X&Y Axis Standard, Traceable, J Mount, 2mm-100nm
Calibration over a wide measurement range without stage rotation.
- 2.0 mm to 100 nm scale range on X-axis
- 60 nm chrome for larger features and 20 nm chrome with 40 nm gold for high-resolution features to give increased contrast
- Unique serial number for each die
- Manufactured using advanced MEMS technology
Traceable and Certified Options- Traceable CD standards use average data measured for each wafer. Each certified CD standard is individually calibrated against a NIST measured standard.
Specifications
| Die Size |
2.5 mm x 2.5 mm |
| Lines |
Chrome and Gold |
| Silicon Thickness |
525 ± 20 µm |
| Scale Range Features |
| 2.0 mm to 100 nm |
2 mm, 1 mm, 0.5 m, 0.1 mm, 50 µm, 10 µm, 5 µm, 2 µm, 1 µm, 500 nm, 250 nm, and 100 nm |
SKU:
79505-05-J
Pack:
Each
A:
J
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