Evactron E50 Plasma Decontaminator-FEI/Tescan/Zeiss

Now available with alternate gas configuration

The Evactron E50 De-Contaminators are compact, high performance yet simplified plasma cleaners for Electron and Ion Beam Instruments such as SEMs, TEMs, and FIBs. The E50 delivers high power cleaning for superior resolution and imaging plus improved detector and probe sensitivity that are compromised by contamination. The compact design of the Evactron E50 Plasma Radical Source makes it a versatile solution for either SEM/FIB chambers, load locks, or sample prep chambers. The Evactron E50 Plasma Cleaners offer fast, effective, and powerful cleaning over a wide range of pressures enabling high quality, artifact free images and increased efficiency of sample analysis.


  • RF Power: 75W peak, 50W continuous
  • Dual action cleaning using plasma and UV afterglow
  • Energy efficient radio frequency hollow cathode plasma (RFHC)
  • " Pop" ignition at high vacuum
  • Programmable power, cleaning time, number of cycles, recipes
  • Bluetooth Android tablet or wired touchpad programming
  • Wide range pressure operation: 0.3 Pa/ 2 mTorr to 80 Pa/ 600 mTorr
  • Optional external interlock connection
  • TMP compatible, no advance venting needed
  • Fast cleaning, 100X+ faster than earlier generation Evactron models
  • Non-damaging to sensitive components–no sputter etch
  • PRS can be installed on the SEM chamber or the load lock
  • Push button cleaning operation
  • No match or gas flow adjustments needed for plasma ignition
  • TUV, NRTL, SEMI and CE compliance testing pending

Available in two models: the Evactron E50 Plasma De-Contaminator, featuring a wireless interface and the Evactron E50 E-TC Plasma De-Contaminator, featuring a hard-wired interface.

The Evactron E50 Plasma De-Contaminator was designed to remove hydrocarbon contamination from high vacuum chambers such as SEMs and FIBs. Its compact design fits most models of SEM and FIB chambers and loadlocks and comes in vertical and horizontal configurations.

The Evactron E50 E-TC features a tethered touchpad instead of wireless. It also has an optional ultra alternate gas source filter in addition to the regular ones available for each model.

Side by Side Comparison

Evactron E50 Evactron E50 E-TC
Desktop controller with pushbutton operation Desktop controller with pushbutton operation
Android tablet with Bluetooth communication Tethered touchpad communication package
Hardware interlock Hardware interlock
Chassis dimensions (WxHxD):
17.2" x 3.5" x 8.6" (44 x 8.9 x 22 cm)
Chassis dimensions (WxHxD):
17.2" x 3.5" x 8.6" (44 x 8.9 x 22 cm)
RF Power: 20-75 Watts at 13.56 MHz RFHC RF Power: 20-75 watts at 13.56 MHZ RFHC
100-240 VAC 50/60 Hz input 100-240 VAC 50/60 Hz input
RoHS Compliant RoHS Compliant

Ordering Information

System for Hitachi and JEOL.

Includes:Evactron E50 Plasma Radical Source
Evactron E50 Desktop Controller
Evactron E50 Cable Set (12.5" /3.8m)
Evactron E50 Communications Package with Bluetooth GUI and Android tablet
System user manual

Supplier: XEI Scientific
SKU: 91000-02
Pack: Each
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