The Evactron® Zephyr Decontaminator line was created to accommodate SEMs, FIBs, and other vacuum chambers that use turbo molecular pumps. They are designed for SEM/FIB systems and offer fast and efficient hydrocarbon removal with no damage to samples or sensitive components.
- Cleaning of SEM/FIB chambers at turbo pressure
- Shorter cleaning time (increased production, less downtime)
- One button operation
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- Desktop controller
- SEM/FIB chambers or load locks
- 2 operating regimes
- Classic mode (roughing pressures)
- T-pump mode (turbomolecular pressures)
This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers.
The Evactron® Model 25 Zephyr Decontaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination.
This model was created for chambers that use turbo molecular pumps (TMPs). It is designed to clean/decontaminate in the turbo pressure regime at 1-50 mTorr and has no adverse effects on the TMP temperatures.
Features
- Clean chambers at turbo pump pressures
- 5-20 Watts RF power
- ≥10x improved cleaning rate
- One button operation
- 1-50 mTorr operating pressure
Benefits
- No stress to the turbo molecular pump
- Safely decontaminates the chamber without damage to sensitive components
- Shorter cleaning time, giving increased production with less system down time
- Cleans chamber while in "pump down"
- Increased mean free path, yet ion damage free
Ordering Information
Attachment Flange required, sold separately. See below.