Evactron E50 E-TC Plasma De-Contaminator, FEI/Tescan/Zeiss

Evactron® E50 E-TC Plasma De-Contaminator

Now available with alternate gas configuration

If your facility prefers a wired touchpad programming interface, the new Evactron E50 E-TC Plasma De-Contaminator is for you!

The touchpad has an RS-232 cable connecting it to the controller. Its simplified Plasma Radical Source utilizes air plasma and UV afterglow to reduce hydrocarbon contamination, delivering results quickly.


  • Desktop controller with pushbutton operation
  • Tethered touchpad communication package
  • Small Footprint
  • Hardware interlock
  • Chassis dimensions 44 x 8.9 x 22 cm
  • Touchpad dimensions 134 x 112 x 69 mm
  • RF Power: 20-75 watts at 13.56 MHZ RFHC
  • 100-240 VAC 50/60 Hz input

Hitachi and JEOL.

SKU: 91000-28
Pack: POR
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