Dual Head Turbo-Pumped Sputter Coater

The Q300T D Plus is Suitable for multi-layer sequential sputtering of two materials, the Q300T D Plus has two independent sputtering heads, which allows sequential sputtering of two metals without the need to break vacuum. The system is fully automated with user defined recipes controlling the pumping sequence, time, number of sputter cycles, and the current used during the process. Unlimited layers of varying thickness from two target materials can be sputtered sequentially by cycling between both targets. When not in use the targets are shuttered for protection from contamination.

Substrates can be coated using non-oxidizing (noble) metals such as gold (Au) and platinum (Pt). For coatings with a fine grain structure iridium (Ir) can also be used. With the high-quality vacuum system the Q300T D Plus is also capable of using oxidizing metal targets such as chromium (Cr) and Aluminum (Al) to produce fine films and coatings. The Q300T D Plus comes as standard with a chromium (Cr) target and gold (Au) target

Key Features

  • Capable of achieving vacuum of 5 x 10-5 mbar
  • New touch and swipe capacitive screen
  • USB port for upgrades and download of process log files
  • Multiple-user profiles can be set up on one machine
  • New software sorts recipes per user according to recent use
  • 16GB of memory can store more than 1000 recipes
  • New multi-color LED visual status indicator
  • Interchangeable stage options
  • Three sputter heads for large area deposition of different materials
  • Single head selection for small samples

Recommended applications for Q300T D Plus

  • Ideal for multi-layer coating
  • Adhesion studies

These products are for Research Use Only.

Improved interface

  • Dual-core ARM processor for a fast, responsive display
  • Capacitive touch screen is more sensitive for ease of use
  • User interface software has been extensively revised, using a modern smartphone-style interface
  • Comprehensive context-sensitive help
  • USB interface allows easy software updates and backing up/copying of recipe files to USB stick
  • Process log files can be exported via USB port in .csv format for analysis in Excel or similar. Log files include date, time and process parameters.
  • 16GB of flash memory can store more than 1000 recipes
  • Quick and easy creation of process sequences with a simple copy, drag and drop operation

Allows multiple users to input and store coating recipes. New feature to sort recipes per user according to recent use.

System prompts user to confirm target material and it then automatically selects appropriate parameters for that material.

Intuitive software allows the most inexperienced or occasional operator to rapidly enter and store their own process data. For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own.

Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from overheating.

Detachable chamber with built-in implosion guard

Removable glass chamber and easily accessible base and top plate allows for an easy cleaning process. Users can rapidly change the chamber, if necessary, to avoid cross contamination of sensitive samples. Tall chamber option is available for improved uniformity for sputtering and to hold larger substrates.

Dual head sputtering – for sequential sputtering

The Q300T D Plus has two independent sputtering heads to allow sequential sputtering of two different metals without the need to 'break' vacuum, for example, a thin 'seeding' layer of chromium (Cr) followed by deposition of gold (Au). An automatic shutter mechanism enables cleaning of oxidizing sputter targets and protects the second target and substrate during coatings. For single metal applications one target can be selected.

Multiple stage options

The Q300T D Plus has substrate stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except the rotary planetary stage). A swinging arm stage drive is supplied as standard, which is a stage drive and positioning mechanism that positions the stage under the correct target. Rotation speed is variable between 14-38 rpm.

In addition a flat, adjustable stage capable of accepting 4" (101.6 mm) wafers is supplied as standard with the Q300T D Plus.

As an accessory, a 6" wafer stage is available, which is a flat adjustable stage capable of accepting 6" or 150 mm wafers. The stage includes two masks for improving uniformity of coating.

Rotation stage – 50 mm Ø. This stage only rotates and has no tilt or height adjustment.

Rotate-tilt stage – 50 mm Ø. With height adjustment (target to stage height variable between 30-80 mm). The tilt angle can be pre-set (horizontal to 30°).

Rotation stage for glass slides – 25 mm x 76 mm

Safety

The Q300T D Plus meets key industry CE standards

  • All electronic components are protected by covers
  • Implosion guard prevents user injury in event of chamber failure
  • Vacuum interlocks remove power from deposition sources to prevent user exposure to high voltage in event of chamber being opened
  • Overheating protection shuts down power supply

Vacuum control

High vacuum turbo pumping allows sputtering of a wide range of oxidizing and non-oxidizing metals for thin film and electron microscopy applications. Automatic vacuum control which can be pre-programmed to suit the process and material, therefore removing the need for manual intervention or control.

Cool magnetron sputtering

Sputter coating is a technique widely used in various applications; it is possible to create a plasma and sputter metals with high voltage, poor vacuum and no automation. However, this is not suitable for some applications because it can heat the substrate and result in damage when the plasma interacts with the substrate. The Q300T D Plus uses low temperature enhanced-plasma magnetrons optimized for the turbomolecular pump pressures, combined with low current and deposition control, which ensures your substrate is protected and uniformly coated.

The Q300T D Plus uses easy-change, 57 mm diameter, disc-style targets which are designed to sputter oxidizing and noble metals. It is fitted with gold (Au) and chromium (Cr) sputter targets as standard.

Pulsed cleaning for Aluminum sputtering

Aluminum (Al) rapidly forms an oxide layer which can be difficult to remove. The Q300T D Plus has a special recipe for Aluminum that reduces the oxide removal time and prevents excessive pre-sputtering of the target.

Film thickness monitor

The Q300T D Plus can be fitted with an optional dual film thickness monitor (FTM), which measures the coating thickness on two quartz crystal monitors located within the chamber. The thickness measured on the monitor can be correlated to the thickness on the substrate using a mathematical formula built into the software; this allows the user to control the thickness of material deposited on to the substrate. For example, the Q300T D Plus can automatically terminate a coating profile when the required thickness has been achieved. Alternatively, the process can be terminated by time.

Specifications

Instrument case 590 mm W x 535 mm D x 420 mm H, total height with coating head open is 772 mm
Weight 36 kg (Packed 59 kg)
Packed dimensions 730 mm W x 630 mm D x 690 mm H
Work chamber Borosilicate glass 300 mm OD x 127 mm H
Safety shield Integral polyethylene terephthalate (PET) cylinder
Display 115.5 mm W x 86.4 mm H (active area), 640 RGB x 480 (display format), capacitive touch color display
User interface Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
Specimen stage A flat adjustable stage capable of accepting either 4" or 6" wafers is mounted on a swinging arm stage, which rotates the stage under the targets to optimize coating. Rotation speed is variable from 14 rpm to 38 rpm
Vacuum
Rotary pump 50L/min two stage rotary pump with oil mist filter
Turbo pump Internally mounted 70 L/s air-cooled
Vacuum measurement Pirani gauge as standard, full range gauge available as an option
Ultimate Vacuum 5 x 10-5 mbar
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas
Sputter vacuum range 5 x 10-3 mbar to 5 x 10-2 mbar
Typical ultimate vacuum of the pumping system in a clean instrument after pre-pumping and venting with dry nitrogen gas
Processes
Sputter Deposition Current 150mA
Visual status indicator

A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

The indicator LED shows the following states:

  • Initialization
  • Process running
  • Idle
  • Coating in progress
  • Process completed
  • Process ended in fault condition

Audio indication also sounds on completion of the process.

