10 µm Specimen, Traceable, H Mount

For use with SEM, FIB, Sims, Auger, and LM.

  • Edge fiducial markers for grid position finding
  • Pitch of 10 µm ± 0.025 µm, 10 µm, ± 0.025µm, and 100 µm ± 0.25 µm with perpendicularity better than 0.01°
  • Unique serial number on each die for traceability
  • Line width of 300 nm ± 15 nm for 10 µm pitch lines and 400 nm ± 20 nm for 100 µm pitch lines
  • 300 nm ± 30 nm deep etched lines

Traceable and Certified Options

A traceable CD standard uses average data measured for each production wafer. Each certified CD standard is individually calibrated against a NIST measured standard.

Mounting Options

See chart. You may purchase your standard unmounted or pre-mounted.

Specifications

Die Size 4 mm x 4 mm
Calibration Area 3 mm x 3 mm
Material Ultra-flat silicon, P Boron doped
Thickness 525 µm ± 20 µm
Orientation <100>
Resistivity 5-10 ohm/cm

Uses average data measued for each wafer.

SKU: 79505-21-H
Pack: Each
A: H
$140.00