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10 µm Pitch Silicon Calibration Specimen

For use with SEM, FIB, Sims, Auger, and LM.

  • Edge fiducial markers for grid position finding
  • Pitch of 10 µm ± 0.025 µm, 10 µm, ± 0.025µm, and 100 µm ± 0.25 µm with perpendicularity better than 0.01°
  • Unique serial number on each die for traceability
  • Line width of 300 nm ± 15 nm for 10 µm pitch lines and 400 nm ± 20 nm for 100 µm pitch lines
  • 300 nm ± 30 nm deep etched lines

Traceable and Certified Options

A traceable CD standard uses average data measured for each production wafer. Each certified CD standard is individually calibrated against a NIST measured standard.

Mounting Options

See chart. You may purchase your standard unmounted or pre-mounted.

Specifications

Die Size 4 mm x 4 mm
Calibration Area 3 mm x 3 mm
Material Ultra-flat silicon, P Boron doped
Thickness 525 µm ± 20 µm
Orientation <100>
Resistivity 5-10 ohm/cm

Uses average data measued for each wafer.

Picture of 10 µm Pitch Silicon Calibration Specimen
Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen Picture of 10 µm Pitch Silicon Calibration Specimen
Cat # Description Pack Price Quote Quantity
Cat #: 79505-21 Description: 10 µm Specimen, Traceable, Unmounted Pack: Each Price: $110.00 Add to Quote:
Cat #: 79505-21-A Description: 10 µm Specimen, Traceable, A Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-B Description: 10 µm Specimen, Traceable, B Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-C Description: 10 µm Specimen, Traceable, C Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-D Description: 10 µm Specimen, Traceable, D Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-E Description: 10 µm Specimen, Traceable, E Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-F Description: 10 µm Specimen, Traceable, F Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-G Description: 10 µm Specimen, Traceable, G Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-H Description: 10 µm Specimen, Traceable, H Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-J Description: 10 µm Specimen, Traceable, J Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-K Description: 10 µm Specimen, Traceable, K Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-L Description: 10 µm Specimen, Traceable, L Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-M Description: 10 µm Specimen, Traceable, M Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-N Description: 10 µm Specimen, Traceable, N Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-P Description: 10 µm Specimen, Traceable, P Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-21-Q Description: 10 µm Specimen, Traceable, Q Mount Pack: Each Price: $132.00 Add to Quote:
Cat #: 79505-22 Description: 10 µm Specimen, Certified, Unmounted Pack: Each Price: $759.00 Add to Quote:
Cat #: 79505-22-A Description: 10 µm Specimen, Certified, A Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-B Description: 10 µm Specimen, Certified, B Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-C Description: 10 µm Specimen, Certified, C Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-D Description: 10 µm Specimen, Certified, D Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-E Description: 10 µm Specimen, Certified, E Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-F Description: 10 µm Specimen, Certified, F Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-G Description: 10 µm Specimen, Certified, G Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-H Description: 10 µm Specimen, Certified, H Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-J Description: 10 µm Specimen, Certified, J Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-K Description: 10 µm Specimen, Certified, K Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-L Description: 10 µm Specimen, Certified, L Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-M Description: 10 µm Specimen, Certified, M Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-N Description: 10 µm Specimen, Certified, N Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-P Description: 10 µm Specimen, Certified, P Mount Pack: Each Price: $798.00 Add to Quote:
Cat #: 79505-22-Q Description: 10 µm Specimen, Certified, Q Mount Pack: Each Price: $798.00 Add to Quote:

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