5 ORID, 92 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230018-01 Description: ZEISS, 64 OD, 38 ORID, 57 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230020-01 Description: ZEISS, 82 OD, 41 ORID, 68 BC, 4H, PLUG Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230034-01 Description: ZEISS, 96 OD, 72 ORID, 86 BC, 4H, ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230036-01 Description: ZEISS, 62 X 62, 53 ORID, 71 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230037-01 Description: ZEISS, 162 OD, 127 ORID, 149 BC, 6H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230038-01 Description: ZEISS, 68 X 88, OVAL O-RING, 4H, SYMM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230039-01 Description: ZEISS, 89 X 89, 72 ORID, 92 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230356-01 Description: ZEISS, 100 OD, 60 ORID, 90 BC, 6H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230357-01 Description: ZEISS, 90 OD, 66 ORID, 81 BC, 4H, ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230358-01 Description: ZEISS, 81 X 85, 4H, ASYM Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230364-01 Description: ZEISS, 85 x 85, 70 ORID, 92 BC, 4H Pack: Each Price: $1,815.00 Add to Quote:
Cat #: 230366-01 Description: ZEISS, 150 X 190, RECT. O-RING, 10H, ASYM Pack: Each Price: $1,815.00 Add to Quote: