Chessy Test Specimen

A precise SEM test specimen for most all calibration applications.

The Structure

There are more than 1.6 million gold squares of 1µ size on silicon forming a 4-fold checkerboard pattern in an area of 5 mm square. The smallest metric checkerboard has a size of 10 x 10µ. Such checkerboards form larger metric checkerboards of 100 x 100µ - These again form checkerboards of 1 mm square. Finally, such 1 mm squares are arranged in the same manner covering a field of 5 mm square.

The edges of the empty corners in 0.1 and 1 mm checkerboards are additionally marked. The surrounding frame is 10µ wide and has an outer side length of 5.04 mm. The pattern was directly written by e-beam lithography using the new ZBA 31/32 from JENOPTIK.

The thickness layer of Si is 525 µm ± 25 µm.
The thickness layer of Au is 100 nm.



  • Calibration of SEM magnification in all ranges between 20x and 50,000x.
  • Check of equal scaling in X and Y
  • Check of orthogonality and distortion
  • Resolution test at high magnification on the edges of the gold squares

Motorized Stages
(especially for use with ESCOSY)

  • Measurement of reproducibility using stored position
  • Calibration of readings in X and Y
  • Calibration of stage orthogonality
  • Measurement of absolute positioning accuracy

Experimental Electron Lithography
(use with attachment ELPHY or PROXY-WRITER)

  • Generation of metric writing fields between 10µ and 5 mm square via mark recognition and alignment
  • Measurement of SEM distortion at any magnification via mark recognition on different places
  • Check of defocusing in outer areas

Article of Interest

Inspecting the SEM While in Operation

Cat # Description Pack Price Quote Quantity
Cat #: 79503-01 Description: Chessy; Test Specimen Pack: Each Price: $2,210.00 Add to Quote: