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- Prepmaster™ Specimen Preparation Robot
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Sputter Coaters & Carbon Coaters
This product range is focused on sputter coaters and carbon coaters, offering a variety of systems, accessories, and parts for coating applications in SEM, FE-SEM, TEM grid coating, and thin film deposition.
The EMS selection includes entry-level and advanced sputter coaters like the MiniQS and Q150 series, optimized for SEM coating. The Q150T turbomolecular-pumped coater, suitable for SEM coating and many thin-film applications. We also supply large chamber systems for metal evaporation onto large diameter specimens. The turbo-pumped sputter coaters and dual-head systems allow sputtering of two metals without the need to break vacuum.
Carbon coater attachments and supplies, such as carbon fiber cords and rods, are available for carbon coating and evaporation processes.
Other replacement parts and high-purity metal sputtering targets for sputter coater cathodes are available as well. We supply silver, platinum, gold, and other metal sputtering targets of the highest purity, compatible across a range of sputtering units.
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Ordering Info
Dual Head Turbo-Pumped Sputter Coater
Two independent sputtering heads allow sequential sputtering of two metals without the need to break vacuum.
| Cat # | Description | Technical Doc | Pack | Price | Quote | Quantity | |
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| Cat #: Q300TD | Description: 300T D Plus Dual Target Sequential Sputtering System | Technical Doc | Pack: Each | Price: $0.00 |
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| Cat #: 3410 | Description: Sputtering Target 57mm 0 X 0.1mm Au | Pack: Each | Price: $0.00 |
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| Cat #: 3410-2 | Description: 57 mm Ø X 0.2 mm Au | Pack: Each | Price: $0.00 |
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| Cat #: 3411 | Description: Sputtering Target 57mm 0 X 0.1mm Gold/Palladium (80/20) | Pack: Each | Price: $0.00 |
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| Cat #: 3411-2 | Description: 57 mm Ø X 0.2 mm Gold/Palladium (80/20) | Pack: Each | Price: $0.00 |
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| Cat #: 3412 | Description: Sputtering Target 57mm 0 X 0.1mm Platinum | Pack: Each | Price: $0.00 |
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| Cat #: 3412-2 | Description: 57 mm Ø X 0.2 mm Platinum | Pack: Each | Price: $0.00 |
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| Cat #: 3413 | Description: Sputtering Target 57mm 0 X 0.1mm Ni | Pack: Each | Price: $0.00 |
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| Cat #: 3414 | Description: Sputtering Target 57mm 0 X 0.1mm Silver | Pack: Each | Price: $0.00 |
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| Cat #: 3415 | Description: Sputtering Target 57mm 0 X 0.1mm Palladium | Pack: Each | Price: $0.00 |
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| Cat #: 3416 | Description: Sputtering Target 57mm 0 X 0.1mm Cu | Pack: Each | Price: $0.00 |
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| Cat #: 3417 | Description: Sputtering Target 57mm 0 X 0.3mm Chromium | Pack: Each | Price: $0.00 |
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| Cat #: 3418 | Description: Sputtering Target 57mm 0 X 0.5mm Tungsten | Pack: Each | Price: $0.00 |
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| Cat #: 3419 | Description: Sputtering Target 57mm 0 X 1.5mm Chromium | Pack: Each | Price: $0.00 |
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| Cat #: 3420 | Description: Sputtering Target 57mm 0 X 0.2mm Tungsten | Pack: Each | Price: $0.00 |
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| Cat #: 3421 | Description: Sputtering Target 54mm 0 X 1.5mm Carbon | Pack: Each | Price: $0.00 |
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| Cat #: 3422 | Description: Sputtering Target 57mm 0 X 0.1mm Aluminium | Pack: Each | Price: $0.00 |
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| Cat #: 3423 | Description: Sputtering Target 57mm 0 X 0.1mm Platinum/Palladium (80/20) | Pack: Each | Price: $0.00 |
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| Cat #: 3424 | Description: Sputtering Target 57mm 0 X 1.5mm Titanium | Pack: Each | Price: $0.00 |
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| Cat #: 3425 | Description: Sputtering Target 57mm 0 X 0.3mm Platinum/Palladium (80/20) | Pack: Each | Price: $0.00 |
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| Cat #: 3426 | Description: Sputtering Target 57mm 0 X 0.3mm Au | Pack: Each | Price: $0.00 |
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| Cat #: 3427 | Description: Sputtering Target 57mm 0 X 0.3mm Gold/Palladium (80/20) | Pack: Each | Price: $0.00 |
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| Cat #: 3428 | Description: Sputtering Target 57mm 0 X 0.3mm Platinum | Pack: Each | Price: $0.00 |
