Critical Dimension Magnification Standard, X- and Y-Axis

Calibration over a wide measurement range without stage rotation.

  • 2.0 mm to 100 nm scale range on X-axis
  • 60 nm chrome for larger features and 20 nm chrome with 40 nm gold for high-resolution features to give increased contrast
  • Unique serial number for each die
  • Manufactured using advanced MEMS technology

Traceable and Certified Options- Traceable CD standards use average data measured for each wafer. Each certified CD standard is individually calibrated against a NIST measured standard.

Specifications

Die Size 2.5 mm x 2.5 mm
Lines Chrome and Gold
Silicon Thickness 525 ± 20 µm
Scale Range Features
2.0 mm to 100 nm 2 mm, 1 mm, 0.5 m, 0.1 mm, 50 µm, 10 µm, 5 µm, 2 µm, 1 µm, 500 nm, 250 nm, and 100 nm

2.0 mm to 100 nm Scale Range: Mounting Option: A

Cat # Description A Pack Price Quote Quantity
Cat #: 79505-05 Description: X&Y Axis Standard, Traceable, Unmounted, 2mm-100nm A: Unmounted Pack: Each Price: $781.00 Add to Quote:
Cat #: 79505-05-A Description: X&Y Axis Standard, Traceable, A Mount, 2mm-100nm A: A Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-B Description: X&Y Axis Standard, Traceable, B Mount, 2mm-100nm A: B Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-C Description: X&Y Axis Standard, Traceable, C Mount, 2mm-100nm A: C Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-D Description: X&Y Axis Standard, Traceable, D Mount, 2mm-100nm A: D Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-E Description: X&Y Axis Standard, Traceable, E Mount, 2mm-100nm A: E Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-F Description: X&Y Axis Standard, Traceable, F Mount, 2mm-100nm A: F Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-G Description: X&Y Axis Standard, Traceable, G Mount, 2mm-100nm A: G Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-H Description: X&Y Axis Standard, Traceable, H Mount, 2mm-100nm A: H Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-J Description: X&Y Axis Standard, Traceable, J Mount, 2mm-100nm A: J Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-K Description: X&Y Axis Standard, Traceable, K Mount, 2mm-100nm A: K Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-L Description: X&Y Axis Standard, Traceable, L Mount, 2mm-100nm A: L Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-M Description: X&Y Axis Standard, Traceable, M Mount, 2mm-100nm A: M Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-N Description: X&Y Axis Standard, Traceable, N Mount, 2mm-100nm A: N Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-P Description: X&Y Axis Standard, Traceable, P Mount, 2mm-100nm A: P Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-05-Q Description: X&Y Axis Standard, Traceable, Q Mount, 2mm-100nm A: Q Pack: Each Price: $816.00 Add to Quote:
Cat #: 79505-06 Description: X&Y Axis Standard, Certified, Unmounted, 2mm-100nm A: Unmounted Pack: Each Price: $1,865.50 Add to Quote:
Cat #: 79505-06-A Description: X&Y Axis Standard, Certified, A Mount, 2mm-100nm A: A Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-B Description: X&Y Axis Standard, Certified, B Mount, 2mm-100nm A: B Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-C Description: X&Y Axis Standard, Certified, C Mount, 2mm-100nm A: C Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-D Description: X&Y Axis Standard, Certified, D Mount, 2mm-100nm A: D Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-E Description: X&Y Axis Standard, Certified, E Mount, 2mm-100nm A: E Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-F Description: X&Y Axis Standard, Certified, F Mount, 2mm-100nm A: F Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-G Description: X&Y Axis Standard, Certified, G Mount, 2mm-100nm A: G Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-H Description: X&Y Axis Standard, Certified, H Mount, 2mm-100nm A: H Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-J Description: X&Y Axis Standard, Certified, J Mount, 2mm-100nm A: J Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-K Description: X&Y Axis Standard, Certified, K Mount, 2mm-100nm A: K Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-L Description: X&Y Axis Standard, Certified, L Mount, 2mm-100nm A: L Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-M Description: X&Y Axis Standard, Certified, M Mount, 2mm-100nm A: M Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-N Description: X&Y Axis Standard, Certified, N Mount, 2mm-100nm A: N Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-P Description: X&Y Axis Standard, Certified, P Mount, 2mm-100nm A: P Pack: Each Price: $1,982.00 Add to Quote:
Cat #: 79505-06-Q Description: X&Y Axis Standard, Certified, Q Mount, 2mm-100nm A: Q Pack: Each Price: $1,982.00 Add to Quote:

