For use with SEM, FIB, Sims, Auger, and LM.
- Edge fiducial markers for grid position finding
- Pitch of 10 µm ± 0.025 µm, 10 µm, ± 0.025µm, and 100 µm ± 0.25 µm with perpendicularity better than 0.01°
- Unique serial number on each die for traceability
- Line width of 300 nm ± 15 nm for 10 µm pitch lines and 400 nm ± 20 nm for 100 µm pitch lines
- 300 nm ± 30 nm deep etched lines
Traceable and Certified Options
A traceable CD standard uses average data measured for each production wafer. Each certified CD standard is individually calibrated against a NIST measured standard.
Mounting Options
See chart. You may purchase your standard unmounted or pre-mounted.
Specifications
| Die Size |
4 mm x 4 mm |
| Calibration Area |
3 mm x 3 mm |
| Material |
Ultra-flat silicon, P Boron doped |
| Thickness |
525 µm ± 20 µm |
| Orientation |
<100> |
| Resistivity |
5-10 ohm/cm |
Uses average data measued for each wafer.