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| Cat #: 3429 | Description: Sputtering Target 57mm 0 X 0.5mm Titanium | Pack: Each | Price: $0.00 |
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| Cat #: 3430 | Description: Sputtering Target 57mm 0 X 0.1mm Iron | Pack: Each | Price: $0.00 |
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| Cat #: 3431 | Description: Sputtering Target 57mm 0 X 0.3mm Iridium | Pack: Each | Price: $0.00 |
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| Cat #: 3432 | Description: Sputtering Target 57mm 0 X 0.1mm Cobalt | Pack: Each | Price: $0.00 |
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| Cat #: 3433 | Description: Sputtering Target 57mm 0 X 0.1mm Tin | Pack: Each | Price: $0.00 |
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| Cat #: 3434 | Description: Sputtering Target 57mm 0 X 0.1mm Molybdenum | Pack: Each | Price: $0.00 |
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| Cat #: 3435 | Description: Sputtering Target 57mm 0 X 0.3mm Magnesium | Pack: Each | Price: $0.00 |
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| Cat #: 3436 | Description: Sputtering Target 57mm 0 X 0.1mm Tantalum | Pack: Each | Price: $0.00 |
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| Cat #: 3437 | Description: Sputtering Target 57mm 0 X 3mm Indium Tin Oxide (90/10) | Pack: Each | Price: $0.00 |
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| Cat #: G6260 | Description: Glass Cylinder 6" | Pack: Each | Price: $0.00 |
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| Cat #: 10068 | Description: Additional Glass Cylinder Assembly | Pack: Each | Price: $0.00 |
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| Cat #: 10596 | Description: Extended Glass Cylinder Assembly | Pack: Each | Price: $0.00 |
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| Cat #: 6790-S | Description: Swinging Arm Stage Drive | Pack: Each | Price: $0.00 |
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| Cat #: 6800-S | Description: Rotating Specimen Stage | Pack: Each | Price: $0.00 |
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| Cat #: 6801 | Description: Rotating 50 mm Specimen Stage With Adjustable Tilt Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6802 | Description: 50 mm Variable Height Specimen Stage Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6803 | Description: 50 mm Rotary Tilting Stage Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6804 | Description: A 90 mm Specimen Stage For Microscope Slides Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 3435-5 | Description: 57 mm Ø X 0.3 mm Magnesium | Pack: Each | Price: $0.00 |
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| Cat #: 6805 | Description: Dual Channel Film Thickness Monitor Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6806 | Description: Spare Quartz Crystal Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6807 | Description: Extended Height Vacuum Chamber Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6808 | Description: Vacuum Spigot Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6809 | Description: A Lockable Emergency Stop (E-Stop) Switch Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6811 | Description: Coating Shields Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6812 | Description: Spares Kit Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 3409 | Description: 57 mm Ø X 0.76 mm Aluminum | Pack: Each | Price: $0.00 |
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| Cat #: 3411-3 | Description: 57 mm Ø X 0.3 mm Gold/Palladium (60/40) | Pack: Each | Price: $0.00 |
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| Cat # | Description | Pack | Price | Quote | Quantity | |
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| Cat #: 5700 | Description: 150V S Plus Sputter Coater | Pack: Each | Price: $0.00 |
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| Cat #: 5710 | Description: 150V E Plus Carbon Evaporator | Pack: Each | Price: $0.00 |
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| Cat #: 5720 | Description: 150V ES Plus Combined Sputtering and Carbon Coating System | Pack: Each | Price: $0.00 |
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| Cat # | Description | Technical Doc | Pack | Price | Quote | Quantity | |
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| Cat #: Q300TT | Description: 300T T Plus Triple Target, Large Chamber, Turbo-Pumped Sputter Coater | Technical Doc | Pack: Each | Price: $0.00 |
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| Cat # | Description | Pack | Price | Quote | Quantity | |
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| Cat #: 6548 | Description: XDS 5 Scroll Pump | Pack: Each | Price: $0.00 |
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Turbo-Pumped Sputter Coater / Carbon Coater for Glove Box
Suitable for SEM, TEM and many thin-film applications.
| Cat # | Description | MSDS | Pack | Price | Quote | Quantity | |
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| Cat #: Q150GB | Description: Turbo-Pumped Sputter Coater/Carbon Coater | Pack: Each | Price: $0.00 |
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Rotary pump requirements (needs to be ordered separately)
| Cat # | Description | MSDS | Pack | Price | Quote | Quantity | |
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| Cat #: 91003 | Description: Rv3 Rotary Vacuum Pump | Pack: Each | Price: $3,710.00 |
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| Cat #: 91003-E | Description: Rv3 Rotary Vacuum Pump, 220V | Pack: Each | Price: $3,710.00 |
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| Cat #: 6550-A | Description: Diaphragm Pump | Pack: Each | Price: $0.00 |
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Options and Accessories
| Cat # | Description | MSDS | Pack | Price | Quote | Quantity | |
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| Cat #: 4513 | Description: Glow Discharge Insert | Pack: Each | Price: $0.00 |
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| Cat #: 3230 | Description: Carbon Rod Evaporation Head Insert | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3240 | Description: Carbon Rod Evaporation Head Insert | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3250 | Description: Carbon Fiber Evaporation Head Insert | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3260 | Description: Metal Evaporation And Aperture Cleaning Head Insert | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3270 | Description: Extended Height Vacuum Chamber | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3290 | Description: Film Thickness Monitor | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3300 | Description: Spare Quartz Crystals | MSDS | Pack: Each | Price: $139.00 |
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| Cat #: 3320 | Description: Vacuum Gauge | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3600 | Description: Metal Evaporation Basket | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3630 | Description: Two-Year Spares Kit For EMS150T Es | MSDS | Pack: Each | Price: $0.00 |
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Specimen stages
| Cat # | Description | MSDS | Pack | Price | Quote | Quantity | |
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| Cat #: 6790-S | Description: Swinging Arm Stage Drive | Pack: Each | Price: $0.00 |
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| Cat #: 6800-S | Description: Rotating Specimen Stage | Pack: Each | Price: $0.00 |
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| Cat #: 6801 | Description: Rotating 50 mm Specimen Stage With Adjustable Tilt Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6802 | Description: 50 mm Variable Height Specimen Stage Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6803 | Description: 50 mm Rotary Tilting Stage Q300T D | Pack: Each | Price: $0.00 |
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| Cat #: 6804 | Description: A 90 mm Specimen Stage For Microscope Slides Q300T D | Pack: Each | Price: $0.00 |
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Carbon supplies
| Cat # | Description | MSDS | Pack | Price | Quote | Quantity | |
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| Cat #: 3500 | Description: Carbon Rods – 6.15mm 0 X 100mm Length (Unshaped) | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3510 | Description: Carbon Rods – 6.15mm 0 X 50mm Length (Shaped) | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3520 | Description: Carbon Rods - 3.05mm 0 X 50mm Length (Shaped) | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3530 | Description: Carbon Rods 3.05mm 0 X 300mm Length (Unshaped) | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3540 | Description: Carbon Fibre Cord - High Purity - 1M | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3550 | Description: Carbon Fibre Cord - High Purity - 5M | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3560 | Description: Carbon Fibre Cord - Standard Grade - 1M | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3570 | Description: Carbon Fibre Cord - Standard Grade - 10M | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3580 | Description: Carbon Fibre Cord - Standard Grade - 100M | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3590 | Description: Manual Rod Shaper For 6.15mm Ø Carbon Rods | MSDS | Pack: Each | Price: $0.00 |
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| Cat #: 3595 | Description: Manual Rod Shaper For 3.05mm Ø Carbon Rods | MSDS | Pack: Each | Price: $0.00 |
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Sputter Targets
The Q150 GB is fitted as standard with a 0.2 mm thick chromium (Cr) sputtering target. Other optional targets:
| Cat # | Description | MSDS | Pack | Price | Quote | Quantity | |
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| Cat #: 3410 | Description: Sputtering Target 57mm 0 X 0.1mm Au | Pack: Each | Price: $0.00 |
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| Cat #: 3411 | Description: Sputtering Target 57mm 0 X 0.1mm Gold/Palladium (80/20) | Pack: Each | Price: $0.00 |
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| Cat #: 3412 | Description: Sputtering Target 57mm 0 X 0.1mm Platinum | Pack: Each | Price: $0.00 |
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| Cat #: 3413 | Description: Sputtering Target 57mm 0 X 0.1mm Ni | Pack: Each | Price: $0.00 |
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| Cat #: 3414 | Description: Sputtering Target 57mm 0 X 0.1mm Silver | Pack: Each | Price: $0.00 |
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| Cat #: 3415 | Description: Sputtering Target 57mm 0 X 0.1mm Palladium | Pack: Each | Price: $0.00 |
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| Cat #: 3416 | Description: Sputtering Target 57mm 0 X 0.1mm Cu | Pack: Each | Price: $0.00 |
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| Cat #: 3417 | Description: Sputtering Target 57mm 0 X 0.3mm Chromium | Pack: Each | Price: $0.00 |
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| Cat #: 3418 | Description: Sputtering Target 57mm 0 X 0.5mm Tungsten | Pack: Each | Price: $0.00 |
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| Cat #: 3419 | Description: Sputtering Target 57mm 0 X 1.5mm Chromium | Pack: Each | Price: $0.00 |
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| Cat #: 3420 | Description: Sputtering Target 57mm 0 X 0.2mm Tungsten | Pack: Each | Price: $0.00 |
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| Cat #: 3421 | Description: Sputtering Target 54mm 0 X 1.5mm Carbon | Pack: Each | Price: $0.00 |
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| Cat #: 3422 | Description: Sputtering Target 57mm 0 X 0.1mm Aluminium | Pack: Each | Price: $0.00 |
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| Cat #: 3423 | Description: Sputtering Target 57mm 0 X 0.1mm Platinum/Palladium (80/20) | Pack: Each | Price: $0.00 |
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| Cat #: 3424 | Description: Sputtering Target 57mm 0 X 1.5mm Titanium | Pack: Each | Price: $0.00 |
Add to Quote:
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| Cat #: 3425 | Description: Sputtering Target 57mm 0 X 0.3mm Platinum/Palladium (80/20) | Pack: Each | Price: $0.00 |
Add to Quote:
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| Cat #: 3426 | Description: Sputtering Target 57mm 0 X 0.3mm Au | Pack: Each | Price: $0.00 |
Add to Quote:
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| Cat #: 3427 | Description: Sputtering Target 57mm 0 X 0.3mm Gold/Palladium (80/20) | Pack: Each | Price: $0.00 |
Add to Quote:
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| Cat #: 3428 | Description: Sputtering Target 57mm 0 X 0.3mm Platinum | Pack: Each | Price: $0.00 |
Add to Quote:
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| Cat #: 3429 | Description: Sputtering Target 57mm 0 X 0.5mm Titanium | Pack: Each | Price: $0.00 |
Add to Quote:
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| Cat #: 3430 | Description: Sputtering Target 57mm 0 X 0.1mm Iron | Pack: Each | Price: $0.00 |
Add to Quote:
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| Cat #: 3431 | Description: Sputtering Target 57mm 0 X 0.3mm Iridium | Pack: Each | Price: $0.00 |
Add to Quote:
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| Cat #: 3432 | Description: Sputtering Target 57mm 0 X 0.1mm Cobalt | Pack: Each | Price: $0.00 |
Add to Quote:
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| Cat #: 3433 | Description: Sputtering Target 57mm 0 X 0.1mm Tin | Pack: Each | Price: $0.00 |
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| Cat #: 3434 | Description: Sputtering Target 57mm 0 X 0.1mm Molybdenum | Pack: Each | Price: $0.00 |
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| Cat #: 3435 | Description: Sputtering Target 57mm 0 X 0.3mm Magnesium | Pack: Each | Price: $0.00 |
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| Cat #: 3436 | Description: Sputtering Target 57mm 0 X 0.1mm Tantalum | Pack: Each | Price: $0.00 |
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| Cat #: 3437 | Description: Sputtering Target 57mm 0 X 3mm Indium Tin Oxide (90/10) | Pack: Each | Price: $0.00 |
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