Evactron 25 Zephyr Plasma Decontaminator

The Evactron® Zephyr Decontaminator line was created to accommodate SEMs, FIBs, and other vacuum chambers that use turbo molecular pumps. They are designed for SEM/FIB systems and offer fast and efficient hydrocarbon removal with no damage to samples or sensitive components.

  • Cleaning of SEM/FIB chambers at turbo pressure
  • Shorter cleaning time (increased production, less downtime)
  • One button operation
  • Desktop controller
  • SEM/FIB chambers or load locks
  • 2 operating regimes
    • Classic mode (roughing pressures)
    • T-pump mode (turbomolecular pressures)

This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers.

The Evactron® Model 25 Zephyr Decontaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination.

This model was created for chambers that use turbo molecular pumps (TMPs). It is designed to clean/decontaminate in the turbo pressure regime at 1-50 mTorr and has no adverse effects on the TMP temperatures.


  • Clean chambers at turbo pump pressures
  • 5-20 Watts RF power
  • ≥10x improved cleaning rate
  • One button operation
  • 1-50 mTorr operating pressure


  • No stress to the turbo molecular pump
  • Safely decontaminates the chamber without damage to sensitive components
  • Shorter cleaning time, giving increased production with less system down time
  • Cleans chamber while in "pump down"
  • Increased mean free path, yet ion damage free

Ordering Information

Attachment Flange required, sold separately. See below.

Manufacturer: XEI Scientific
SKU: 91000-10
Pack: Each
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