Ultra-Flat Silicon Wafer 6"

These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.

Specifications

  6"
Material: Silicon
Diameter: 150 mm
Orientation: <100>
Type/Dopant: P/Boron
Grade: Prime/CZ Virgin
Growth Method: CZ
Resistivity: 10-20 Ohm-cm
Thickness: 675 µm ±20 µm
TTV: <4.00µm
SFPD: <2.0µm
Warp: ≤30µm
Bow: ≤30µm
Particles: [email protected]≥0.3 µm
Front Surface: Polished
Back Surface: Etched
Flat: 1 per SEMI Standard
Site Flatness: <2.0 µm
Roughness: Typically 2-3Å
SKU: 71893-02
Pack: Each
$114.00