2.0 mm to 1 pm Scale Range: Mounting Option: A

Cat # Description A Pack Price Quote Quantity
Cat #: 79505-07 Description: X&Y Axis Standard, Traceable, Unmounted, 2mm-1μm A: Unmounted Pack: Each Price: $140.00 Add to Quote:
Cat #: 79505-07-A Description: X&Y Axis Standard, Traceable, A Mount, 2mm-1μm A: A Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-B Description: X&Y Axis Standard, Traceable, B Mount, 2mm-1μm A: B Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-C Description: X&Y Axis Standard, Traceable, C Mount, 2mm-1μm A: C Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-D Description: X&Y Axis Standard, Traceable, D Mount, 2mm-1μm A: D Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-E Description: X&Y Axis Standard, Traceable, E Mount, 2mm-1μm A: E Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-F Description: X&Y Axis Standard, Traceable, F Mount, 2mm-1μm A: Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-G Description: X&Y Axis Standard, Traceable, G Mount, 2mm-1μm A: G Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-H Description: X&Y Axis Standard, Traceable, H Mount, 2mm-1μm A: H Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-J Description: X&Y Axis Standard, Traceable, J Mount, 2mm-1μm A: J Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-K Description: X&Y Axis Standard, Traceable, K Mount, 2mm-1μm A: K Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-L Description: X&Y Axis Standard, Traceable, L Mount, 2mm-1μm A: L Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-M Description: X&Y Axis Standard, Traceable, M Mount, 2mm-1μm A: M Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-N Description: X&Y Axis Standard, Traceable, N Mount, 2mm-1μm A: N Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-P Description: X&Y Axis Standard, Traceable, P Mount, 2mm-1μm A: P Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-07-Q Description: X&Y Axis Standard, Traceable, Q Mount, 2mm-1μm A: Q Pack: Each Price: $158.00 Add to Quote:
Cat #: 79505-08 Description: X&Y Axis Standard, Certified, Unmounted, 2mm-1μm A: Unmounted Pack: Each Price: $1,224.50 Add to Quote:
Cat #: 79505-08-A Description: X&Y Axis Standard, Certified, A Mount, 2mm-1μm A: A Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-B Description: X&Y Axis Standard, Certified, B Mount, 2mm-1μm A: B Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-C Description: X&Y Axis Standard, Certified, C Mount, 2mm-1μm A: C Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-D Description: X&Y Axis Standard, Certified, D Mount, 2mm-1μm A: D Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-E Description: X&Y Axis Standard, Certified, E Mount, 2mm-1μm A: E Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-F Description: X&Y Axis Standard, Certified, F Mount, 2mm-1μm A: F Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-G Description: X&Y Axis Standard, Certified, G Mount, 2mm-1μm A: G Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-H Description: X&Y Axis Standard, Certified, H Mount, 2mm-1μm A: H Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-J Description: X&Y Axis Standard, Certified, J Mount, 2mm-1μm A: J Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-K Description: X&Y Axis Standard, Certified, K Mount, 2mm-1μm A: K Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-L Description: X&Y Axis Standard, Certified, L Mount, 2mm-1μm A: L Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-M Description: X&Y Axis Standard, Certified, M Mount, 2mm-1μm A: M Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-N Description: X&Y Axis Standard, Certified, N Mount, 2mm-1μm A: N Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-P Description: X&Y Axis Standard, Certified, P Mount, 2mm-1μm A: P Pack: Each Price: $1,254.00 Add to Quote:
Cat #: 79505-08-Q Description: X&Y Axis Standard, Certified, Q Mount, 2mm-1μm A: Q Pack: Each Price: $1,254.00 Add to Quote: