X&Y Axis Standard, Certified, A Mount, 2mm-100nm

Calibration over a wide measurement range without stage rotation.

  • 2.0 mm to 100 nm scale range on X-axis
  • 60 nm chrome for larger features and 20 nm chrome with 40 nm gold for high-resolution features to give increased contrast
  • Unique serial number for each die
  • Manufactured using advanced MEMS technology

Traceable and Certified Options- Traceable CD standards use average data measured for each wafer. Each certified CD standard is individually calibrated against a NIST measured standard.

Specifications

Die Size 2.5 mm x 2.5 mm
Lines Chrome and Gold
Silicon Thickness 525 ± 20 µm
Scale Range Features
2.0 mm to 100 nm 2 mm, 1 mm, 0.5 m, 0.1 mm, 50 µm, 10 µm, 5 µm, 2 µm, 1 µm, 500 nm, 250 nm, and 100 nm
SKU: 79505-06-A
Pack: Each
A: A
$1,982.00