X&Y Axis Standard, Traceable, Unmounted, 2mm-100nm

Calibration over a wide measurement range without stage rotation.

2.0 mm to 100 nm scale range on X-axis
60 nm chrome for larger features and 20 nm chrome with 40 nm gold for high-resolution features to give increased contrast
Unique serial number for each die
Manufactured using advanced MEMS technology

Traceable and Certified Options- Traceable CD standards use average data measured for each wafer. Each certified CD standard is individually calibrated against a NIST measured standard.

Specifications

Die Size	2.5 mm x 2.5 mm
Lines	Chrome and Gold
Silicon Thickness	525 ± 20 µm
Scale Range Features
2.0 mm to 100 nm	2 mm, 1 mm, 0.5 m, 0.1 mm, 50 µm, 10 µm, 5 µm, 2 µm, 1 µm, 500 nm, 250 nm, and 100 nm

SKU: 79505-05

Pack: Each

A: Unmounted

Price: $781.00

X&Y Axis Standard, Traceable, Unmounted, 2mm-100nm

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X&Y Axis Standard, Traceable, Unmounted, 2mm-100nm

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