Extended Height Coating Shield Assembly

Innovative and versatile Sputter Coater and Carbon Evaporator for SEM ApplicationsQuick Overview

The EMS150R is a compact rotary pumped coating system ideally suited for SEM and other coating applications. The EMS150R is available in three formats:

EMS150R S – a compact rotary pumped sputter coater, suitable for non-oxidising metals, such as gold (Au) and platinum (Pt)

EMS150R E – a compact rotary pumped carbon fibre coater suitable for SEM applications

EMS150R ES – a compact rotary pumped combined sputter coater and carbon evaporator

Key Features
  • Metal sputtering or carbon evaporation - or both – in one space saving design
  • Rotary pumped sputter coating – allows sputtering of a wide range of non-oxidising (noble) metals, such as gold (Au), platinum (Pt), silver (Ag) and palladium (Pd)
  • Carbon fibre coating – ideal for SEM carbon coating applications (eg EDS and WDS)
  • Advanced design carbon evaporation gun – simple operation, reproducible results
  • Glow discharge option – for modification of sample surface properties (eg hydrophobic
    to hydrophilic conversion) or for cleaning / removal of contaminating surface residues
  • Control of evaporation current profile – ensures consistently reproducible carbon films
  • Repeatable thickness control using the film thickness monitor option
  • Fully automatic touch screen control – rapid data input, simple operation
  • Multiple, customer defined coating protocols can be stored – ideal for multi-user labs
  • Automatic vacuum control, which can be pre-programmed to suit the process and material – no needle valve to adjust
  • “Intelligent” recognition system – automatically detects the type of coating insert fitted
  • Easy-to-change, drop-in style specimen stages (rotation stage as standard)
  • Thick film capabilities – up to 60 minutes sputtering time without breaking vacuum
  • Ergonomic one piece moulded case – easy maintenance and service access
  • Ethernet with local FTP server connection – simple programmer updates

Please visit www.emsdiasum.com/microscopy for complete details.

SKU: 11880
Pack: Each
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