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1 µm Pitch Silicon Calibration Specimen

For use with SEM, FIB, Sims, Auger, and LM.

  • Edge fiducial markers for grid position finding
  • Pitch of 1 µm ± 0.025 µm, 10 µm, ± 0.025µm, and 100 µm ± 0.25 µm with perpendicularity better than 0.01°
  • Unique serial number on each die for traceability
  • Line width of 200 nm ± 10 nm for 1 µm pitch lines, 300 nm ± 15 nm for 10 µm pitch lines and 400 nm ± 20 nm for 100 µm pitch lines
  • 300 nm ± 30 nm deep etched lines

Traceable and Certified Options

A traceable CD standard uses average data measured for each production wafer. Each certified CD standard is individually calibrated against a NIST measured standard.

Mounting Options

See chart. You may purchase your standard unmounted or pre-mounted.

Specifications

Die Size 4 mm x 4 mm
Calibration Area 3 mm x 3 mm
Material Ultra-flat silicon, P Boron doped
Thickness 525 µm ± 20 µm
Orientation <100>
Resistivity 5-10 ohm/cm
Picture of 1 µm Pitch Silicon Calibration Specimen
Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen Picture of 1 µm Pitch Silicon Calibration Specimen

Mounting Option: A

Cat # Description A Pack Price Quote Quantity
Cat #: 79505-11 Description: 1 μm Specimen, Traceable, Unmounted A: Unmounted Pack: Each Price: $116.50 Add to Quote:
Cat #: 79505-11-A Description: 1 μm Specimen, Traceable, A Mount A: A Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-B Description: 1 μm Specimen, Traceable, B Mount A: B Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-C Description: 1 μm Specimen, Traceable, C Mount A: C Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-D Description: 1 μm Specimen, Traceable, D Mount A: D Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-E Description: 1 μm Specimen, Traceable, E Mount A: E Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-F Description: 1 μm Specimen, Traceable, F Mount A: F Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-G Description: 1 μm Specimen, Traceable, G Mount A: G Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-H Description: 1 μm Specimen, Traceable, H Mount A: H Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-J Description: 1 μm Specimen, Traceable, J Mount A: J Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-K Description: 1 μm Specimen, Traceable, K Mount A: K Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-L Description: 1 μm Specimen, Traceable, L Mount A: L Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-M Description: 1 μm Specimen, Traceable, M Mount A: M Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-N Description: 1 μm Specimen, Traceable, N Mount A: N Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-P Description: 1 μm Specimen, Traceable, P Mount A: P Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-11-Q Description: 1 μm Specimen, Traceable, Q Mount A: Q Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-12 Description: 1 μm Specimen, Certified, Unmounted A: Unmounted Pack: Each Price: $804.50 Add to Quote:
Cat #: 79505-12-A Description: 1 μm Specimen, Certified, A Mount A: A Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-B Description: 1 μm Specimen, Certified, B Mount A: B Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-C Description: 1 μm Specimen, Certified, C Mount A: C Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-D Description: 1 μm Specimen, Certified, D Mount A: D Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-E Description: 1 μm Specimen, Certified, E Mount A: E Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-F Description: 1 μm Specimen, Certified, F Mount A: F Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-G Description: 1 μm Specimen, Certified, G Mount A: G Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-H Description: 1 μm Specimen, Certified, H Mount A: H Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-J Description: 1 μm Specimen, Certified, J Mount A: J Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-K Description: 1 μm Specimen, Certified, K Mount A: K Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-L Description: 1 μm Specimen, Certified, L Mount A: L Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-M Description: 1 μm Specimen, Certified, M Mount A: M Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-N Description: 1 μm Specimen, Certified, N Mount A: N Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-P Description: 1 μm Specimen, Certified, P Mount A: P Pack: Each Price: $846.00 Add to Quote:
Cat #: 79505-12-Q Description: 1 μm Specimen, Certified, Q Mount A: Q Pack: Each Price: $846.00 Add to Quote:

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