The EMS 7620 is a compact, low cost SEM sputter coater. When combined with the optional carbon attachment EMS 7620-CF it makes the ideal low-cost SEM sputtering and carbon coating system package. The EMS 7620 is fitted as standard with a glow discharge function, making it ideal for the hydrophilisation, or ’wetting’, of carbon-coated TEM grids and other surface modifications. The EMS 7620 is robust, easy to operate and is backed up with a three-year warranty.
The EMS 7620 is primarily designed for use with tungsten film SEMs. For extra fine grain coating required for most FE-SEM applications, high vacuum coating is required - see the EMS 150T, or for larger specimens see the EMS 300T T.
Features
- Low cost
- Simple operation
- Magnetic deflection sputter coating head
- Compact design
- Carbon fiber evaporation option
- Adjustable height specimen stage
- Easy to change sputter targets - gold/palladium (Au/Pd) standard
- Built to all the latest safety standards - features include positive break electromechanical interlock which ensures the sputter coating head is electrically isolated when the optional carbon attachment is in use
- Robust and reliable
- Three-year warranty
The SC7620 is primarily designed for coating specimens prior to examination in tungsten filament SEMs. For extra fine grain coating required for most FE-SEM applications, high vacuum coating is required – see the Q150T Plus or Q300T T Plus.
For a fully automatic coater for W-SEM applications, see the Q150R Plus.
Ease of operation
The SC7620 is ideal for the budget-conscious user who demands quality thin film deposition from an easy-to-use instrument. Designed for routine applications, the SC7620 uses a basic magnetron sputter head with a simple-to-replace disc target (gold/palladium as standard). The sputtering head is hinged for easy operation and fitted with electrical safety interlocks. A panel-mounted switch allows the system to be changed between sputter coating and glow discharge modes.
To prevent accidental damage, the high voltage lead is shielded. The plasma current is variable by adjustment of the vacuum level using an argon leak valve with the plasma voltage being preset. For maximum sputter coating efficiency, the gas injector system ensures that argon gas enters the chamber close to the plasma discharge. Venting is to argon.
Pumping requirement
A suitable rotary vacuum pump is required. The Pfeiffer DUO 6 5m3/hr two-stage rotary vacuum pump (91003) is ideal for this purpose. See Ordering Information for more details.
Fast cycle times, height-adjustable specimen stage
The 100 mm/4" diameter Pyrex cylinder is mounted on an aluminum collar and sealed with O-rings. The small vacuum chamber size means pump down times and cycle times are fast, and also allow a small economical rotary pump to be used.
The specimen stage is height-adjustable and can easily be removed to accommodate taller specimens. The deposition rate is controlled manually by a 180-second timer with 15-second resolution. Pressure and plasma current are monitored by analogue meters.
Sputtering and SEM carbon coating (option)
The SC7620 will deposit coatings suitable for use with tungsten-filament SEMs and has the advantage of simple operation, ensuring reliability and suitability for general use. It can quickly be converted to deposit carbon by the addition of an optional carbon evaporation attachment, consisting of a switchable voltage power supply and a carbon fiber head (see SC7620-CF below). The carbon attachment comes with an additional glass cylinder. This is taller than the standard sputter coater cylinder and ensures that the distance between the carbon fiber and the specimens is optimal for the evaporation process.
Glow discharge (hydrophilization)
A three-way switch on the front panel allows the SC7620 to be switched to glow discharge mode.
Freshly-made transmission electron microscopy (TEM) carbon support films tend to have a hydrophobic surface that hinders the collection of TEM sections from the surface of water baths and prevents the spreading of suspensions of particles in negative staining solutions. However, after glow discharge treatment with air, carbon film can be made hydrophilic and negatively-charged, thus allowing collection of TEM sections and easy spreading of aqueous suspensions.
Note: For a fully automated glow discharge solution, see the GloQube® Plus.
Pumping requirements
A 5m3/hr Pfeiffer DUO 6 two-stage rotary vacuum pump (91003) is recommended.
