Ultra-Flat Silicon Wafers

These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.


  4" 6" 8"
Material: Silicon Silicon Silicon
Diameter: 100 mm 150 mm 200 mm
Orientation: <100> <100> <100>
Type/Dopant: P/Boron P/Boron P/Boron
Grade: Prime/CZ Virgin Prime/CZ Virgin Prime/CZ Virgin
Growth Method: CZ CZ CZ
Resistivity: 10-20 Ohm-cm 10-20 Ohm-cm 10-20 Ohm-cm
Thickness: 525 µm ±20 µm 675 µm ±20 µm 725 µm ±20 µm
TTV: <4.00µm <4.00µm <4.00µm
SFPD: <2.0µm <2.0µm <2.0µm
Warp: ≤30µm ≤30µm ≤30µm
Bow: ≤30µm ≤30µm ≤30µm
Particles: [email protected]≥0.3 µm [email protected]≥0.3 µm [email protected]≥0.3 µm
Front Surface: Polished Polished Polished
Back Surface: Etched Etched Etched
Flat: 2 per SEMI Standard 1 per SEMI Standard 2 per SEMI Standard
Site Flatness: <2.0 µm <2.0 µm <2.0 µm
Roughness: Typically 2-3Å Typically 2-3Å Typically 2-3Å
Cat # Description Pack Price Quote Quantity
Cat #: 71893-01 Description: Ultra-Flat Silicon Wafer 4" Pack: Each Price: $89.00 Add to Quote:
Cat #: 71893-02 Description: Ultra-Flat Silicon Wafer 6" Pack: Each Price: $114.00 Add to Quote:
Cat #: 71893-03 Description: Ultra-Flat Silicon Wafer 8" Pack: Each Price: $138.00 Add to Quote: