X&Y Axis Standard, Traceable, H Mount, 2mm-1μm

Calibration over a wide measurement range without stage rotation.

  • 2.0 mm to 100 nm scale range on X-axis
  • 60 nm chrome for larger features and 20 nm chrome with 40 nm gold for high-resolution features to give increased contrast
  • Unique serial number for each die
  • Manufactured using advanced MEMS technology

Traceable and Certified Options- Traceable CD standards use average data measured for each wafer. Each certified CD standard is individually calibrated against a NIST measured standard.

Specifications

Specifications

Die Size 2.5 mm x 2.5 mm
Lines Chrome and Gold
Silicon Thickness 525 ± 20 µm
Scale Range Features
2.0 mm to 1 µm 2 mm, 1 mm, 0.5 mm, 0.1 mm, 50 µm, 10 µm, 5 µm, 2 µm, and 1 µm
SKU: 79505-07-H
Pack: Each
A: H
$158.00