Carbon evaporation attachment
A carbon coating accessory (SC7620-CF), which consists of an evaporation power supply and carbon fiber head, is available. Fitting the optional carbon evaporation attachment is simple – the sputtering head is tilted back on its hinge and replaced with the carbon fiber head. Connection is then made to the power supply. To ensure that the exposed sputtering head cannot be powered when the add-on carbon head is under vacuum, a positive-break mechanical interlock ensures electrical isolation of the sputtering head. For a 'stand alone' SEM carbon coater, see the Q150R E Plus.
Selecting a target
Gold/Palladium (Au/Pd): Supplied as standard and has the same properties (sputtering rate, secondary electron yield, etc.) as gold, but the sputtered grain size is smaller.
Gold (Au): Gold sputter coating is still widely used in many laboratories.
Silver (Ag): Compared to the other metals, it is relatively easy to remove silver and it is therefore useful for museum, forensic and similar specimens.
Palladium (Pd): Sometimes used instead of gold and gold/palladium for x-ray microanalysis.
Specifications
| Dimensions |
340 mm W x 310 mm D x 330 mm H, including chamber (unpacked). Weight: 20 kg |
Site Requirements
| Electrical |
A suitable main electricity supply (110 VAC – 20 A or 240 VAC – 13 A, frequency 50/60 Hz) is required. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency supplied for either 230 V or 110 V operation at 50/60 Hz. The power rating is 250 VA excluding the rotary pump. The rotary pump outlet is rated at 230 V at 10 A or 110 V at 16 A. The 240 V pump outlet uses either a three-pin plug or 110 V standard US plug – both supplied.
Carbon evaporation attachment (option). The SC7620-CF carbon fiber evaporation accessory are supplied for either 230 V or 110 V operation at 50/60 Hz. A suitable main electricity supply (110 VAC – 20 A or 240 VAC – 13 A, frequency 50/60 Hz) is required. Check that the voltage label attached to the side of the cabinet is suitable for the local voltage and frequency.
|
| Sputtering Gas |
Argon gas (Zero Grade: 99.999%) fitted with a two-stage regulator in order to deliver gas at a pressure of around 5-10 psi (0.5 bar). |
| Space requirement |
340 mm W x 320 mm D x 310 mm H (including chamber and sputtering head). Weight: 14 kg. Additional space is required for the rotary pump which can be located either on the floor or on the bench with the coater. |
Options and Accessories
Pumps Requirements
A 50L/m two-stage rotary pump with oil mist filter is recommended If intending to use an existing rotary pump it is important that its capacity is 50L/m or greater.
Carbon Coating Accessory
A carbon coating accessory (SC7620-CF), which consists of an evaporation power supply and carbon fiber head, is available. Fitting the optional carbon evaporation attachment is simple. The normal sputtering head is tilted back and replaced with the carbon fiber head. Connection is then made to the power supply. To ensure that the exposed sputtering head cannot be powered when the add-on carbon head is under vacuum, a positive-break mechanical interlock ensures electrical isolation of the sputtering head. We also offer a 'stand alone' SEM carbon coater, see the Q150R Plus.
Choosing a target
Gold/Palladium (Au/Pd): Supplied as standard. Has the same properties (sputtering rate, secondary electron yield, cost) as gold but the sputtered grain size is smaller.
Gold (Au):Gold sputter coating is still widely used in many laboratories
Platinum (Pt):The sputtered grain size is smaller than gold or gold/palladium. Platinum has a slower sputtering rate and is more expensive than gold or gold/palladium.
Silver (Ag): Compared to the other metals, it is relatively easy to remove silver. Therefore it is useful for museum and forensic specimens.
Palladium (Pd): Sometimes used instead of gold, gold/palladium and platinum for x-ray microanalysis.
All targets are 57 mm Ø x 0.1 mm thick (unless specified otherwise)
EMS strives to maintain accurate pricing. However, due to fluctuations in precious metal prices, pricing on products containing precious metals is not guaranteed. We will contact you if there is a discrepancy.