Creating a liquid environment in SEM
Aquarius is the pioneer of using e-beam to test original fluids and liquid
samples. Aquarius can test and monitor coating materials in their original
form, especially the liquid state.
The functions of the chip and liquid sample holder are versatile (disposable
version for slurry testing, inline version for process monitoring, quick
assembly version for electrode testing) and high-resolution inspection
The system is capable of displaying the images of sample in its liquid state
under original conditions and providing analysis results such as particle size
distribution, dispersity, uniformity, concentration, shape and composition
required for R&D and production.
The liquid sample holder in the MFC system is compatible with different
preparation tools (such as powder disperser for powder size distribution
analysis, centrifuge for bio-sample morphology observation and membrane
filter for liquid defect identification) for static inspection in various
applications. The sample in the holder can be transferred to different
inspection platforms to obtain the correlative information and make
versatile and in-depth analysis of the sample possible.
Ultra-Thin Sample Adaptive Chips
Produced using the semi-conductor manufacturing process together with
surface treatment, the membrane can be made hydrophobic, hydrophilic or
bifunctional linkers for different applications, allowing samples under test to
automatically adhere to the observation window for best image resolution.
To ensure image quality, the membrane thickness is designed to be less
than 30 nm, yet it is made robust by adjusting the window size and shape
to withstand the pressure difference between the vacuum and atmosphere.
Liquid Sample Holder
Combing with microfluidics and high-precision pogo pin with leak-free
sealing design, the liquid sample holder is capable of controlling and
monitoring the micro-environment. The microfluidics designs were
optimized by Computational Fluid Dynamics (CFD) simulations to achieve
the best transportation model for the samples. The liquid sample holder
has special mechanical design to boost the operation efficiency and can
finish the sample loading within a minute. The electrical
charging/discharging can also be transmitted to the control system and
inside the microfluidics via pogo pin design. Additionally, the heat exchange
fluid can be circulated in one of the flow channels, thereby accomplishing
the functions of temperature control and fluid properties monitoring,
allowing nano-scale in-situ testing of the samples under their original
FlowVIEW Image Analysis Software
This software is included with the FlowVIEW Starter Kit.
- Fast - Finish the liquid image analysis within 1 minute
- Simple - The software interface has user-friendly design and it's easy to get started.
- Multi-Functional - Functions include Particle Size Distribution, Dispersion and Shape Analysis
- Automation - Full automation analysis with one-button
The FlowVIEW Aquarius "Liquid" SEM Starter Kit contains:
- 24 Microscopic Fluid Chips
- 24 Micro-Channel Substrate
- 24 Tips
- 1 Adapter
- 1 O-Ring
- 1 Gasket
- Acrylic Case with Holder
- Simple -
The liquid sample holder has special mechanical design to
boost the operation efficiency and can finish the sample loading within 0.5
- High Resolution -
Objects smaller than 10 nm can be easily observed
- High Compatibility -
Highly compatible with various models ( FEI JEOL
Hitachi ZEISS Phenom TSCAN ... ) It can be a shuttle to an Optical
Microscope/Fluorescence Microscope for in-situ observation
- Customized -
It can be placed with the silicon wafer & biochip substrate
for in-situ observation
|Aggregation After Dry Out
||Liquid sample in original state
After purchasing a starter kit, subsequent materials can be ordered in supplementary packs which include both micro-channel substrates and microscopic fluid chips.
Supplementary Packs include:
- 12 Microscopic Fluid Chips
- 12 Micro-Channel Substrate
Use for CMP slurry particles, wet etching, photoresist developing, electroplating. Tweezer, pipette, torque wrench, carrier box, storage box, 24 microscopic fluid chips.