Services
Gases Process gas Argon, 99.999% Nominal 5psi
Vent gas Nitrogen (optional). Nominal 5psi
Cat # Description Technical Doc Pack Price Quote Quantity
Cat #: Q300TD Description: 300T D Plus Dual Target Sequential Sputtering System Pack: POR Price: $0.00 Add to Quote:
Cat #: 3410 Description: Sputtering Target 57mm 0 x 0.1mm Gold Pack: POR Price: $0.00 Add to Quote:
Cat #: 3410-2 Description: 57 mm Ø x 0.2 mm Gold Pack: POR Price: $0.00 Add to Quote:
Cat #: 3411 Description: Sputtering Target 57mm 0 x 0.1mm Gold/Palladium (80/20) Pack: POR Price: $0.00 Add to Quote:
Cat #: 3411-2 Description: 57 mm Ø x 0.2 mm Gold/Palladium (80/20) Pack: POR Price: $0.00 Add to Quote:
Cat #: 3412 Description: Sputtering Target 57mm 0 x 0.1mm Platinum Pack: POR Price: $0.00 Add to Quote:
Cat #: 3412-2 Description: 57 mm Ø x 0.2 mm Platinum Pack: POR Price: $0.00 Add to Quote:
Cat #: 3413 Description: Sputtering Target 57mm 0 x 0.1mm Nickel Pack: POR Price: $0.00 Add to Quote:
Cat #: 3414 Description: Sputtering Target 57mm 0 x 0.1mm Silver Pack: POR Price: $0.00 Add to Quote:
Cat #: 3415 Description: Sputtering Target 57mm 0 x 0.1mm Palladium Pack: POR Price: $0.00 Add to Quote:
Cat #: 3416 Description: Sputtering Target 57mm 0 x 0.1mm Copper Pack: POR Price: $0.00 Add to Quote:
Cat #: 3417 Description: Sputtering Target 57mm 0 x 0.3mm Chromium Pack: POR Price: $0.00 Add to Quote:
Cat #: 3418 Description: Sputtering Target 57mm 0 x 0.5mm Tungsten Pack: POR Price: $0.00 Add to Quote:
Cat #: 3419 Description: Sputtering Target 57mm 0 x 1.5mm Chromium Pack: POR Price: $0.00 Add to Quote:
Cat #: 3420 Description: Sputtering Target 57mm 0 x 0.2mm Tungsten Pack: POR Price: $0.00 Add to Quote:
Cat #: 3421 Description: Sputtering Target 54mm 0 x 1.5mm Carbon Pack: POR Price: $0.00 Add to Quote:
Cat #: 3422 Description: Sputtering Target 57mm 0 x 0.1mm Aluminium Pack: POR Price: $0.00 Add to Quote:
Cat #: 3423 Description: Sputtering Target 57mm 0 x 0.1mm Platinum/Palladium (80/20) Pack: POR Price: $0.00 Add to Quote:
Cat #: 3424 Description: Sputtering Target 57mm 0 x 1.5mm Titanium Pack: POR Price: $0.00 Add to Quote:
Cat #: 3425 Description: Sputtering Target 57mm 0 x 0.3mm Platinum/Palladium (80/20) Pack: POR Price: $0.00 Add to Quote:
Cat #: 3426 Description: Sputtering Target 57mm 0 x 0.3mm Gold Pack: POR Price: $0.00 Add to Quote:
Cat #: 3427 Description: Sputtering Target 57mm 0 x 0.3mm Gold/Palladium (80/20) Pack: POR Price: $0.00 Add to Quote:
Cat #: 3428 Description: Sputtering Target 57mm 0 x 0.3mm Platinum Pack: POR Price: $0.00 Add to Quote:
Cat #: 3429 Description: Sputtering Target 57mm 0 x 0.5mm Titanium Pack: POR Price: $0.00 Add to Quote:
Cat #: 3430 Description: Sputtering Target 57mm 0 x 0.1mm Iron Pack: POR Price: $0.00 Add to Quote:
Cat #: 3431 Description: Sputtering Target 57mm 0 x 0.3mm Iridium Pack: POR Price: $0.00 Add to Quote:
Cat #: 3432 Description: Sputtering Target 57mm 0 x 0.1mm Cobalt Pack: POR Price: $0.00 Add to Quote:
Cat #: 3433 Description: Sputtering Target 57mm 0 x 0.1mm Tin Pack: POR Price: $0.00 Add to Quote:
Cat #: 3434 Description: Sputtering Target 57mm 0 x 0.1mm Molybdenum Pack: POR Price: $0.00 Add to Quote:
Cat #: 3435 Description: Sputtering Target 57mm 0 x 0.3mm Magnesium Pack: POR Price: $0.00 Add to Quote:
Cat #: 3436 Description: Sputtering Target 57mm 0 x 0.1mm Tantalum Pack: POR Price: $0.00 Add to Quote:
Cat #: 3437 Description: Sputtering Target 57mm 0 x 3mm Indium Tin Oxide (90/10) Pack: POR Price: $0.00 Add to Quote:
Cat #: G6260 Description: Glass cylinder 6" Pack: POR Price: $0.00 Add to Quote:
Cat #: 10068 Description: Additional glass cylinder assembly Pack: POR Price: $0.00 Add to Quote:
Cat #: 10429 Description: Extended glass cylinder assembly Pack: POR Price: $0.00 Add to Quote:
Cat #: 6790-S Description: Swinging arm stage drive Pack: POR Price: $0.00 Add to Quote:
Cat #: 6800-S Description: Rotating specimen stage Pack: POR Price: $0.00 Add to Quote:
Cat #: 6801 Description: Rotating 50 mm specimen stage with adjustable tilt Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 6802 Description: 50 mm variable height specimen stage Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 6803 Description: 50 mm rotary tilting stage Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 6804 Description: A 90 mm specimen stage for microscope slides Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 3435-5 Description: 57 mm Ø x 0.3 mm Magnesium Pack: POR Price: $0.00 Add to Quote:
Cat #: 6805 Description: Dual channel film thickness monitor Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 6806 Description: Spare quartz crystal Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 6807 Description: Extended height vacuum chamber Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 6808 Description: Vacuum spigot Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 6809 Description: A lockable emergency stop (e-stop) switch Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 6811 Description: Coating shields Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 6812 Description: Spares kit Q300T D Pack: POR Price: $0.00 Add to Quote:
Cat #: 3409 Description: 57 mm Ø x 0.76 mm Aluminum Pack: POR Price: $0.00 Add to Quote:
Cat #: 3411-3 Description: 57 mm Ø x 0.3 mm Gold/Palladium (60/40) Pack: POR Price: $0.00 Add to Quote: