The TurboQ is an automated and versatile turbo-pumped coater offering unparalleled ease of use. Recommended for sample preparation for the examination of specimens using Electron Microscopy (EM).
Available in 3 configurations based on your application needs
TurboQ S
Sputter coater for noble and/or oxidizing metals. Cr target offered as standard. Target options available: Pt, Ir, Au, W, Au/Pd, Pd, Cu, Ag, Ti, Co, Sn, ITO, Mg, Ta, Fe, Al, Mo, Ni.
TurboQ E
Evaporation coater for carbon/metal evaporation. Carbon rod source offered as standard. Carbon string offered as option.
TurboQ ES
Combined coater offering both sputter coating and carbon and metal evaporation. Cr target and carbon rod source available as standard. Target options available: Pt, Ir, Au, W, Au/Pd, Pd, Cu, Ag, Ti, Co, Sn, ITO, Mg, Ta, Fe, Al, Mo, Ni. Carbon fiber offered as option.
| Features |
- High vacuum instrument for ultra-high-resolution EM up to and beyond 200k
- Ultra fine grain size for high-resolution analysis
- Rapid cycle time for maximum sample throughput
- Tilt stage design giving uniform coating of complex 3D structures
- Film Thickness Monitor (FTM) to control deposition of coating
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- Intuitive and responsive touchscreen color panel design
- Multi-color LED visual status indicator offers process updates
- Pre-set recipes for standard protocols results in sample reproducibility
- Customizable recipes for tailored applications
- Easy and quick set-up of profiles
- Multiple stage options based on application needs
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Applications
Ultra-high-resolution magnification SEM and FIB-SEM — For Biological SEM Applications: Integrate the TurboQ S with the K850 Critical Point Dryer.
Coating of noble and oxidizing metals
Carbon coating for elemental analysis and coating of TEM grids - Use the TurboQ E with Carbon Rod Head. Integrate with GloQube for glow discharge and surface modification.
Carbon coating for elemental analysis and carbon coating of TEM grids — For Materials Workflow: Use TurboQ ES.
Site Requirements
Venting gas: Nitrogen supply for purging should be N4.8 (Zero Grade) 99.998% purity capable of supplying 0.5 bar (minimum 0.3 bar and maximum 1 bar) with nominal flow rate of 3 ± 0.2 liter/min. for 60 sec. The system is supplied with 3m plastic tubing 3mm I.D. x 6mm O.D. from quick release connectors to be fitted to a pressure regulator or plant supply.
Pumping gas: Argon supply for sputtering should be N4.8 (Zero Grade) 99.998% purity capable of supplying 0.5 bar (minimum 0.3 bar and maximum 1 bar) with nominal flow rate of 3 ± 0.2 liter/min. for a 4-minute maximum sputter cycle time (some instruments may have specially extended sputter cycles). The system is supplied with 3m plastic tubing 3mm I.D. x 6mm O.D. from quick release connectors on the rear of the unit. It is the customer’s responsibility to connect from this hose to the pressure regulator set at approximately 10psi, from gas bottle or plant supply. Typically, a system will use 0.2 liters of Argon for a 4-minute sputter cycle.
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| Specifications |
| Enclosure |
| Dimensions |
520mm (W) x 286mm (H) x 550mm (L), (+50mm on rear for cables) |
| Weight |
~22kg |
| Unit Weight |
38 Kg (ES model) |
| Package Weight |
54 Kg (ES model) |
| Instrument Size |
440mm (W) x 556mm (H) x 551mm (D) |
| Instrument Size with Chamber Open |
440mm (W) x 860mm (H) x 551mm (D) |
| Specimen Stage |
| Short stage: |
65mm (H) from chamber base, 50mm Ø diameter |
| Tall stage: |
145mm (H) from chamber base, 50mm Ø diameter |
| Chamber Size |
150mm Ø diameter, 220mm (H) |
| Ultimate Vacuum |
1 x 10-6 mbar |
| Operational Vacuum |
5 x 10-6 mbar |
| Vacuum Gauge Range |
1000 – 1 x 10-9 mbar |
| User Interface |
Touch screen color display |
| Supply Voltage |
100V – 240V |
| Sputter Coater (TurboQ S and TurboQ ES) |
| Sputter Target |
Target Disc style, 57mm Ø diameter x 0.3mm (thickness). Cr target supplied as standard. |
| Specimen Stage |
50mm Ø diameter rotating stage |
| Deposition Current |
1–150 mA |
| Deposition Rate |
0.1–20 nm/min (e.g. for Au) |
| Sputter Timer |
0–60 min |
| Evaporation Coater (TurboQ E and TurboQ ES) |
| Evaporation Current (rod) |
5–75A (dependent on process) |
| Outgas Current |
1–40A |
| Carbon Source |
3.2mm rods or carbon fiber |